[Scan]
initial_time=2016-01-28T17:48:01
final_time=2016-01-28T17:48:20
ip_count=19
run=1026
dataset=3
scan=178
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.82568E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.40464E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.44343E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.70046E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.61504E-8
mult1=-1.14863E-8
mult2=-2.77051E-9
rf_tmon=-5.75013E-3
rf_agc=3.27087E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.95331E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.10235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05132E1
cs_ea1_imon=1.22675E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06058E0
lens1_imon=1.44185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.40448E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84839E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.20378E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.42107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.66475E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.0554E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.91608E-8
tplens_vset=1.4E-1
tplens_vmon=1.59697E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25425E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=9.04691E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=9.43763E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42514E0
os_ea2_imon=-8.65324E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73397E-1
os_ef2bup_imon=-5.44141E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.37193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.22659E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.52611E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.14188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.54368E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.29269E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.40804E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61506E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.24731E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23015E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63792E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.53081E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22024E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.96843E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.94E2	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80018E1	-4.52995E-4	-8.80001E1	3.09944E-4	4.93526E-3	9.32693E-2	2.73222E1	-3.26897E1	-3.27788E1	2.67845E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.0E0	9.16E3	7.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80017E1	-4.76837E-4	-8.80003E1	3.8147E-4	4.88758E-3	9.3317E-2	2.7266E1	-3.26735E1	-3.2587E1	2.68088E1	1.19902E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.00966E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80014E1	-5.48363E-4	-8.80004E1	4.52995E-4	4.673E-3	9.34124E-2	2.73022E1	-3.26608E1	-3.25038E1	2.67978E1	1.19809E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.00041E-1
4.0E0	2.164E3	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80015E1	-5.24521E-4	-8.80006E1	3.57628E-4	4.69685E-3	9.34362E-2	2.7302E1	-3.26847E1	-3.26978E1	2.68388E1	1.19841E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.99594E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80016E1	-8.58307E-4	-8.80003E1	1.19209E-4	4.86374E-3	9.35793E-2	2.72809E1	-3.26526E1	-3.26284E1	2.68046E1	1.19829E-7	2.51725E-3	2.51725E-3	6.31879E-3	3.00794E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80014E1	-1.0252E-3	-8.80004E1	2.38419E-5	4.98295E-3	9.37223E-2	2.73207E1	-3.26801E1	-3.25389E1	2.67854E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-5.24521E-4	-8.80003E1	7.15256E-5	4.69685E-3	9.34124E-2	2.7248E1	-3.26723E1	-3.27366E1	2.68123E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80017E1	-5.96046E-4	-8.80004E1	1.90735E-4	4.8399E-3	9.31978E-2	2.72962E1	-3.26649E1	-3.25965E1	2.68253E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80016E1	-4.52995E-4	-8.80004E1	2.86102E-4	4.98295E-3	9.32455E-2	2.72979E1	-3.26554E1	-3.25046E1	2.68316E1	1.19595E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80014E1	-1.90735E-4	-8.80004E1	7.15256E-5	4.8399E-3	9.32932E-2	2.73147E1	-3.26687E1	-3.26308E1	2.6789E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
1.4E1	3.1E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80013E1	-6.67572E-4	-8.80003E1	5.00679E-4	4.86374E-3	9.34601E-2	2.72892E1	-3.26708E1	-3.27481E1	2.68388E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.99E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80015E1	-9.77516E-4	-8.80009E1	6.67572E-4	5.05447E-3	9.32455E-2	2.73045E1	-3.26648E1	-3.26063E1	2.68041E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00197E-1
1.6E1	3.1E1	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80014E1	-8.82149E-4	-8.80006E1	2.86102E-4	4.91142E-3	9.36031E-2	2.73394E1	-3.26666E1	-3.24713E1	2.6795E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.03545E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80011E1	-7.39098E-4	-8.80008E1	3.33786E-4	5.14984E-3	9.35555E-2	2.7334E1	-3.26337E1	-3.25163E1	2.67974E1	1.19978E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.03081E-1
1.8E1	2.23E2	0.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80013E1	-7.15256E-4	-8.80006E1	4.29153E-4	4.93526E-3	9.33886E-2	2.7321E1	-3.26795E1	-3.27455E1	2.68082E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02659E-1
1.9E1	3.05E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80016E1	-8.82149E-4	-8.80007E1	3.33786E-4	4.69685E-3	9.35316E-2	2.73358E1	-3.2672E1	-3.25222E1	2.68644E1	1.20016E-7	2.51956E-3	2.51956E-3	6.3074E-3	3.02342E-1
2.0E1	2.27E3	1.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80016E1	-7.86781E-4	-8.80006E1	7.15256E-5	4.86374E-3	9.36985E-2	2.73076E1	-3.26572E1	-3.26622E1	2.67751E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01995E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80013E1	-5.24521E-4	-8.80003E1	7.15256E-5	4.8399E-3	9.34124E-2	2.73175E1	-3.26638E1	-3.26231E1	2.67968E1	1.19883E-7	2.51384E-3	2.51384E-3	6.3074E-3	3.00794E-1
2.2E1	1.55E2	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80017E1	-3.33786E-4	-8.80003E1	2.38419E-4	4.81606E-3	9.37223E-2	2.7255E1	-3.26555E1	-3.26992E1	2.67972E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80018E1	-4.29153E-4	-8.80002E1	2.6226E-4	4.79221E-3	9.37939E-2	2.73315E1	-3.26681E1	-3.25425E1	2.68028E1	1.19941E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.01356E-1