[Scan]
initial_time=2016-01-28T17:58:17
final_time=2016-01-28T17:58:39
ip_count=19
run=1026
dataset=3
scan=201
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.81678E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.02865E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.43691E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.57269E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.6306E-8
mult1=-1.07518E-8
mult2=-2.76851E-9
rf_tmon=-2.97431E-3
rf_agc=3.4373E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.66351E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60291E0
bslens_imon=2.44742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19471E1
lens5a_imon=1.97957E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53624E1
cs_ef1b_imon=3.10603E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.01938E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04594E1
cs_ea1_imon=1.25091E-5
lens1_vset=-2.7E0
lens1_vmon=-3.12943E0
lens1_imon=1.64584E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64845E1
os_ef1alow_imon=2.97504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03442E1
cs_ea2_imon=1.41542E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84263E1
cs_ef1a_imon=3.00909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.15865E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11311E1
os_restr1_imon=4.29991E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15656E1
os_ea1_imon=2.44639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63648E1
os_ef1bup_imon=3.09592E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18276E0
cs_ionrep_imon=9.72264E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93294E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01877E1
cs_anode1_imon=2.04762E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.87908E-8
tplens_vset=1.4E-1
tplens_vmon=1.63762E0
tplens_imon=-3.88622E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.49138E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.60665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98224E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.80146E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28073E0
ionrepsh_imon=9.40964E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33906E1
lens5b_imon=2.18722E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74607E1
cs_ef2b_imon=3.12062E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40669E0
os_ea2_imon=-7.81774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00283E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18649E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06329E0
os_ef2alow_imon=-2.54812E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67067E-1
os_ef2bup_imon=-5.36628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10755E1
os_restr2_imon=3.36389E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.10414E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.06731E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.09139E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.00663E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.28282E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12765E0
cs_ionaccel_imon=-1.09225E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.68035E-6
window_vset=0.0E0
window_vmon=1.82042E-1
window_imon=-1.09225E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86475E1
mask2_imon=-6.24431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.30265E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.26443E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.27593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62112E0
defgridb_imon=6.38657E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3322E1
os_fil1_imon=9.40044E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5999E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=9.24724E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32069E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62377E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6723E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34211E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33551E-1
cs_fil2_imon=-2.43795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19235E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21641E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15523E-1
res40_imon=-2.4059E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.5E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80019E1	-7.86781E-4	-8.80006E1	3.09944E-4	4.55379E-3	9.32693E-2	2.72819E1	-3.26967E1	-3.25912E1	2.67984E1	1.19883E-7	2.51725E-3	2.51725E-3	6.29035E-3	3.00522E-1
2.0E0	8.949E3	1.2E1	3.16E2	1.6E2	-7.37874E-2	-8.80019E1	-8.10623E-4	-8.80005E1	3.09944E-4	4.62532E-3	9.33409E-2	2.73106E1	-3.26474E1	-3.26315E1	2.68207E1	1.20209E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.9892E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	-5.24521E-4	-8.80003E1	3.33786E-4	4.79221E-3	9.31025E-2	2.73E1	-3.26414E1	-3.26835E1	2.68041E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
4.0E0	2.001E3	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80016E1	-8.34465E-4	-8.80005E1	-1.90735E-4	5.03063E-3	9.34362E-2	2.73237E1	-3.26609E1	-3.26218E1	2.6813E1	1.20142E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80016E1	-8.34465E-4	-8.80004E1	1.19209E-4	4.76837E-3	9.34601E-2	2.73051E1	-3.26807E1	-3.26146E1	2.6825E1	1.20174E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80014E1	-6.67572E-4	-8.80006E1	4.29153E-4	4.64916E-3	9.35793E-2	2.73279E1	-3.26524E1	-3.26164E1	2.68064E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80014E1	-7.62939E-4	-8.80005E1	3.33786E-4	4.81606E-3	9.35316E-2	2.72666E1	-3.26386E1	-3.26344E1	2.68198E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
8.0E0	2.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80012E1	-1.0252E-3	-8.80007E1	3.57628E-4	4.8399E-3	9.35793E-2	2.72811E1	-3.26723E1	-3.26236E1	2.67926E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01738E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80015E1	-1.07288E-3	-8.80007E1	7.15256E-5	4.91142E-3	9.33647E-2	2.72889E1	-3.265E1	-3.25882E1	2.68196E1	1.19653E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80013E1	-9.05991E-4	-8.80008E1	3.8147E-4	4.86374E-3	9.34601E-2	2.72573E1	-3.26478E1	-3.26119E1	2.67764E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.97963E-1
1.4E1	3.12E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80012E1	-8.82149E-4	-8.80004E1	1.90735E-4	4.93526E-3	9.34839E-2	2.73273E1	-3.26831E1	-3.25876E1	2.68088E1	1.20043E-7	2.51771E-3	2.51771E-3	6.30466E-3	3.01347E-1
1.5E1	1.1E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80017E1	-9.77516E-4	-8.80008E1	2.38419E-5	5.07832E-3	9.34839E-2	2.73063E1	-3.2641E1	-3.26392E1	2.68034E1					
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80018E1	-8.10623E-4	-8.80004E1	-2.38419E-5	5.10216E-3	9.35793E-2	2.72727E1	-3.27179E1	-3.25779E1	2.6816E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0148E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80019E1	-6.91414E-4	-8.80003E1	1.19209E-4	4.74453E-3	9.36508E-2	2.73177E1	-3.26675E1	-3.26518E1	2.68088E1	1.20069E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9926E-1
1.8E1	2.13E2	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80019E1	-6.67572E-4	-8.80006E1	2.38419E-4	4.79221E-3	9.34124E-2	2.72845E1	-3.26508E1	-3.2659E1	2.6796E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.99E-1
1.9E1	3.39E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80017E1	-5.24521E-4	-8.80006E1	2.38419E-5	4.72069E-3	9.35078E-2	2.73316E1	-3.26732E1	-3.26425E1	2.68286E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.98665E-1
2.0E1	2.244E3	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80015E1	-7.86781E-4	-8.80007E1	2.38419E-4	4.69685E-3	9.34124E-2	2.72931E1	-3.26891E1	-3.2614E1	2.68082E1	1.2033E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-9.53674E-4	-8.80007E1	1.66893E-4	4.69685E-3	9.35078E-2	2.73261E1	-3.26392E1	-3.27065E1	2.6804E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.02922E-1
2.2E1	1.61E2	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80016E1	-1.21593E-3	-8.80004E1	2.6226E-4	4.93526E-3	9.35793E-2	2.7308E1	-3.26508E1	-3.25564E1	2.67854E1	1.19646E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80015E1	-1.04904E-3	-8.80007E1	1.66893E-4	5.26905E-3	9.35793E-2	2.73255E1	-3.26861E1	-3.26206E1	2.68142E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1