[Scan]
initial_time=2016-01-28T17:48:27
final_time=2016-01-28T17:48:47
ip_count=19
run=1026
dataset=3
scan=179
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.80782E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.50072E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.43428E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.69582E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.62027E-8
mult1=-1.12334E-8
mult2=-2.6707E-9
rf_tmon=-5.05918E-3
rf_agc=3.35919E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.39625E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.96541E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53551E1
cs_ef1b_imon=3.09095E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.01995E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.25956E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0744E0
lens1_imon=1.44906E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.96723E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.40448E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.99399E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.20566E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.30555E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.42035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2563E0
cs_ionrep_imon=9.66114E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93294E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.04559E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.91094E-8
tplens_vset=1.4E-1
tplens_vmon=1.63783E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25046E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98198E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.81433E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=9.37995E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45578E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06052E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0812E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57845E-1
os_ef2bup_imon=-5.48337E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02012E1
cs_anode2_imon=2.10293E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72715E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68069E1
iondef4_imon=1.07148E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=6.16126E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.50586E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12551E0
cs_ionaccel_imon=-9.75966E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47094E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=2.01468E-1
window_imon=-1.19491E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86292E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.40083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.12829E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.40549E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0752E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60814E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30889E1
cs_fil1_imon=9.25953E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25613E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63299E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.95879E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.58196E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21864E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.09394E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.86E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80015E1	-8.10623E-4	-8.80003E1	3.57628E-4	4.8399E-3	9.36985E-2	2.73086E1	-3.26944E1	-3.25362E1	2.6804E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01609E-1
2.0E0	9.2E3	1.3E1	3.16E2	1.6E2	-7.37103E-2	-8.80019E1	-6.4373E-4	-8.80004E1	2.86102E-4	5.10216E-3	9.35555E-2	2.73051E1	-3.26395E1	-3.25599E1	2.67944E1	1.19851E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.02511E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80016E1	-6.91414E-4	-8.80003E1	5.72205E-4	4.64916E-3	9.3627E-2	2.73139E1	-3.26638E1	-3.26012E1	2.67862E1	1.19872E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00144E-1
4.0E0	2.065E3	1.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80018E1	-9.53674E-4	-8.80004E1	3.09944E-4	4.79221E-3	9.36985E-2	2.73434E1	-3.2685E1	-3.26655E1	2.67986E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80017E1	-7.62939E-4	-8.80004E1	1.43051E-4	4.88758E-3	9.36508E-2	2.73204E1	-3.26615E1	-3.26609E1	2.68106E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80018E1	-7.62939E-4	-8.80002E1	5.24521E-4	4.72069E-3	9.3627E-2	2.72901E1	-3.26825E1	-3.276E1	2.67876E1	1.2033E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80016E1	-3.8147E-4	-8.80002E1	3.57628E-4	4.72069E-3	9.36985E-2	2.72955E1	-3.26308E1	-3.2614E1	2.68094E1	1.20043E-7	2.51826E-3	2.51826E-3	6.33486E-3	3.00563E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80016E1	-2.6226E-4	-8.80002E1	3.8147E-4	4.8399E-3	9.33647E-2	2.73021E1	-3.26614E1	-3.24656E1	2.68123E1					
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80014E1	-2.6226E-4	-8.80003E1	7.15256E-5	4.95911E-3	9.39369E-2	2.73087E1	-3.26579E1	-3.24037E1	2.67974E1	1.19757E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.9978E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80014E1	-1.66893E-4	-8.80002E1	3.09944E-4	5.03063E-3	9.377E-2	2.73063E1	-3.26849E1	-3.25533E1	2.6813E1	1.20311E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1
1.4E1	3.28E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80014E1	-5.00679E-4	-8.80004E1	2.38419E-4	5.24521E-3	9.38892E-2	2.72841E1	-3.26693E1	-3.27336E1	2.68166E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31014E-3	3.01871E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80015E1	-4.29153E-4	-8.80002E1	3.33786E-4	5.05447E-3	9.35316E-2	2.73014E1	-3.26689E1	-3.26995E1	2.68082E1					
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80018E1	-7.86781E-4	-8.80004E1	1.19209E-4	5.14984E-3	9.35316E-2	2.73069E1	-3.26803E1	-3.25375E1	2.67938E1	1.19925E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99613E-1
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80016E1	-4.76837E-4	-8.80003E1	-2.38419E-5	4.72069E-3	9.34839E-2	2.73015E1	-3.26735E1	-3.26855E1	2.68124E1	1.19749E-7	2.52599E-3	2.52599E-3	6.33436E-3	2.98665E-1
1.8E1	2.09E2	0.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80016E1	-7.86781E-4	-8.80004E1	2.38419E-5	4.88758E-3	9.34362E-2	2.73009E1	-3.26891E1	-3.25569E1	2.68082E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.00824E-1
1.9E1	3.57E2	1.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80013E1	-6.19888E-4	-8.80003E1	5.24521E-4	4.79221E-3	9.36031E-2	2.73159E1	-3.26669E1	-3.2489E1	2.6813E1	1.19925E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.01475E-1
2.0E1	2.251E3	5.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80014E1	-6.4373E-4	-8.80004E1	1.43051E-4	4.8399E-3	9.36747E-2	2.72757E1	-3.26843E1	-3.2605E1	2.68016E1	1.19653E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80013E1	-5.00679E-4	-8.80005E1	3.57628E-4	4.55379E-3	9.36508E-2	2.73339E1	-3.26651E1	-3.26524E1	2.68178E1	1.19697E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
2.2E1	1.61E2	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80014E1	-5.72205E-4	-8.80007E1	2.6226E-4	4.81606E-3	9.36747E-2	2.73016E1	-3.26378E1	-3.27334E1	2.68157E1	1.20226E-7	2.52647E-3	2.52647E-3	6.30192E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80016E1	-5.00679E-4	-8.80004E1	3.33786E-4	4.95911E-3	9.35555E-2	2.72715E1	-3.26458E1	-3.25046E1	2.68069E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00966E-1