[Scan]
initial_time=2016-01-28T18:01:19
final_time=2016-01-28T18:01:41
ip_count=19
run=1026
dataset=3
scan=207
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.76011E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.76782E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.41088E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.54784E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.62771E-8
mult1=-1.38703E-8
mult2=-2.68069E-9
rf_tmon=-4.53646E-3
rf_agc=3.24684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.3494E-10
bslens_vset=-6.2E0
bslens_vmon=-6.58743E0
bslens_imon=1.95735E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19424E1
lens5a_imon=2.00903E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12591E2
lens4a_imon=2.05493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53599E1
cs_ef1b_imon=3.09367E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.01753E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03925E1
cs_ea1_imon=1.23793E-5
lens1_vset=-2.7E0
lens1_vmon=-3.15431E0
lens1_imon=2.03666E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64671E1
os_ef1alow_imon=2.9698E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04393E1
cs_ea2_imon=1.36987E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84438E1
cs_ef1a_imon=2.99824E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.16402E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11136E1
os_restr1_imon=4.316E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14567E1
os_ea1_imon=2.40125E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63748E1
os_ef1bup_imon=3.07421E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.01983E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.8838E-8
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-8.50904E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25779E1
iondef3_imon=1.52272E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.62906E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.67462E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.16618E0
ionrepsh_imon=9.22494E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34469E1
lens5b_imon=2.21667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74464E1
cs_ef2b_imon=3.12698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48041E0
os_ea2_imon=-9.95102E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05994E2
lens4b_imon=2.00183E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71245E1
cs_ef2a_imon=3.18649E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06017E0
os_ef2alow_imon=-2.64542E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52721E-1
os_ef2bup_imon=-5.18664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.37212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.34362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.10002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72745E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.07605E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.10434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.34889E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13638E0
cs_ionaccel_imon=-1.06606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56224E1
einzel_imon=7.63544E-6
window_vset=0.0E0
window_vmon=1.72686E-1
window_imon=-1.12219E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86357E1
mask2_imon=-5.98233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.77935E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.85288E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=6.74113E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.96999E0
defgridb_imon=6.36982E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3322E1
os_fil1_imon=9.41191E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07841E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60466E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30587E1
cs_fil1_imon=9.24194E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34627E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62271E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66699E-2
os_fil2_imon=-2.5627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.98711E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33685E-1
cs_fil2_imon=-2.29448E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92751E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32644E-3
inlet_lpb_pmon=3.01544E-1
chamber_ion_pmon=1.19804E-7
chamber_cvt_pmon=2.51918E-3
foreline_cvt_pmon=2.51918E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55018E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.25E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80015E1	-6.91414E-4	-8.80002E1	1.19209E-4	5.53131E-3	9.39846E-2	2.71885E1	-3.25695E1	-3.26909E1	2.68082E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00676E-1
2.0E0	8.979E3	4.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80014E1	-8.34465E-4	-8.80001E1	3.09944E-4	5.05447E-3	9.37462E-2	2.73099E1	-3.26741E1	-3.26416E1	2.6777E1	1.20055E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.99686E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80016E1	-8.58307E-4	-8.80002E1	1.19209E-4	4.88758E-3	9.37939E-2	2.73216E1	-3.26632E1	-3.26354E1	2.68076E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01871E-1
4.0E0	2.074E3	1.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80019E1	-8.34465E-4	-8.80001E1	7.15256E-5	5.24521E-3	9.34839E-2	2.72696E1	-3.26567E1	-3.26615E1	2.68022E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80018E1	-6.67572E-4	-8.80005E1	1.43051E-4	5.34058E-3	9.377E-2	2.73345E1	-3.26699E1	-3.26476E1	2.67974E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80019E1	-8.82149E-4	-8.80004E1	1.90735E-4	5.19753E-3	9.35555E-2	2.73163E1	-3.26673E1	-3.26296E1	2.68314E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80016E1	-8.34465E-4	-8.80004E1	4.76837E-5	4.74453E-3	9.37939E-2	2.73069E1	-3.26855E1	-3.26014E1	2.68226E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80017E1	-9.53674E-4	-8.80005E1	4.29153E-4	4.79221E-3	9.37462E-2	2.72841E1	-3.26579E1	-3.26248E1	2.6768E1	1.20226E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80017E1	-7.86781E-4	-8.80004E1	2.86102E-4	5.05447E-3	9.35555E-2	2.73016E1	-3.26461E1	-3.26543E1	2.68454E1	1.19959E-7	2.51809E-3	2.51809E-3	6.32916E-3	3.02714E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80018E1	-6.67572E-4	-8.80003E1	3.33786E-4	5.126E-3	9.35793E-2	2.73183E1	-3.26621E1	-3.2596E1	2.67788E1					
1.4E1	2.59E2	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80016E1	-8.10623E-4	-8.80005E1	2.14577E-4	5.07832E-3	9.38416E-2	2.73045E1	-3.26549E1	-3.25983E1	2.68262E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80015E1	-8.10623E-4	-8.80004E1	2.86102E-4	4.74453E-3	9.34601E-2	2.72793E1	-3.26585E1	-3.26651E1	2.68034E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0071E-1
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80015E1	-8.10623E-4	-8.80001E1	5.24521E-4	4.76837E-3	9.377E-2	2.73193E1	-3.26685E1	-3.25977E1	2.68346E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.7E1	3.3E1	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80018E1	-7.86781E-4	-8.80002E1	1.19209E-4	4.55379E-3	9.3627E-2	2.73159E1	-3.26554E1	-3.26615E1	2.68196E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99941E-1
1.8E1	1.96E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80018E1	-8.58307E-4	-8.80004E1	7.15256E-5	4.76837E-3	9.37223E-2	2.73135E1	-3.26735E1	-3.2623E1	2.67992E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.99E-1
1.9E1	3.11E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80015E1	-8.10623E-4	-8.80004E1	-2.38419E-5	4.93526E-3	9.34601E-2	2.72974E1	-3.26561E1	-3.26219E1	2.67878E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
2.0E1	2.224E3	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80015E1	-9.29832E-4	-8.80002E1	2.38419E-5	5.29289E-3	9.33886E-2	2.72922E1	-3.2675E1	-3.26138E1	2.67932E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
2.1E1	9.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80017E1	-4.76837E-4	-8.80002E1	4.05312E-4	4.93526E-3	9.34124E-2	2.73228E1	-3.2659E1	-3.2636E1	2.68395E1	1.20137E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.03081E-1
2.2E1	1.76E2	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80016E1	-5.96046E-4	-8.80003E1	5.00679E-4	5.10216E-3	9.35316E-2	2.73228E1	-3.26561E1	-3.26284E1	2.67864E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80013E1	-9.29832E-4	-8.80003E1	5.00679E-4	4.88758E-3	9.36508E-2	2.72745E1	-3.26482E1	-3.25779E1	2.68088E1	1.19804E-7	2.51918E-3	2.51918E-3	6.32644E-3	3.01544E-1