[Scan]
initial_time=2016-01-28T18:00:19
final_time=2016-01-28T18:00:41
ip_count=19
run=1026
dataset=3
scan=205
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.77945E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.72634E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.4485E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.53028E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.63123E-8
mult1=-1.04267E-8
mult2=-2.87231E-9
rf_tmon=-3.86954E-3
rf_agc=3.31774E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.72646E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60906E0
bslens_imon=2.18086E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19142E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.09046E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.01876E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=1.23144E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0762E0
lens1_imon=1.63651E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04291E1
cs_ea2_imon=1.41601E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.99856E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.15921E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.41206E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=9.66835E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93672E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.04098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.87803E-8
tplens_vset=1.4E-1
tplens_vmon=1.58015E0
tplens_imon=-5.66113E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.60455E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=9.3354E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=9.29704E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41973E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00266E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22992E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.10382E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.07226E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.3114E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0947E0
cs_ionaccel_imon=-9.90511E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.93797E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.71435E0
defgridb_imon=6.38063E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.39345E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60235E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30599E1
cs_fil1_imon=9.25746E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28722E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6205E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23846E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21611E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.20249E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.33E2	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80016E1	-4.29153E-4	-8.80005E1	1.66893E-4	4.64916E-3	9.3627E-2	2.73387E1	-3.26486E1	-3.252E1	2.67908E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02922E-1
2.0E0	8.91E3	5.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80016E1	-6.67572E-4	-8.80005E1	-2.14577E-4	4.88758E-3	9.34124E-2	2.7297E1	-3.26809E1	-3.26634E1	2.67974E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80018E1	-6.19888E-4	-8.80006E1	-9.53674E-5	5.14984E-3	9.34839E-2	2.73136E1	-3.26511E1	-3.26454E1	2.67775E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.99348E-1
4.0E0	2.03E3	1.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80014E1	-7.62939E-4	-8.80006E1	-9.53674E-5	5.36442E-3	9.33886E-2	2.72931E1	-3.26873E1	-3.25701E1	2.68502E1	1.20142E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.98342E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-5.72205E-4	-8.80003E1	-1.90735E-4	5.24521E-3	9.36031E-2	2.73219E1	-3.26591E1	-3.26518E1	2.6807E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80015E1	-5.24521E-4	-8.80001E1	-9.53674E-5	5.14984E-3	9.3317E-2	2.72992E1	-3.26284E1	-3.26301E1	2.68028E1	1.19705E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80017E1	-6.91414E-4	-8.80003E1	-7.15256E-5	5.05447E-3	9.39846E-2	2.72733E1	-3.26554E1	-3.25545E1	2.6807E1	1.19757E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-5.48363E-4	-8.80003E1	2.14577E-4	5.50747E-3	9.38416E-2	2.73063E1	-3.2659E1	-3.26413E1	2.68082E1	1.2026E-7	2.51739E-3	2.51739E-3	6.2752E-3	3.00966E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80016E1	-5.72205E-4	-8.80003E1	2.14577E-4	4.81606E-3	9.38416E-2	2.72744E1	-3.26655E1	-3.26661E1	2.68088E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98156E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.54877E-2	-8.80016E1	-7.86781E-4	-8.80002E1	0.0E0	4.8399E-3	9.38416E-2	2.72997E1	-3.26675E1	-3.26639E1	2.68136E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.4E1	3.14E2	1.0E0	5.66E2	3.82E2	-7.49466E-2	-8.80015E1	-8.58307E-4	-8.80003E1	7.15256E-5	4.76837E-3	9.35555E-2	2.73129E1	-3.26573E1	-3.25743E1	2.68088E1	1.19757E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00824E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.48695E-2	-8.80013E1	-5.00679E-4	-8.80006E1	1.19209E-4	4.86374E-3	9.34124E-2	2.73128E1	-3.26838E1	-3.26915E1	2.684E1	1.198E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80014E1	-6.67572E-4	-8.8E1	3.57628E-4	4.69685E-3	9.32932E-2	2.72652E1	-3.26666E1	-3.25043E1	2.68045E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.01995E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80013E1	-4.76837E-4	-8.8E1	3.8147E-4	5.126E-3	9.32932E-2	2.72697E1	-3.26791E1	-3.26661E1	2.68082E1	1.19937E-7	2.51271E-3	2.51271E-3	6.3131E-3	3.01881E-1
1.8E1	2.33E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80013E1	-6.19888E-4	-8.80002E1	2.38419E-4	4.81606E-3	9.35078E-2	2.7301E1	-3.26986E1	-3.26508E1	2.67908E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.9E1	3.37E2	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80013E1	-2.14577E-4	-8.80001E1	2.38419E-5	5.03063E-3	9.33886E-2	2.73088E1	-3.26278E1	-3.26052E1	2.68286E1	1.19757E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00824E-1
2.0E1	2.285E3	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80013E1	-4.05312E-4	-8.8E1	1.66893E-4	5.00679E-3	9.35078E-2	2.7308E1	-3.26364E1	-3.25739E1	2.67968E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80015E1	-1.43051E-4	-8.8E1	-9.53674E-5	4.93526E-3	9.36031E-2	2.72968E1	-3.26773E1	-3.25859E1	2.68151E1	1.1979E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00852E-1
2.2E1	1.41E2	1.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80013E1	-5.72205E-4	-8.80003E1	-9.53674E-5	4.69685E-3	9.39131E-2	2.73135E1	-3.26585E1	-3.26705E1	2.68034E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.9892E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80017E1	-6.91414E-4	-8.80001E1	-4.76837E-5	5.17368E-3	9.35078E-2	2.73369E1	-3.26591E1	-3.26416E1	2.68052E1	1.20278E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.98481E-1