[Scan]
initial_time=2016-01-28T17:56:54
final_time=2016-01-28T17:57:13
ip_count=19
run=1026
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78106E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.93376E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.41628E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.56382E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.62875E-8
mult1=-9.47571E-9
mult2=-2.67426E-9
rf_tmon=-5.98423E-3
rf_agc=3.29965E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.56731E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5368E1
cs_ef1b_imon=3.09667E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=1.25415E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08462E0
lens1_imon=1.58965E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.96643E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8382E1
cs_ef1a_imon=2.99861E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.16342E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11267E1
os_restr1_imon=4.31338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.46289E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63735E1
os_ef1bup_imon=3.0832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=9.8486E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93182E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01909E1
cs_anode1_imon=2.04164E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.88566E-8
tplens_vset=1.4E-1
tplens_vmon=1.64804E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.5959E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.64804E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=9.46287E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74564E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41973E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.19285E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07265E0
os_ef2alow_imon=-2.64917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82661E-1
os_ef2bup_imon=-5.34382E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10855E1
os_restr2_imon=3.36838E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01828E1
cs_anode2_imon=2.09291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73116E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68017E1
iondef4_imon=1.0768E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.03842E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.29229E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11517E0
cs_ionaccel_imon=-1.02863E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=1.73933E-1
window_imon=-1.05483E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86413E1
mask2_imon=-7.1051E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.40083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.399E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06961E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60076E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.24911E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31944E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62048E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.65627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65867E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34358E-1
cs_fil2_imon=-2.38181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21705E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36731E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.65E2	2.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80015E1	-4.52995E-4	-8.80003E1	2.14577E-4	4.98295E-3	9.33886E-2	2.73123E1	-3.26771E1	-3.26122E1	2.68001E1	1.19925E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.97762E-1
2.0E0	8.714E3	6.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80017E1	-2.14577E-4	-8.80002E1	-9.53674E-5	5.07832E-3	9.33886E-2	2.73526E1	-3.26573E1	-3.27816E1	2.68082E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80015E1	-3.8147E-4	-8.80004E1	-7.15256E-5	4.98295E-3	9.35078E-2	2.7285E1	-3.26473E1	-3.27675E1	2.67881E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01742E-1
4.0E0	2.074E3	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80015E1	-6.91414E-4	-8.80003E1	0.0E0	4.81606E-3	9.35555E-2	2.73016E1	-3.2677E1	-3.24661E1	2.68093E1	1.20016E-7	2.52058E-3	2.52058E-3	6.29211E-3	3.02097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80017E1	-3.57628E-4	-8.80003E1	9.53674E-5	5.03063E-3	9.32693E-2	2.72954E1	-3.26857E1	-3.27188E1	2.68001E1	1.20344E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80017E1	-4.76837E-4	-8.80002E1	0.0E0	5.03063E-3	9.33647E-2	2.72979E1	-3.26869E1	-3.25836E1	2.68066E1	1.20076E-7	2.52502E-3	2.52502E-3	6.31332E-3	2.98232E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80017E1	-9.53674E-4	-8.80004E1	0.0E0	4.91142E-3	9.3317E-2	2.72922E1	-3.26394E1	-3.26792E1	2.68116E1	1.20111E-7	2.52471E-3	2.52471E-3	6.30019E-3	3.01954E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80018E1	-7.15256E-4	-8.80002E1	1.19209E-4	5.03063E-3	9.32932E-2	2.7321E1	-3.26661E1	-3.25675E1	2.6803E1	1.20375E-7	2.52301E-3	2.52301E-3	6.28667E-3	3.01981E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80014E1	-9.53674E-4	-8.80004E1	9.53674E-5	4.88758E-3	9.3317E-2	2.73155E1	-3.26897E1	-3.26921E1	2.6798E1	1.20281E-7	2.52106E-3	2.52106E-3	6.3074E-3	3.0147E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80013E1	-6.91414E-4	-8.80002E1	1.19209E-4	5.05447E-3	9.35316E-2	2.7265E1	-3.26437E1	-3.25641E1	2.68136E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01347E-1
1.4E1	3.01E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80013E1	-8.58307E-4	-8.80003E1	2.38419E-4	5.03063E-3	9.34601E-2	2.73187E1	-3.26667E1	-3.2682E1	2.68007E1	1.20174E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00824E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.8001E1	-8.10623E-4	-8.80004E1	1.43051E-4	5.03063E-3	9.32693E-2	2.72886E1	-3.26685E1	-3.25977E1	2.68169E1	1.20004E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.9841E-1
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80011E1	-8.34465E-4	-8.80005E1	2.38419E-5	5.05447E-3	9.32932E-2	2.73246E1	-3.26779E1	-3.2649E1	2.6786E1	1.19841E-7	2.51393E-3	2.51393E-3	6.3074E-3	2.98842E-1
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80014E1	-9.05991E-4	-8.80004E1	-1.66893E-4	5.05447E-3	9.33886E-2	2.73039E1	-3.2644E1	-3.26945E1	2.6804E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9874E-1
1.8E1	2.18E2	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80015E1	-9.53674E-4	-8.80004E1	-1.19209E-4	5.03063E-3	9.34601E-2	2.73129E1	-3.26639E1	-3.262E1	2.68178E1	1.20278E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.97704E-1
1.9E1	3.58E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80016E1	-5.96046E-4	-8.80002E1	-2.38419E-4	5.19753E-3	9.36747E-2	2.72787E1	-3.26723E1	-3.25785E1	2.68232E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9926E-1
2.0E1	2.234E3	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80014E1	-3.8147E-4	-8.80005E1	1.90735E-4	5.17368E-3	9.34601E-2	2.7334E1	-3.26868E1	-3.27104E1	2.6836E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.02253E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80015E1	-8.82149E-4	-8.80006E1	-4.76837E-5	4.86374E-3	9.33886E-2	2.72892E1	-3.2639E1	-3.26095E1	2.68046E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.02769E-1
2.2E1	1.55E2	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80016E1	-6.4373E-4	-8.80004E1	-3.09944E-4	4.86374E-3	9.32217E-2	2.73293E1	-3.26986E1	-3.25375E1	2.68212E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80018E1	-6.67572E-4	-8.80003E1	-4.76837E-5	4.93526E-3	9.35078E-2	2.73116E1	-3.26644E1	-3.26419E1	2.68017E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1