[Scan]
initial_time=2016-01-28T17:53:47
final_time=2016-01-28T17:54:06
ip_count=19
run=1026
dataset=3
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.77523E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.2108E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.37444E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.64882E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.6234E-8
mult1=-9.93676E-9
mult2=-2.55667E-9
rf_tmon=-5.63029E-3
rf_agc=3.23004E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.4692E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=3.09082E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05289E1
cs_ea1_imon=1.2351E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07607E0
lens1_imon=1.37171E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.40322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=2.99387E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.16409E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=2.45053E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=9.53359E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.05648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.88324E-8
tplens_vset=1.4E-1
tplens_vmon=1.61253E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.55506E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.61228E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=9.23274E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33911E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40311E0
os_ea2_imon=-5.785E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00379E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.37193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.32158E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72561E1
iondef1_imon=1.09281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.04416E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.32468E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.74095E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.472E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.16573E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34059E0
defgridb_imon=6.00126E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.40612E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59954E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.261E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23556E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62322E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.70801E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56289E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.4E2	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80014E1	-4.05312E-4	-8.80002E1	1.90735E-4	4.95911E-3	9.36031E-2	2.72698E1	-3.26498E1	-3.27407E1	2.68094E1	1.19697E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02769E-1
2.0E0	8.764E3	9.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80009E1	-3.8147E-4	-8.80001E1	1.66893E-4	4.91142E-3	9.34839E-2	2.72901E1	-3.26554E1	-3.25521E1	2.67794E1	1.20293E-7	2.52977E-3	2.52977E-3	6.32328E-3	3.02621E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80009E1	-4.29153E-4	-8.80003E1	4.76837E-4	4.72069E-3	9.33647E-2	2.72977E1	-3.26698E1	-3.25526E1	2.68166E1	1.19872E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.03081E-1
4.0E0	2.08E3	3.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80012E1	-5.00679E-4	-8.80006E1	1.66893E-4	4.50611E-3	9.35555E-2	2.73039E1	-3.26738E1	-3.26652E1	2.68032E1	1.20064E-7	2.51854E-3	2.51854E-3	6.3023E-3	2.99906E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80012E1	-8.34465E-4	-8.80006E1	1.19209E-4	4.74453E-3	9.377E-2	2.72522E1	-3.26567E1	-3.28051E1	2.67968E1	1.20244E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80014E1	-8.58307E-4	-8.80006E1	2.38419E-5	5.03063E-3	9.33409E-2	2.73198E1	-3.26815E1	-3.24968E1	2.68169E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80017E1	-8.82149E-4	-8.80004E1	-1.19209E-4	5.07832E-3	9.34124E-2	2.72961E1	-3.26729E1	-3.2641E1	2.68076E1	1.19902E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80013E1	-5.24521E-4	-8.80005E1	3.09944E-4	4.95911E-3	9.33409E-2	2.72992E1	-3.26762E1	-3.28059E1	2.67872E1	1.19985E-7	2.51593E-3	2.51593E-3	6.3074E-3	3.00249E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80016E1	-5.48363E-4	-8.80007E1	3.09944E-4	4.45843E-3	9.377E-2	2.72732E1	-3.26738E1	-3.28195E1	2.67949E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80017E1	-4.05312E-4	-8.80008E1	1.90735E-4	5.22137E-3	9.35555E-2	2.73183E1	-3.26657E1	-3.27822E1	2.68202E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
1.4E1	3.02E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80015E1	-4.76837E-4	-8.80008E1	1.90735E-4	4.76837E-3	9.34601E-2	2.72907E1	-3.26488E1	-3.26993E1	2.68208E1	1.19913E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01347E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80014E1	-8.10623E-4	-8.80005E1	9.53674E-5	4.8399E-3	9.36031E-2	2.73139E1	-3.2675E1	-3.26231E1	2.6786E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80013E1	-7.15256E-4	-8.80007E1	2.14577E-4	4.74453E-3	9.33886E-2	2.72288E1	-3.2587E1	-3.27269E1	2.6789E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80011E1	-5.00679E-4	-8.80003E1	5.72205E-4	4.76837E-3	9.3627E-2	2.72945E1	-3.26626E1	-3.24956E1	2.68629E1	1.20088E-7	2.52243E-3	2.52243E-3	6.32916E-3	3.01284E-1
1.8E1	2.29E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80013E1	-5.48363E-4	-8.80004E1	4.76837E-5	5.05447E-3	9.37223E-2	2.73153E1	-3.2635E1	-3.25683E1	2.68112E1					
1.9E1	3.22E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80015E1	-6.67572E-4	-8.80003E1	1.43051E-4	4.72069E-3	9.37223E-2	2.73405E1	-3.26506E1	-3.26933E1	2.68346E1	1.19749E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1
2.0E1	2.224E3	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80013E1	-7.86781E-4	-8.80003E1	1.66893E-4	4.95911E-3	9.34839E-2	2.72925E1	-3.26627E1	-3.24458E1	2.68308E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01871E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80015E1	-5.24521E-4	-8.80007E1	1.43051E-4	5.00679E-3	9.34362E-2	2.73352E1	-3.26844E1	-3.26732E1	2.68118E1	1.19965E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.01347E-1
2.2E1	1.76E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80013E1	-7.86781E-4	-8.80006E1	9.53674E-5	4.91142E-3	9.34601E-2	2.72696E1	-3.26609E1	-3.27227E1	2.67998E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80016E1	-5.96046E-4	-8.80003E1	1.43051E-4	4.673E-3	9.34124E-2	2.72561E1	-3.26785E1	-3.26402E1	2.68196E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01085E-1