[Scan]
initial_time=2016-01-28T17:57:47
final_time=2016-01-28T17:58:09
ip_count=19
run=1026
dataset=3
scan=200
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.77411E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.20723E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.45743E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.53668E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.62497E-8
mult1=-1.23291E-8
mult2=-2.67669E-9
rf_tmon=-4.01975E-3
rf_agc=3.46193E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.56362E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61402E0
bslens_imon=2.45491E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20245E1
lens5a_imon=1.99272E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05049E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=3.08577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=1.23793E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0996E0
lens1_imon=1.34567E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0347E1
cs_ea2_imon=1.39513E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83926E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.15431E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15508E1
os_ea1_imon=2.45699E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63401E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23067E0
cs_ionrep_imon=9.77514E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93405E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.05396E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.87826E-8
tplens_vset=1.4E-1
tplens_vmon=1.61817E0
tplens_imon=-7.57708E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26687E1
iondef3_imon=1.48585E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.56666E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.79335E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27597E0
ionrepsh_imon=9.54741E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33713E1
lens5b_imon=2.16095E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42595E0
os_ea2_imon=-6.59773E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71696E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.3485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.32426E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02157E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.07117E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67995E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.01836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.28317E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.12025E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92579E3
multa_neg_imon=7.21875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.50987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.05347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2534E0
defgridb_imon=6.09849E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.39657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60032E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=9.25361E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2728E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62173E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67308E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.99348E-1
chamber_ion_pmon=1.19819E-7
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04342E-1
res40_imon=-2.24469E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.21E2	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80013E1	-1.43051E-4	-8.80001E1	1.43051E-4	4.57764E-3	9.34124E-2	2.72987E1	-3.26874E1	-3.2604E1	2.68192E1	1.20017E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.01085E-1
2.0E0	8.87E3	4.0E0	3.16E2	1.6E2	-7.13143E-2	-8.80013E1	-3.8147E-4	-8.80002E1	7.15256E-5	4.95911E-3	9.35793E-2	2.73226E1	-3.26628E1	-3.2694E1	2.68157E1	1.20096E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00171E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80013E1	-3.57628E-4	-8.80006E1	1.19209E-4	4.76837E-3	9.36031E-2	2.73057E1	-3.2688E1	-3.2488E1	2.68198E1					
4.0E0	2.093E3	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80013E1	-6.4373E-4	-8.8E1	3.09944E-4	4.91142E-3	9.33886E-2	2.73122E1	-3.26809E1	-3.26119E1	2.68202E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80015E1	-5.48363E-4	-8.80003E1	4.76837E-5	4.8399E-3	9.33409E-2	2.72745E1	-3.26813E1	-3.27143E1	2.67974E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02253E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80015E1	-6.19888E-4	-8.8E1	-1.43051E-4	5.00679E-3	9.33647E-2	2.73246E1	-3.26484E1	-3.27163E1	2.68204E1	1.19913E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80016E1	-2.86102E-4	-8.80001E1	1.90735E-4	4.64916E-3	9.36747E-2	2.73165E1	-3.26326E1	-3.25281E1	2.68148E1	1.19902E-7	2.51847E-3	2.51847E-3	6.35059E-3	2.97647E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80014E1	-4.76837E-4	-8.80002E1	2.38419E-4	4.88758E-3	9.37223E-2	2.72576E1	-3.26398E1	-3.26723E1	2.68238E1	1.19925E-7	2.52362E-3	2.52362E-3	6.27954E-3	2.99613E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80015E1	-3.09944E-4	-8.80003E1	4.76837E-4	4.60148E-3	9.36031E-2	2.73213E1	-3.26861E1	-3.25972E1	2.68227E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80015E1	-4.05312E-4	-8.80005E1	1.19209E-4	4.64916E-3	9.3317E-2	2.72349E1	-3.2662E1	-3.26455E1	2.67968E1	1.20011E-7	2.51918E-3	2.51918E-3	6.32916E-3	3.02064E-1
1.4E1	2.75E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80015E1	-5.96046E-4	-8.80003E1	2.86102E-4	4.57764E-3	9.35316E-2	2.73369E1	-3.26579E1	-3.26729E1	2.67812E1					
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80014E1	-4.76837E-4	-8.80004E1	2.38419E-4	4.64916E-3	9.31978E-2	2.73315E1	-3.26723E1	-3.26038E1	2.68082E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9874E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80017E1	-7.62939E-4	-8.80001E1	4.05312E-4	4.62532E-3	9.32455E-2	2.73027E1	-3.26826E1	-3.26001E1	2.6777E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97704E-1
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80018E1	-1.12057E-3	-8.80002E1	9.53674E-5	4.76837E-3	9.34124E-2	2.73009E1	-3.26518E1	-3.2608E1	2.67862E1	1.20011E-7	2.51647E-3	2.51647E-3	6.3074E-3	2.99088E-1
1.8E1	2.26E2	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80018E1	-1.00136E-3	-8.80003E1	2.38419E-5	4.57764E-3	9.35793E-2	2.73045E1	-3.26723E1	-3.26561E1	2.67932E1					
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80017E1	-7.86781E-4	-8.80003E1	2.6226E-4	4.72069E-3	9.34601E-2	2.72614E1	-3.26555E1	-3.25605E1	2.6804E1	1.19749E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.03286E-1
2.0E1	2.215E3	1.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80016E1	-8.82149E-4	-8.80004E1	1.19209E-4	4.69685E-3	9.36031E-2	2.73149E1	-3.26554E1	-3.27209E1	2.67878E1	1.19809E-7	2.51771E-3	2.51771E-3	6.36244E-3	3.02396E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80018E1	-6.19888E-4	-8.80007E1	2.14577E-4	4.43459E-3	9.33647E-2	2.73161E1	-3.26724E1	-3.27442E1	2.6803E1	1.20017E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
2.2E1	1.37E2	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80018E1	-6.4373E-4	-8.80004E1	9.53674E-5	4.79221E-3	9.35555E-2	2.72919E1	-3.26248E1	-3.26092E1	2.68076E1	1.20142E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80018E1	-6.67572E-4	-8.80005E1	7.15256E-5	4.81606E-3	9.3627E-2	2.73237E1	-3.26729E1	-3.26687E1	2.67995E1	1.19819E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99348E-1