[Scan]
initial_time=2016-01-28T18:02:20
final_time=2016-01-28T18:02:42
ip_count=19
run=1026
dataset=3
scan=209
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82191E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.09291E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.43889E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.57447E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.62629E-8
mult1=-1.00028E-8
mult2=-2.57143E-9
rf_tmon=-5.2562E-3
rf_agc=3.24101E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.46503E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72141E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.10235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04561E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05294E1
cs_ea1_imon=1.23288E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04917E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.41709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.00036E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.15527E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.43405E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.54218E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.05972E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.8878E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-3.7505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26346E1
iondef3_imon=1.47261E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.48508E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=9.33309E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33453E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42093E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.36328E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72873E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.08522E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.25803E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.13107E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.19678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33183E1
os_fil1_imon=9.3902E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07107E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60373E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30564E1
cs_fil1_imon=9.24683E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29562E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62414E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21496E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35576E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.4E2	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80016E1	-8.82149E-4	-8.8E1	2.86102E-4	4.74453E-3	9.34362E-2	2.73138E1	-3.2655E1	-3.2626E1	2.68134E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02659E-1
2.0E0	8.924E3	1.3E1	3.16E2	1.6E2	-7.30918E-2	-8.80019E1	-5.96046E-4	-8.80003E1	7.15256E-5	5.126E-3	9.37462E-2	2.73032E1	-3.2646E1	-3.26372E1	2.68238E1	1.19991E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.02115E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80017E1	-6.67572E-4	-8.80004E1	-2.38419E-4	4.52995E-3	9.34362E-2	2.7292E1	-3.26972E1	-3.26419E1	2.67965E1	1.19713E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.01742E-1
4.0E0	2.066E3	3.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80018E1	-7.86781E-4	-8.80003E1	-1.19209E-4	5.22137E-3	9.36508E-2	2.73263E1	-3.26661E1	-3.26543E1	2.68244E1	1.1993E-7	2.51265E-3	2.51265E-3	6.33341E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80024E1	-1.0252E-3	-8.80001E1	9.53674E-5	4.62532E-3	9.34124E-2	2.73027E1	-3.26815E1	-3.26231E1	2.67943E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80015E1	-7.15256E-4	-8.80001E1	-7.15256E-5	4.79221E-3	9.35793E-2	2.7297E1	-3.26695E1	-3.26469E1	2.681E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80015E1	-9.77516E-4	-8.80002E1	-2.38419E-4	4.88758E-3	9.34362E-2	2.72702E1	-3.26456E1	-3.26468E1	2.68232E1	1.20142E-7	2.52025E-3	2.52025E-3	6.33919E-3	3.02115E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80017E1	-7.62939E-4	-8.80003E1	-2.38419E-4	5.07832E-3	9.37939E-2	2.72951E1	-3.26655E1	-3.26178E1	2.68076E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02133E-1
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80016E1	-8.82149E-4	-8.8E1	-2.38419E-4	4.93526E-3	9.37939E-2	2.72937E1	-3.2638E1	-3.26386E1	2.68226E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.01347E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80014E1	-9.29832E-4	-8.8E1	7.15256E-5	4.48227E-3	9.37223E-2	2.73069E1	-3.26368E1	-3.26374E1	2.67908E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.4E1	2.81E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80014E1	-9.53674E-4	-8.80001E1	-2.38419E-5	4.74453E-3	9.34362E-2	2.72903E1	-3.26508E1	-3.25942E1	2.68394E1	1.20435E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9978E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80011E1	-5.48363E-4	-8.80001E1	-1.43051E-4	4.62532E-3	9.36031E-2	2.72898E1	-3.26695E1	-3.26493E1	2.6816E1	1.19991E-7	2.51826E-3	2.51826E-3	6.28825E-3	3.01347E-1
1.6E1	4.9E1	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80013E1	-9.05991E-4	-8.80002E1	-4.76837E-5	4.79221E-3	9.36747E-2	2.73315E1	-3.26567E1	-3.26386E1	2.67716E1					
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80013E1	-8.82149E-4	-8.80002E1	2.14577E-4	4.55379E-3	9.34124E-2	2.73063E1	-3.26809E1	-3.26236E1	2.68244E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
1.8E1	2.12E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80014E1	-5.96046E-4	-8.80005E1	3.09944E-4	4.72069E-3	9.36985E-2	2.73027E1	-3.26663E1	-3.26164E1	2.67704E1	1.19902E-7	2.52707E-3	2.52707E-3	6.30202E-3	2.9892E-1
1.9E1	3.7E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80017E1	-5.72205E-4	-8.80002E1	3.09944E-4	4.72069E-3	9.36747E-2	2.73188E1	-3.26733E1	-3.26522E1	2.67925E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.99E-1
2.0E1	2.17E3	4.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80019E1	-8.58307E-4	-8.80004E1	-4.76837E-5	4.72069E-3	9.37939E-2	2.72926E1	-3.26946E1	-3.2563E1	2.67982E1	1.20028E-7	2.51886E-3	2.51886E-3	6.31779E-3	2.9926E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80018E1	-6.91414E-4	-8.80003E1	0.0E0	4.88758E-3	9.37462E-2	2.72703E1	-3.2649E1	-3.26708E1	2.68316E1	1.19991E-7	2.52179E-3	2.52179E-3	6.31879E-3	3.02426E-1
2.2E1	1.66E2	0.0E0	8.89E2	6.17E2	-7.11597E-2	-8.80015E1	-7.39098E-4	-8.80004E1	2.86102E-4	4.55379E-3	9.3627E-2	2.72827E1	-3.26614E1	-3.26195E1	2.67956E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80016E1	-7.39098E-4	-8.79999E1	1.43051E-4	4.79221E-3	9.36985E-2	2.72873E1	-3.26615E1	-3.26346E1	2.68148E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1