[Scan]
initial_time=2016-01-28T17:52:00
final_time=2016-01-28T17:52:20
ip_count=19
run=1026
dataset=3
scan=187
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.78148E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.28591E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.4295E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.63292E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.62812E-8
mult1=-1.01141E-8
mult2=-2.75461E-9
rf_tmon=-4.74544E-3
rf_agc=3.27546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.21064E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61001E0
bslens_imon=2.5332E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19729E1
lens5a_imon=1.96947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05056E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53612E1
cs_ef1b_imon=3.10415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05278E1
cs_ea1_imon=1.24647E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08721E0
lens1_imon=1.35836E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.96246E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.40117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84869E1
cs_ef1a_imon=3.0106E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.15752E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11414E1
os_restr1_imon=4.29506E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15237E1
os_ea1_imon=2.44896E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63496E1
os_ef1bup_imon=3.08708E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25153E0
cs_ionrep_imon=9.55489E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01883E1
cs_anode1_imon=2.0488E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.88552E-8
tplens_vset=1.4E-1
tplens_vmon=1.62948E0
tplens_imon=-4.38042E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.49953E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.5692E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.24773E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23844E0
ionrepsh_imon=9.25093E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33282E1
lens5b_imon=2.17438E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.1202E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39781E0
os_ea2_imon=-8.0347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71212E1
cs_ef2a_imon=3.17859E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04175E0
os_ef2alow_imon=-2.63013E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69541E-1
os_ef2bup_imon=-5.32741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11067E1
os_restr2_imon=3.37149E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29962E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01986E1
cs_anode2_imon=2.09796E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.074E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.07846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.06847E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.34059E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13469E0
cs_ionaccel_imon=-1.0459E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56269E1
einzel_imon=7.65028E-6
window_vset=0.0E0
window_vmon=1.74316E-1
window_imon=-1.16881E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39193E-4
mask2_vset=0.0E0
mask2_vmon=-1.86538E1
mask2_imon=-8.58112E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.80971E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.97298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.13691E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34474E0
defgridb_imon=6.03721E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.40605E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07386E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6005E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30889E1
cs_fil1_imon=9.26026E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26104E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62129E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54005E-2
os_fil2_imon=-2.61381E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.802E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40338E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34497E-1
cs_fil2_imon=-2.49431E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22726E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21797E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.44238E-1
res40_imon=-2.46624E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.07E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80019E1	-5.72205E-4	-8.80005E1	5.24521E-4	4.81606E-3	9.3174E-2	2.73201E1	-3.26645E1	-3.28069E1	2.68023E1	1.1988E-7	2.52093E-3	2.52093E-3	6.323E-3	2.99506E-1
2.0E0	8.957E3	6.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80019E1	-2.6226E-4	-8.80004E1	4.29153E-4	4.76837E-3	9.34601E-2	2.73216E1	-3.26531E1	-3.27741E1	2.6807E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80016E1	-4.05312E-4	-8.80004E1	-1.19209E-4	4.74453E-3	9.36747E-2	2.73228E1	-3.26638E1	-3.28036E1	2.68208E1	1.19913E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.02396E-1
4.0E0	2.046E3	1.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80018E1	-7.39098E-4	-8.80006E1	9.53674E-5	4.81606E-3	9.36747E-2	2.73177E1	-3.2647E1	-3.27107E1	2.68232E1	1.198E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80019E1	-6.19888E-4	-8.80002E1	2.38419E-4	5.05447E-3	9.39131E-2	2.73363E1	-3.26987E1	-3.25485E1	2.67856E1	1.19549E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80017E1	-6.19888E-4	-8.80004E1	3.09944E-4	5.126E-3	9.37223E-2	2.72967E1	-3.26915E1	-3.25461E1	2.68163E1	1.19646E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80017E1	-5.72205E-4	-8.80007E1	9.53674E-5	5.31673E-3	9.37223E-2	2.72546E1	-3.26398E1	-3.27486E1	2.67968E1	1.19872E-7	2.51693E-3	2.51693E-3	6.27954E-3	3.02813E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80019E1	-8.10623E-4	-8.80004E1	9.53674E-5	5.55515E-3	9.38654E-2	2.72799E1	-3.26567E1	-3.27408E1	2.6785E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01871E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80019E1	-8.34465E-4	-8.80001E1	3.57628E-4	5.62668E-3	9.33886E-2	2.73279E1	-3.26506E1	-3.26146E1	2.68132E1	1.20209E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80019E1	-9.29832E-4	-8.80002E1	6.4373E-4	4.98295E-3	9.35316E-2	2.73128E1	-3.26726E1	-3.27363E1	2.68007E1	1.19939E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9913E-1
1.4E1	3.18E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80018E1	-6.67572E-4	-8.8E1	4.05312E-4	5.19753E-3	9.36747E-2	2.73201E1	-3.26879E1	-3.25521E1	2.67908E1					
1.5E1	1.1E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80018E1	-5.96046E-4	-8.80008E1	3.33786E-4	5.14984E-3	9.32932E-2	2.73222E1	-3.26418E1	-3.25066E1	2.68157E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9978E-1
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80018E1	-1.66893E-4	-8.80008E1	4.29153E-4	4.98295E-3	9.35078E-2	2.73198E1	-3.2658E1	-3.27533E1	2.67954E1	1.19836E-7	2.51479E-3	2.51479E-3	6.32665E-3	3.00966E-1
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80015E1	-1.90735E-4	-8.8001E1	2.86102E-4	4.8399E-3	9.28879E-2	2.73204E1	-3.26642E1	-3.25859E1	2.6829E1	1.20296E-7	2.51168E-3	2.51168E-3	6.32509E-3	2.99399E-1
1.8E1	2.02E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80013E1	-5.72205E-4	-8.80006E1	4.76837E-5	5.22137E-3	9.31978E-2	2.73387E1	-3.27053E1	-3.24073E1	2.68024E1	1.1984E-7	2.51642E-3	2.51642E-3	6.33065E-3	3.00916E-1
1.9E1	3.31E2	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80016E1	-6.4373E-4	-8.80008E1	-9.53674E-5	4.55379E-3	9.34601E-2	2.734E1	-3.26634E1	-3.24345E1	2.68082E1	1.19891E-7	2.51919E-3	2.51919E-3	6.34982E-3	3.006E-1
2.0E1	2.221E3	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80016E1	-4.76837E-4	-8.80005E1	-9.53674E-5	4.88758E-3	9.3317E-2	2.72921E1	-3.26467E1	-3.24874E1	2.67854E1	1.20337E-7	2.51642E-3	2.51642E-3	6.3074E-3	3.03697E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80015E1	-4.05312E-4	-8.80007E1	1.90735E-4	5.00679E-3	9.35793E-2	2.73087E1	-3.26374E1	-3.25665E1	2.67824E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01223E-1
2.2E1	1.72E2	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80014E1	-5.24521E-4	-8.80003E1	3.8147E-4	5.17368E-3	9.35793E-2	2.72985E1	-3.26903E1	-3.26681E1	2.68146E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80016E1	-5.72205E-4	-8.80003E1	1.90735E-4	5.05447E-3	9.34839E-2	2.73134E1	-3.26885E1	-3.26366E1	2.68046E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00966E-1