[Scan]
initial_time=2016-01-28T17:58:47
final_time=2016-01-28T17:59:10
ip_count=19
run=1026
dataset=3
scan=202
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.47149E-2
qbias_imon=-3.78633E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.92184E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.43597E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.59036E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.62809E-8
mult1=-1.22208E-8
mult2=-2.72859E-9
rf_tmon=-3.30477E-3
rf_agc=3.52442E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.6119E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.09303E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04566E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=1.24111E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0979E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.4064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.00024E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.15237E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.30659E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.46186E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.5973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.0376E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.88189E-8
tplens_vset=1.4E-1
tplens_vmon=1.61843E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98314E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.6515E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=9.37078E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41963E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06151E0
os_ef2alow_imon=-2.72749E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.45904E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10984E1
os_restr2_imon=3.36584E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.10259E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.07547E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68526E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.07128E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.24012E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.0976E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.02047E-1
window_imon=-1.1115E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.40306E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60039E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=9.25079E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3685E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62295E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.77924E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.24636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10146E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21795E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37399E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.54E2	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80015E1	-7.15256E-4	-8.80005E1	9.53674E-5	4.31538E-3	9.36747E-2	2.73269E1	-3.26437E1	-3.26431E1	2.6834E1	1.19902E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.0071E-1
2.0E0	8.731E3	1.1E1	3.16E2	1.6E2	-7.35556E-2	-8.80016E1	-7.39098E-4	-8.80007E1	3.33786E-4	4.36306E-3	9.35316E-2	2.73118E1	-3.26603E1	-3.26285E1	2.67956E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80014E1	-5.24521E-4	-8.80007E1	-2.38419E-5	4.55379E-3	9.35793E-2	2.72941E1	-3.2695E1	-3.26747E1	2.68516E1	1.19607E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99083E-1
4.0E0	2.084E3	2.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80014E1	-6.91414E-4	-8.80007E1	3.33786E-4	4.72069E-3	9.36031E-2	2.72806E1	-3.26762E1	-3.25495E1	2.67726E1	1.20192E-7	2.52342E-3	2.52342E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80015E1	-7.62939E-4	-8.80006E1	3.8147E-4	4.74453E-3	9.34362E-2	2.73111E1	-3.26633E1	-3.26248E1	2.68106E1	1.20031E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80015E1	-1.04904E-3	-8.80004E1	2.38419E-5	4.64916E-3	9.36747E-2	2.72815E1	-3.26632E1	-3.26231E1	2.68157E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80014E1	-9.29832E-4	-8.80007E1	2.14577E-4	4.41074E-3	9.38177E-2	2.73106E1	-3.26413E1	-3.26787E1	2.68144E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80014E1	-7.62939E-4	-8.80007E1	3.33786E-4	4.52995E-3	9.35078E-2	2.72757E1	-3.26374E1	-3.26248E1	2.68058E1	1.20457E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.98554E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80013E1	-8.82149E-4	-8.80006E1	9.53674E-5	4.76837E-3	9.3317E-2	2.72958E1	-3.26382E1	-3.25762E1	2.68076E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80014E1	-5.72205E-4	-8.80004E1	-9.53674E-5	4.76837E-3	9.31025E-2	2.73138E1	-3.26553E1	-3.26316E1	2.68132E1	1.20192E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.03129E-1
1.4E1	2.74E2	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80015E1	-6.91414E-4	-8.80007E1	0.0E0	4.95911E-3	9.33886E-2	2.73004E1	-3.26744E1	-3.26272E1	2.67758E1	1.20045E-7	2.51498E-3	2.51498E-3	6.3531E-3	3.00522E-1
1.5E1	9.0E0	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80013E1	-6.67572E-4	-8.80004E1	1.90735E-4	4.62532E-3	9.36508E-2	2.72962E1	-3.26537E1	-3.26437E1	2.68215E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.9978E-1
1.6E1	3.7E1	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80014E1	-7.62939E-4	-8.80004E1	-7.15256E-5	4.52995E-3	9.3627E-2	2.7329E1	-3.26693E1	-3.26032E1	2.67903E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80016E1	-6.67572E-4	-8.80006E1	1.90735E-4	4.673E-3	9.33409E-2	2.72803E1	-3.26807E1	-3.26527E1	2.6814E1	1.1987E-7	2.51854E-3	2.51854E-3	6.32273E-3	3.01853E-1
1.8E1	2.4E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80014E1	-8.82149E-4	-8.80006E1	-1.90735E-4	5.126E-3	9.38416E-2	2.73134E1	-3.26679E1	-3.25918E1	2.67926E1	1.20503E-7	2.52222E-3	2.52222E-3	6.31902E-3	3.0147E-1
1.9E1	3.6E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80013E1	-6.19888E-4	-8.80003E1	1.66893E-4	4.79221E-3	9.34839E-2	2.73141E1	-3.26416E1	-3.26278E1	2.67992E1	1.2026E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
2.0E1	2.108E3	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80011E1	-4.76837E-4	-8.80004E1	1.90735E-4	4.55379E-3	9.38416E-2	2.73299E1	-3.26714E1	-3.26272E1	2.6837E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.96929E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80013E1	-6.19888E-4	-8.80004E1	-3.09944E-4	5.00679E-3	9.38416E-2	2.73446E1	-3.26767E1	-3.26708E1	2.68111E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9892E-1
2.2E1	1.38E2	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80013E1	-2.38419E-4	-8.80004E1	-9.53674E-5	4.69685E-3	9.38416E-2	2.72703E1	-3.26531E1	-3.2554E1	2.68022E1	1.19851E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.47149E-2	-8.80015E1	-5.96046E-4	-8.80002E1	-2.38419E-5	4.45843E-3	9.36747E-2	2.73141E1	-3.26615E1	-3.26494E1	2.68526E1	1.20174E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.02133E-1