[Scan]
initial_time=2016-01-28T17:54:14
final_time=2016-01-28T17:54:33
ip_count=19
run=1026
dataset=3
scan=192
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.81432E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.91731E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.4691E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.55085E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62369E-8
mult1=-1.11853E-8
mult2=-2.74057E-9
rf_tmon=-4.42831E-3
rf_agc=3.4391E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.47981E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20728E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.09983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=1.2628E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.30486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.41854E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.1578E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.30283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.42071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.69719E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93287E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.03918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.87395E-8
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25191E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56598E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=7.86841E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=9.19971E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.20009E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41072E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.35643E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.28847E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.07476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.0542E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.31511E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.00068E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.40258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59847E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30809E1
cs_fil1_imon=9.2404E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.21754E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62482E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.82214E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47821E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21773E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33021E-3
inlet_lpb_pmon=3.01065E-1
chamber_ion_pmon=1.19775E-7
chamber_cvt_pmon=2.51384E-3
foreline_cvt_pmon=2.51384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79114E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.13E2	1.0E0	1.47E2	4.1E1	-7.43285E-2	-8.80016E1	-7.62939E-4	-8.80005E1	4.76837E-5	5.00679E-3	9.34601E-2	2.73311E1	-3.2682E1	-3.27794E1	2.68088E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9952E-1
2.0E0	9.006E3	6.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80018E1	-4.29153E-4	-8.80006E1	7.15256E-5	4.81606E-3	9.3317E-2	2.73082E1	-3.26689E1	-3.25048E1	2.68232E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80017E1	-9.05991E-4	-8.80006E1	1.90735E-4	4.95911E-3	9.34839E-2	2.72815E1	-3.26732E1	-3.25918E1	2.68094E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02133E-1
4.0E0	2.048E3	0.0E0	6.55E2	3.98E2	-7.42513E-2	-8.80014E1	-5.48363E-4	-8.80007E1	1.66893E-4	5.00679E-3	9.3627E-2	2.72791E1	-3.26573E1	-3.25706E1	2.68256E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80014E1	-5.96046E-4	-8.80007E1	2.6226E-4	5.03063E-3	9.36747E-2	2.73418E1	-3.26529E1	-3.26132E1	2.681E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80016E1	-5.24521E-4	-8.80005E1	-2.38419E-5	4.88758E-3	9.33647E-2	2.72799E1	-3.26729E1	-3.27161E1	2.68118E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80017E1	-4.29153E-4	-8.80004E1	9.53674E-5	4.95911E-3	9.34362E-2	2.72925E1	-3.26843E1	-3.27882E1	2.68022E1	1.20226E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80016E1	-5.72205E-4	-8.80008E1	9.53674E-5	5.24521E-3	9.37223E-2	2.72992E1	-3.26236E1	-3.26968E1	2.68334E1	1.19653E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9952E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80016E1	-6.19888E-4	-8.80008E1	2.86102E-4	5.4121E-3	9.36747E-2	2.72967E1	-3.26392E1	-3.27336E1	2.68058E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.03545E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80014E1	-6.91414E-4	-8.80004E1	1.66893E-4	4.86374E-3	9.35078E-2	2.73153E1	-3.26266E1	-3.25497E1	2.6798E1	1.19872E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.01742E-1
1.4E1	2.79E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80012E1	-6.4373E-4	-8.80005E1	4.29153E-4	4.79221E-3	9.34124E-2	2.73153E1	-3.26374E1	-3.26458E1	2.6803E1	1.20158E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00453E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80013E1	-6.91414E-4	-8.80004E1	3.57628E-4	5.24521E-3	9.36031E-2	2.72973E1	-3.26597E1	-3.26897E1	2.68051E1	1.19653E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9926E-1
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80012E1	-8.34465E-4	-8.80008E1	3.57628E-4	5.26905E-3	9.35793E-2	2.73039E1	-3.26819E1	-3.25942E1	2.67914E1	1.20084E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.9829E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80011E1	-4.29153E-4	-8.80008E1	1.43051E-4	5.34058E-3	9.32693E-2	2.72835E1	-3.26284E1	-3.25107E1	2.6828E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.02253E-1
1.8E1	2.11E2	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80013E1	-4.05312E-4	-8.80004E1	1.90735E-4	4.57764E-3	9.32693E-2	2.73063E1	-3.26512E1	-3.25443E1	2.6801E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
1.9E1	3.83E2	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80013E1	-9.53674E-4	-8.80003E1	2.6226E-4	5.07832E-3	9.35555E-2	2.73155E1	-3.26854E1	-3.2645E1	2.6795E1	1.19965E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.00563E-1
2.0E1	2.303E3	2.0E0	8.08E2	5.58E2	-7.50241E-2	-8.8001E1	-9.77516E-4	-8.80004E1	2.38419E-4	4.673E-3	9.34124E-2	2.72803E1	-3.26691E1	-3.26956E1	2.67566E1	1.19925E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.0041E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80011E1	-1.00136E-3	-8.80006E1	7.15256E-5	4.91142E-3	9.33886E-2	2.72937E1	-3.26636E1	-3.26989E1	2.67885E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9943E-1
2.2E1	1.45E2	0.0E0	8.89E2	6.17E2	-7.44831E-2	-8.80012E1	-9.29832E-4	-8.80006E1	2.14577E-4	4.93526E-3	9.37223E-2	2.73201E1	-3.26397E1	-3.26117E1	2.6802E1	1.19831E-7	2.51679E-3	2.51679E-3	6.30221E-3	3.00247E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80014E1	-9.77516E-4	-8.80004E1	2.14577E-4	4.69685E-3	9.34839E-2	2.73063E1	-3.26639E1	-3.25191E1	2.67938E1	1.19775E-7	2.51384E-3	2.51384E-3	6.33021E-3	3.01065E-1