[Scan]
initial_time=2016-01-28T17:59:18
final_time=2016-01-28T17:59:40
ip_count=19
run=1026
dataset=3
scan=203
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.76642E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.74267E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.44981E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.58689E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.62493E-8
mult1=-1.07406E-8
mult2=-2.86632E-9
rf_tmon=-5.5359E-3
rf_agc=3.26189E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.69749E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63104E0
bslens_imon=2.43626E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.98665E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05145E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53537E1
cs_ef1b_imon=3.10266E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02069E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05163E1
cs_ea1_imon=1.26413E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08272E0
lens1_imon=1.61641E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64477E1
os_ef1alow_imon=2.96493E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03659E1
cs_ea2_imon=1.40527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8445E1
cs_ef1a_imon=3.0046E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.16502E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.31301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15243E1
os_ea1_imon=2.44487E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63804E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23338E0
cs_ionrep_imon=9.68014E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93304E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01853E1
cs_anode1_imon=2.0465E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.88188E-8
tplens_vset=1.4E-1
tplens_vmon=1.60088E0
tplens_imon=-3.00317E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27623E1
iondef3_imon=1.50148E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98372E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.77166E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22714E0
ionrepsh_imon=9.33198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34045E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.10977E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41619E0
os_ea2_imon=-6.18523E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00604E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71214E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05331E0
os_ef2alow_imon=-2.55934E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73305E-1
os_ef2bup_imon=-5.33634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11086E1
os_restr2_imon=3.36202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30003E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01859E1
cs_anode2_imon=2.10376E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.08706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.04957E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.28779E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11143E0
cs_ionaccel_imon=-1.11471E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47159E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56156E1
einzel_imon=7.71029E-6
window_vset=0.0E0
window_vmon=1.7331E-1
window_imon=-9.83718E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86357E1
mask2_imon=-7.17995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.31043E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.57669E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.14197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36189E0
defgridb_imon=6.01515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.37966E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08227E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60276E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30723E1
cs_fil1_imon=9.25117E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29449E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62248E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65261E-2
os_fil2_imon=-2.49409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3339E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35837E-1
cs_fil2_imon=-2.3631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2157E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95563E-1
res40_imon=-2.53689E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.2E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80015E1	-5.72205E-4	-8.79999E1	-2.38419E-5	4.45843E-3	9.3317E-2	2.73022E1	-3.26608E1	-3.2721E1	2.68007E1	1.20084E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.00942E-1
2.0E0	8.96E3	6.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80015E1	-4.05312E-4	-8.80001E1	7.15256E-5	4.69685E-3	9.35555E-2	2.72812E1	-3.26292E1	-3.25489E1	2.68014E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.48695E-2	-8.80015E1	-8.34465E-4	-8.80005E1	-2.38419E-5	5.00679E-3	9.36031E-2	2.72906E1	-3.26674E1	-3.26467E1	2.68007E1	1.19878E-7	2.52308E-3	2.52308E-3	6.31696E-3	2.97979E-1
4.0E0	2.094E3	0.0E0	6.55E2	3.98E2	-7.44059E-2	-8.80012E1	-7.62939E-4	-8.80007E1	7.15256E-5	4.48227E-3	9.3317E-2	2.73106E1	-3.26646E1	-3.27558E1	2.67974E1	1.20177E-7	2.5199E-3	2.5199E-3	6.31779E-3	2.99753E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80014E1	-5.00679E-4	-8.80006E1	-2.38419E-5	4.55379E-3	9.33409E-2	2.73122E1	-3.2652E1	-3.27269E1	2.6801E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80018E1	-7.39098E-4	-8.80005E1	-2.14577E-4	4.76837E-3	9.35078E-2	2.72907E1	-3.26386E1	-3.25509E1	2.68209E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80018E1	-8.34465E-4	-8.80004E1	-2.6226E-4	4.69685E-3	9.33886E-2	2.73129E1	-3.26867E1	-3.26693E1	2.68007E1	1.19953E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80016E1	-7.86781E-4	-8.8E1	-4.76837E-4	4.8399E-3	9.36031E-2	2.72525E1	-3.26516E1	-3.25748E1	2.68154E1	1.19918E-7	2.51722E-3	2.51722E-3	6.33825E-3	3.01779E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80014E1	-8.82149E-4	-8.80004E1	-2.86102E-4	4.76837E-3	9.3627E-2	2.73147E1	-3.26296E1	-3.265E1	2.68166E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80016E1	-8.82149E-4	-8.80006E1	-1.19209E-4	4.64916E-3	9.3627E-2	2.73057E1	-3.2638E1	-3.26705E1	2.68142E1	1.20244E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00942E-1
1.4E1	2.68E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80016E1	-7.86781E-4	-8.80006E1	2.38419E-5	4.69685E-3	9.35555E-2	2.73175E1	-3.26697E1	-3.26124E1	2.67931E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0148E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80015E1	-9.53674E-4	-8.80004E1	-2.38419E-5	4.45843E-3	9.3627E-2	2.72818E1	-3.26817E1	-3.25495E1	2.68294E1	1.19749E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9892E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80016E1	-9.05991E-4	-8.80007E1	7.15256E-5	4.45843E-3	9.36031E-2	2.7301E1	-3.2652E1	-3.24673E1	2.68454E1	1.19978E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.0201E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80016E1	-7.39098E-4	-8.80006E1	-1.19209E-4	4.57764E-3	9.3627E-2	2.73273E1	-3.26543E1	-3.2614E1	2.68169E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.02133E-1
1.8E1	1.78E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80018E1	-5.00679E-4	-8.80008E1	-1.43051E-4	4.57764E-3	9.37223E-2	2.72937E1	-3.26543E1	-3.28117E1	2.67854E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.9E1	3.68E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80013E1	-5.00679E-4	-8.80003E1	1.66893E-4	5.126E-3	9.36985E-2	2.72532E1	-3.26543E1	-3.2672E1	2.67589E1	1.20017E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00041E-1
2.0E1	2.246E3	2.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80016E1	-7.15256E-4	-8.80007E1	1.66893E-4	5.126E-3	9.35078E-2	2.73177E1	-3.26627E1	-3.25966E1	2.67884E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80015E1	-6.91414E-4	-8.80007E1	3.8147E-4	4.93526E-3	9.34601E-2	2.72986E1	-3.26614E1	-3.25269E1	2.68001E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
2.2E1	1.6E2	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80014E1	-6.91414E-4	-8.80004E1	2.38419E-4	5.03063E-3	9.35793E-2	2.73165E1	-3.26627E1	-3.26993E1	2.68094E1	1.20055E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80017E1	-7.86781E-4	-8.80003E1	-1.19209E-4	4.79221E-3	9.38654E-2	2.73051E1	-3.26738E1	-3.27623E1	2.68052E1	1.2033E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.01871E-1