[Scan]
initial_time=2016-01-28T18:04:46
final_time=2016-01-28T18:05:06
ip_count=19
run=1026
dataset=3
scan=214
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.79667E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.9129E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.46284E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.55113E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.62638E-8
mult1=-1.0812E-8
mult2=-2.74855E-9
rf_tmon=-5.61794E-3
rf_agc=3.24083E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.56791E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20265E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.09839E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04574E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=1.25127E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08702E0
lens1_imon=1.51395E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.42899E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.01225E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.18587E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.44162E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=9.78371E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.05252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.90638E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-1.19098E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26621E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.80992E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=9.31146E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3403E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41492E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.10802E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.07498E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.2469E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=7.42152E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.05899E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50084E3
multb_neg_imon=7.5198E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.42012E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07233E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60923E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30529E1
cs_fil1_imon=9.24178E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24637E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62778E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.82728E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21536E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86322E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.12E2	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80015E1	-1.16825E-3	-8.80003E1	7.15256E-5	5.00679E-3	9.36985E-2	2.72898E1	-3.2652E1	-3.25995E1	2.6813E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03185E-1
2.0E0	9.012E3	1.3E1	3.16E2	1.6E2	-7.45602E-2	-8.80017E1	-7.86781E-4	-8.80004E1	4.76837E-5	4.72069E-3	9.34601E-2	2.72984E1	-3.26829E1	-3.26327E1	2.67974E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.48695E-2	-8.80019E1	-9.53674E-4	-8.80004E1	2.38419E-5	5.05447E-3	9.34839E-2	2.73109E1	-3.26544E1	-3.26202E1	2.68123E1	1.19872E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.00676E-1
4.0E0	2.004E3	2.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80018E1	-9.05991E-4	-8.80002E1	-1.90735E-4	5.07832E-3	9.32217E-2	2.72859E1	-3.26945E1	-3.26074E1	2.67872E1	1.19871E-7	2.52043E-3	2.52043E-3	6.31274E-3	3.01545E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-1.16825E-3	-8.8E1	-2.38419E-4	4.86374E-3	9.33886E-2	2.73216E1	-3.26708E1	-3.26148E1	2.67962E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80013E1	-1.12057E-3	-8.80001E1	2.38419E-5	4.8399E-3	9.3627E-2	2.73159E1	-3.26693E1	-3.26284E1	2.6777E1	1.19544E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80015E1	-9.29832E-4	-8.80001E1	-2.38419E-5	4.673E-3	9.34124E-2	2.72768E1	-3.26773E1	-3.26195E1	2.67989E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80016E1	-8.34465E-4	-8.80002E1	1.43051E-4	4.79221E-3	9.32693E-2	2.72841E1	-3.26518E1	-3.2638E1	2.68112E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98222E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80017E1	-9.05991E-4	-8.80004E1	2.14577E-4	4.88758E-3	9.31263E-2	2.73177E1	-3.26615E1	-3.25701E1	2.67992E1	1.19697E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0071E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80019E1	-6.91414E-4	-8.80001E1	1.19209E-4	4.64916E-3	9.3317E-2	2.72656E1	-3.26773E1	-3.25824E1	2.68082E1	1.20435E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.4E1	2.76E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.8002E1	-7.86781E-4	-8.80003E1	4.52995E-4	4.55379E-3	9.33886E-2	2.73297E1	-3.26909E1	-3.26116E1	2.6777E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01085E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.8002E1	-8.82149E-4	-8.80002E1	3.57628E-4	4.72069E-3	9.33647E-2	2.72751E1	-3.27264E1	-3.26499E1	2.6831E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80019E1	-5.96046E-4	-8.80003E1	2.14577E-4	4.88758E-3	9.35555E-2	2.72823E1	-3.26747E1	-3.26158E1	2.6819E1	1.20278E-7	2.51662E-3	2.51662E-3	6.27461E-3	3.00824E-1
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.8002E1	-8.34465E-4	-8.80003E1	2.38419E-5	4.88758E-3	9.37223E-2	2.73233E1	-3.26653E1	-3.26801E1	2.68012E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.8E1	2.18E2	0.0E0	7.27E2	5.0E2	-7.09279E-2	-8.80018E1	-8.82149E-4	-8.80002E1	7.15256E-5	5.00679E-3	9.35316E-2	2.72558E1	-3.26578E1	-3.26273E1	2.68126E1	1.20127E-7	2.52197E-3	2.52197E-3	6.3074E-3	3.01733E-1
1.9E1	2.92E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80017E1	-6.67572E-4	-8.80001E1	1.90735E-4	5.29289E-3	9.35793E-2	2.73568E1	-3.26609E1	-3.26518E1	2.67914E1	1.19991E-7	2.52635E-3	2.52635E-3	6.30171E-3	3.02699E-1
2.0E1	2.113E3	3.0E0	8.08E2	5.58E2	-7.201E-2	-8.80018E1	-8.10623E-4	-8.80003E1	1.66893E-4	4.93526E-3	9.36747E-2	2.73003E1	-3.26476E1	-3.25948E1	2.68076E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80019E1	-9.05991E-4	-8.8E1	2.38419E-4	4.93526E-3	9.34839E-2	2.73181E1	-3.26402E1	-3.27074E1	2.67908E1	1.19809E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00824E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80018E1	-1.04904E-3	-8.80002E1	-2.38419E-5	4.93526E-3	9.36747E-2	2.73033E1	-3.26543E1	-3.25605E1	2.6789E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80017E1	-5.48363E-4	-8.80002E1	0.0E0	4.60148E-3	9.33647E-2	2.73105E1	-3.26705E1	-3.26621E1	2.6813E1	1.20106E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1