[Scan]
initial_time=2016-01-28T17:52:54
final_time=2016-01-28T17:53:13
ip_count=19
run=1026
dataset=3
scan=189
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.82186E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.04975E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.43988E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.64207E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.62562E-8
mult1=-9.35509E-9
mult2=-2.75055E-9
rf_tmon=-3.92962E-3
rf_agc=3.35439E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.481E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18697E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04837E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53951E1
cs_ef1b_imon=3.09686E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.22711E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07801E0
lens1_imon=1.58604E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64487E1
os_ef1alow_imon=2.96619E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03498E1
cs_ea2_imon=1.41277E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8363E1
cs_ef1a_imon=3.00129E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.16442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.43874E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.08122E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=9.62509E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.04177E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.87963E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25401E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.9165E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=9.4124E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39029E0
os_ea2_imon=-8.54509E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.18895E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55528E-1
os_ef2bup_imon=-5.37911E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.35715E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.1005E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.07138E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.07527E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.35454E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.24009E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56521E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=1.8525E-1
window_imon=-1.14278E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39251E-4
mask2_vset=0.0E0
mask2_vmon=-1.8646E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.43092E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07069E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60055E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30943E1
cs_fil1_imon=9.26133E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28162E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77914E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34029E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19544E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45305E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.9E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80017E1	-5.24521E-4	-8.80007E1	1.43051E-4	5.14984E-3	9.36508E-2	2.72727E1	-3.26614E1	-3.26195E1	2.68064E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01995E-1
2.0E0	8.96E3	6.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80018E1	-4.52995E-4	-8.80007E1	0.0E0	5.03063E-3	9.35316E-2	2.72793E1	-3.26104E1	-3.2501E1	2.68106E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.02511E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80016E1	-5.96046E-4	-8.80008E1	2.38419E-4	5.03063E-3	9.35555E-2	2.73269E1	-3.26868E1	-3.26685E1	2.68018E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.9829E-1
4.0E0	2.08E3	1.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80017E1	-5.96046E-4	-8.80006E1	2.14577E-4	5.22137E-3	9.35793E-2	2.73039E1	-3.26669E1	-3.25521E1	2.68132E1	1.1979E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.97344E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80014E1	-9.29832E-4	-8.80004E1	3.57628E-4	5.10216E-3	9.38177E-2	2.72576E1	-3.26795E1	-3.25311E1	2.67989E1	1.19819E-7	2.51136E-3	2.51136E-3	6.3074E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80018E1	-9.53674E-4	-8.80005E1	4.76837E-5	5.03063E-3	9.36508E-2	2.73225E1	-3.26735E1	-3.26831E1	2.68244E1	1.20055E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80016E1	-7.15256E-4	-8.80003E1	0.0E0	4.86374E-3	9.36747E-2	2.73277E1	-3.26782E1	-3.2626E1	2.68148E1	1.19861E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80014E1	-5.72205E-4	-8.80005E1	7.15256E-5	4.98295E-3	9.38177E-2	2.73088E1	-3.26641E1	-3.25212E1	2.68119E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99175E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80012E1	-3.8147E-4	-8.80007E1	4.76837E-5	5.05447E-3	9.34839E-2	2.7334E1	-3.26673E1	-3.26661E1	2.67873E1	1.19721E-7	2.51271E-3	2.51271E-3	6.3131E-3	2.97823E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80013E1	-6.19888E-4	-8.80008E1	1.66893E-4	5.03063E-3	9.35555E-2	2.72935E1	-3.26958E1	-3.27056E1	2.6795E1	1.198E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9943E-1
1.4E1	2.98E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80017E1	-6.67572E-4	-8.80007E1	1.19209E-4	4.72069E-3	9.34601E-2	2.73444E1	-3.26442E1	-3.26448E1	2.68123E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.5E1	1.1E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80015E1	-8.34465E-4	-8.80008E1	7.15256E-5	5.07832E-3	9.34124E-2	2.73519E1	-3.26526E1	-3.25478E1	2.6826E1	1.1993E-7	2.51575E-3	2.51575E-3	6.31779E-3	3.02479E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80016E1	-6.4373E-4	-8.80006E1	1.66893E-4	5.17368E-3	9.36031E-2	2.73564E1	-3.26708E1	-3.25281E1	2.6807E1	1.20164E-7	2.51474E-3	2.51474E-3	6.32684E-3	3.0312E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80018E1	-5.96046E-4	-8.80004E1	0.0E0	4.95911E-3	9.35555E-2	2.72805E1	-3.26717E1	-3.24872E1	2.681E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
1.8E1	2.24E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80013E1	-6.19888E-4	-8.8E1	9.53674E-5	5.17368E-3	9.34124E-2	2.73033E1	-3.26549E1	-3.25507E1	2.68093E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.9E1	3.64E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80014E1	-6.91414E-4	-8.80003E1	2.38419E-4	5.00679E-3	9.3317E-2	2.72847E1	-3.26711E1	-3.24578E1	2.68136E1	1.20163E-7	2.5199E-3	2.5199E-3	6.30411E-3	2.99884E-1
2.0E1	2.174E3	2.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80015E1	-4.05312E-4	-8.80004E1	1.90735E-4	5.26905E-3	9.29832E-2	2.73069E1	-3.26832E1	-3.24951E1	2.68082E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00302E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80014E1	-6.91414E-4	-8.80004E1	-2.38419E-5	5.07832E-3	9.35078E-2	2.72919E1	-3.26543E1	-3.26903E1	2.67879E1	1.20122E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00302E-1
2.2E1	1.72E2	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80011E1	-5.96046E-4	-8.80004E1	-4.76837E-5	5.24521E-3	9.35078E-2	2.72697E1	-3.26555E1	-3.24945E1	2.6774E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80011E1	-6.19888E-4	-8.80005E1	1.90735E-4	5.03063E-3	9.33647E-2	2.73039E1	-3.26777E1	-3.25401E1	2.68028E1	1.19544E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9841E-1