[Scan]
initial_time=2016-01-28T17:53:20
final_time=2016-01-28T17:53:40
ip_count=19
run=1026
dataset=3
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.81421E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.68116E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.41842E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.64864E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.63085E-8
mult1=-1.06796E-8
mult2=-2.65474E-9
rf_tmon=-5.47375E-3
rf_agc=3.2925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.73742E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66174E0
bslens_imon=2.49891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19879E1
lens5a_imon=1.97131E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0483E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53807E1
cs_ef1b_imon=3.09326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=1.23634E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07893E0
lens1_imon=1.49379E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64485E1
os_ef1alow_imon=2.98155E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0379E1
cs_ea2_imon=1.40081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84848E1
cs_ef1a_imon=2.98116E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.16207E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11506E1
os_restr1_imon=4.3022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15392E1
os_ea1_imon=2.43573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.0808E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23091E0
cs_ionrep_imon=9.57845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02165E1
cs_anode1_imon=2.02716E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.87717E-8
tplens_vset=1.4E-1
tplens_vmon=1.63415E0
tplens_imon=-3.65486E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.48345E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.56529E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98437E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.31962E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27527E0
ionrepsh_imon=9.31227E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33638E1
lens5b_imon=2.17591E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7432E1
cs_ef2b_imon=3.13257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42492E0
os_ea2_imon=-7.8263E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00603E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71141E1
cs_ef2a_imon=3.17071E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06299E0
os_ef2alow_imon=-2.59168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61528E-1
os_ef2bup_imon=-5.42137E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10708E1
os_restr2_imon=3.36494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.30326E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.08009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.08815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.07978E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.09468E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.33287E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11133E0
cs_ionaccel_imon=-1.02698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47098E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.76179E-6
window_vset=0.0E0
window_vmon=1.79597E-1
window_imon=-1.12429E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86013E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92584E3
multa_neg_imon=8.43428E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.13402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.25833E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45208E0
defgridb_imon=6.03868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.39644E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06862E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.604E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.24405E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33868E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62229E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47248E-2
os_fil2_imon=-2.69768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73952E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.13795E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36783E-1
cs_fil2_imon=-2.61984E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.88604E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21899E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69215E-1
res40_imon=-2.54497E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.04E2	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80015E1	-4.76837E-4	-8.80005E1	-1.90735E-4	4.88758E-3	9.3627E-2	2.7308E1	-3.26679E1	-3.25924E1	2.68204E1	1.19963E-7	2.51439E-3	2.51439E-3	6.3074E-3	2.95447E-1
2.0E0	8.935E3	8.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80014E1	-4.76837E-4	-8.80003E1	2.86102E-4	4.93526E-3	9.36985E-2	2.73021E1	-3.26939E1	-3.27089E1	2.68051E1	1.19851E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.94868E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80015E1	-5.24521E-4	-8.80005E1	4.29153E-4	4.86374E-3	9.33886E-2	2.73246E1	-3.26555E1	-3.25676E1	2.68186E1	1.19705E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.97445E-1
4.0E0	2.027E3	1.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80012E1	-5.00679E-4	-8.80004E1	-1.19209E-4	4.95911E-3	9.37223E-2	2.72815E1	-3.26685E1	-3.25275E1	2.68058E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80016E1	-4.29153E-4	-8.80006E1	2.38419E-4	4.74453E-3	9.34839E-2	2.72901E1	-3.26627E1	-3.27738E1	2.68178E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80016E1	-6.19888E-4	-8.80006E1	2.86102E-4	4.62532E-3	9.35316E-2	2.72925E1	-3.26777E1	-3.27336E1	2.68148E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80017E1	-5.72205E-4	-8.80005E1	2.38419E-4	5.05447E-3	9.37939E-2	2.72811E1	-3.26735E1	-3.28513E1	2.67989E1	1.19913E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80016E1	-4.76837E-4	-8.80007E1	2.86102E-4	4.79221E-3	9.37462E-2	2.72986E1	-3.26585E1	-3.27169E1	2.67788E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99175E-1
1.2E1	8.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80014E1	-6.19888E-4	-8.80008E1	5.24521E-4	4.69685E-3	9.36985E-2	2.72793E1	-3.26723E1	-3.27486E1	2.68028E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9978E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80018E1	-5.72205E-4	-8.80008E1	3.8147E-4	4.74453E-3	9.38654E-2	2.72898E1	-3.26407E1	-3.26682E1	2.6819E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.99E-1
1.4E1	2.81E2	3.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80016E1	-6.67572E-4	-8.80007E1	3.57628E-4	4.86374E-3	9.37462E-2	2.73357E1	-3.26561E1	-3.26549E1	2.68088E1	1.19809E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.98481E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80015E1	-3.57628E-4	-8.80007E1	5.72205E-4	4.93526E-3	9.37939E-2	2.7298E1	-3.26974E1	-3.26278E1	2.67902E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02133E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80018E1	-7.86781E-4	-8.80008E1	2.38419E-4	5.14984E-3	9.37223E-2	2.74042E1	-3.2742E1	-3.23472E1	2.68406E1	1.19939E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80018E1	-3.8147E-4	-8.8001E1	2.38419E-4	4.81606E-3	9.35316E-2	2.73141E1	-3.2635E1	-3.24602E1	2.6813E1					
1.8E1	1.92E2	0.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80018E1	-3.57628E-4	-8.8001E1	3.09944E-4	4.98295E-3	9.37939E-2	2.73381E1	-3.26705E1	-3.25239E1	2.68094E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01995E-1
1.9E1	3.34E2	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80016E1	-7.86781E-4	-8.80008E1	4.52995E-4	4.8399E-3	9.34124E-2	2.72979E1	-3.26621E1	-3.27029E1	2.68244E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.03618E-1
2.0E1	2.208E3	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80016E1	-4.76837E-4	-8.80005E1	1.90735E-4	5.10216E-3	9.377E-2	2.73198E1	-3.26826E1	-3.25063E1	2.6807E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01738E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80014E1	-5.48363E-4	-8.80006E1	2.86102E-4	4.62532E-3	9.36031E-2	2.72874E1	-3.26708E1	-3.26178E1	2.67821E1	1.19953E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.0071E-1
2.2E1	1.93E2	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80013E1	-6.67572E-4	-8.80004E1	2.6226E-4	4.79221E-3	9.36031E-2	2.72997E1	-3.26482E1	-3.25978E1	2.6807E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80015E1	-3.8147E-4	-8.80007E1	1.66893E-4	4.8399E-3	9.38177E-2	2.73225E1	-3.26603E1	-3.26494E1	2.68058E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1