[Scan]
initial_time=2016-01-28T17:51:34
final_time=2016-01-28T17:51:53
ip_count=19
run=1026
dataset=3
scan=186
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.84061E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.99742E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.45773E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.64449E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.62493E-8
mult1=-1.03623E-8
mult2=-2.63703E-9
rf_tmon=-4.47408E-3
rf_agc=3.34979E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=5.73146E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68922E0
bslens_imon=2.77686E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20408E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53624E1
cs_ef1b_imon=3.10097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.24324E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05838E0
lens1_imon=1.24783E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64523E1
os_ef1alow_imon=2.96722E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.40817E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85075E1
cs_ef1a_imon=3.00755E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.16457E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11182E1
os_restr1_imon=4.29802E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15524E1
os_ea1_imon=2.4346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.07868E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27451E0
cs_ionrep_imon=9.60084E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.04581E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.88733E-8
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27039E1
iondef3_imon=1.48108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.80051E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3512E0
ionrepsh_imon=9.17611E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74849E1
cs_ef2b_imon=3.12008E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42199E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71205E1
cs_ef2a_imon=3.17988E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07019E0
os_ef2alow_imon=-2.57717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78159E-1
os_ef2bup_imon=-5.415E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10941E1
os_restr2_imon=3.3568E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01715E1
cs_anode2_imon=2.09818E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72986E1
iondef1_imon=1.08361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.0692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.09269E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.30843E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12896E0
cs_ionaccel_imon=-1.09103E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56163E1
einzel_imon=7.62061E-6
window_vset=0.0E0
window_vmon=1.68274E-1
window_imon=-1.03441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39183E-4
mask2_vset=0.0E0
mask2_vmon=-1.86503E1
mask2_imon=-7.83184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.58692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.38706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.85072E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.41152E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06946E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60109E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30885E1
cs_fil1_imon=9.24993E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32535E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62288E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.62632E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54011E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36199E-1
cs_fil2_imon=-2.6912E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29545E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21733E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.1969E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25004E-1
res40_imon=-2.4781E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.03E2	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80014E1	-2.6226E-4	-8.80001E1	7.15256E-5	5.24521E-3	9.36985E-2	2.73198E1	-3.26944E1	-3.28165E1	2.68024E1	1.20142E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99845E-1
2.0E0	8.9E3	8.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80015E1	-3.09944E-4	-8.80002E1	4.52995E-4	5.10216E-3	9.37223E-2	2.73088E1	-3.26646E1	-3.27705E1	2.68313E1	1.19653E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9926E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80018E1	-2.6226E-4	-8.80003E1	2.86102E-4	5.17368E-3	9.35078E-2	2.73122E1	-3.2662E1	-3.27092E1	2.6792E1	1.19819E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.0041E-1
4.0E0	2.107E3	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80018E1	-6.4373E-4	-8.8E1	2.38419E-4	5.126E-3	9.36031E-2	2.73009E1	-3.26603E1	-3.27636E1	2.67998E1	1.19991E-7	2.52131E-3	2.52131E-3	6.33919E-3	3.03637E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80016E1	-6.19888E-4	-8.80001E1	7.39098E-4	4.8399E-3	9.34362E-2	2.73552E1	-3.26679E1	-3.26986E1	2.68214E1	1.19861E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80015E1	-4.29153E-4	-8.8E1	5.00679E-4	4.86374E-3	9.34362E-2	2.7278E1	-3.26744E1	-3.26531E1	2.67962E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80014E1	-3.09944E-4	-8.80004E1	4.52995E-4	5.00679E-3	9.35793E-2	2.72715E1	-3.26956E1	-3.26997E1	2.68244E1	1.19902E-7	2.51632E-3	2.51632E-3	6.35601E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80017E1	-4.76837E-4	-8.8E1	3.09944E-4	5.03063E-3	9.38416E-2	2.73087E1	-3.26843E1	-3.27846E1	2.68268E1	1.198E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.0148E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80016E1	-4.05312E-4	-8.8E1	3.57628E-4	5.05447E-3	9.33886E-2	2.72793E1	-3.26867E1	-3.26326E1	2.68382E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80013E1	-5.48363E-4	-8.80001E1	1.90735E-4	5.26905E-3	9.34362E-2	2.72859E1	-3.26494E1	-3.2617E1	2.67842E1	1.19872E-7	2.51136E-3	2.51136E-3	6.34099E-3	3.01209E-1
1.4E1	2.8E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80015E1	-4.29153E-4	-8.80004E1	2.38419E-4	5.05447E-3	9.35316E-2	2.73157E1	-3.2685E1	-3.26107E1	2.67917E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01223E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80013E1	-7.15256E-4	-8.80003E1	9.53674E-5	5.07832E-3	9.36508E-2	2.73021E1	-3.26837E1	-3.24872E1	2.68137E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-5.48363E-4	-8.80004E1	1.19209E-4	4.88758E-3	9.34839E-2	2.73181E1	-3.26331E1	-3.26573E1	2.6803E1	1.19819E-7	2.51915E-3	2.51915E-3	6.29067E-3	3.01475E-1
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80016E1	-6.4373E-4	-8.80006E1	1.19209E-4	4.88758E-3	9.33886E-2	2.72991E1	-3.26687E1	-3.2769E1	2.68028E1	1.19697E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
1.8E1	2.04E2	1.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80017E1	-8.34465E-4	-8.80007E1	1.19209E-4	5.26905E-3	9.3317E-2	2.73195E1	-3.26849E1	-3.25185E1	2.67932E1	1.19731E-7	2.51716E-3	2.51716E-3	6.32112E-3	3.02002E-1
1.9E1	3.46E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80019E1	-5.96046E-4	-8.80004E1	3.09944E-4	5.05447E-3	9.33409E-2	2.72955E1	-3.26795E1	-3.24548E1	2.681E1					
2.0E1	2.216E3	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80017E1	-7.86781E-4	-8.80002E1	3.8147E-4	4.79221E-3	9.32455E-2	2.73141E1	-3.26789E1	-3.25527E1	2.68082E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02659E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80015E1	-6.4373E-4	-8.80001E1	4.76837E-5	4.69685E-3	9.34124E-2	2.73063E1	-3.26825E1	-3.26543E1	2.68346E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
2.2E1	1.82E2	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80014E1	-7.39098E-4	-8.80003E1	7.15256E-5	4.95911E-3	9.34601E-2	2.73092E1	-3.26885E1	-3.26744E1	2.68256E1	1.20191E-7	2.5225E-3	2.5225E-3	6.29624E-3	3.0041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.80017E1	-7.39098E-4	-8.80004E1	3.09944E-4	5.24521E-3	9.36031E-2	2.72986E1	-3.26644E1	-3.27039E1	2.67926E1	1.1969E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.00097E-1