[Scan]
initial_time=2016-01-28T18:05:14
final_time=2016-01-28T18:05:34
ip_count=19
run=1026
dataset=3
scan=215
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.8359E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.64253E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.448E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.51939E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.62767E-8
mult1=-1.26542E-8
mult2=-2.81642E-9
rf_tmon=-3.88156E-3
rf_agc=3.42468E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.54025E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05174E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.10343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04569E1
cs_ea1_imon=1.24041E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06369E0
lens1_imon=1.47436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.95495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.40003E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.0E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.14333E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29815E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=2.44911E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=9.71764E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.03414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.86866E-8
tplens_vset=1.4E-1
tplens_vmon=1.59778E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.57663E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2462E0
ionrepsh_imon=9.28937E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39898E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.37697E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.08856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.09667E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.24387E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.02655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.58692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.3375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=6.93566E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.39861E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07708E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60004E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30587E1
cs_fil1_imon=9.23842E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29082E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60014E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42747E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.88821E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32644E-3
inlet_lpb_pmon=3.01284E-1
chamber_ion_pmon=1.20166E-7
chamber_cvt_pmon=2.51593E-3
foreline_cvt_pmon=2.51593E-3
chamber_tmon=1.40015E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81516E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.67E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80015E1	-5.24521E-4	-8.80002E1	-2.38419E-5	4.673E-3	9.36508E-2	2.72715E1	-3.26762E1	-3.26278E1	2.68053E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
2.0E0	8.536E3	8.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80017E1	-6.67572E-4	-8.8E1	4.52995E-4	4.81606E-3	9.34601E-2	2.72684E1	-3.26756E1	-3.2626E1	2.682E1	1.20192E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80016E1	-7.15256E-4	-8.80003E1	5.72205E-4	4.8399E-3	9.3317E-2	2.72827E1	-3.26272E1	-3.26508E1	2.68105E1	1.19937E-7	2.51611E-3	2.51611E-3	6.29603E-3	3.00251E-1
4.0E0	1.929E3	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80018E1	-6.19888E-4	-8.80002E1	4.29153E-4	4.81606E-3	9.34362E-2	2.73435E1	-3.26909E1	-3.26482E1	2.6783E1	1.19941E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80017E1	-9.05991E-4	-8.79997E1	4.05312E-4	4.69685E-3	9.35793E-2	2.72856E1	-3.26885E1	-3.25871E1	2.67884E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80017E1	-6.91414E-4	-8.80001E1	3.33786E-4	4.8399E-3	9.32217E-2	2.72739E1	-3.26705E1	-3.2647E1	2.6819E1	1.2033E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80019E1	-5.24521E-4	-8.80001E1	4.76837E-4	5.07832E-3	9.31501E-2	2.72873E1	-3.26768E1	-3.26358E1	2.68178E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80016E1	-7.62939E-4	-8.80003E1	3.57628E-4	4.81606E-3	9.32932E-2	2.72691E1	-3.26567E1	-3.25865E1	2.68088E1	1.20435E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80013E1	-6.19888E-4	-8.8E1	5.24521E-4	4.86374E-3	9.31025E-2	2.72903E1	-3.26242E1	-3.26213E1	2.68052E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.9943E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80016E1	-5.96046E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.31263E-2	2.73008E1	-3.26517E1	-3.26376E1	2.68027E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01347E-1
1.4E1	2.75E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80018E1	-4.29153E-4	-8.80001E1	3.57628E-4	4.76837E-3	9.31978E-2	2.73105E1	-3.26723E1	-3.25593E1	2.67842E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80016E1	-7.15256E-4	-8.80002E1	3.8147E-4	4.74453E-3	9.34601E-2	2.73004E1	-3.2629E1	-3.26502E1	2.68111E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.6E1	4.7E1	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80016E1	-8.10623E-4	-8.80002E1	4.29153E-4	4.72069E-3	9.34362E-2	2.72818E1	-3.26676E1	-3.26713E1	2.67892E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80018E1	-6.19888E-4	-8.80001E1	4.29153E-4	4.74453E-3	9.32217E-2	2.73169E1	-3.26767E1	-3.26278E1	2.68325E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.8E1	1.97E2	0.0E0	7.27E2	5.0E2	-7.41738E-2	-8.80014E1	-6.91414E-4	-8.80003E1	2.38419E-4	4.93526E-3	9.32932E-2	2.7266E1	-3.26585E1	-3.26332E1	2.67656E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
1.9E1	3.62E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80015E1	-8.58307E-4	-8.80003E1	2.14577E-4	4.79221E-3	9.34362E-2	2.72703E1	-3.26472E1	-3.25776E1	2.67782E1	1.20069E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9978E-1
2.0E1	2.139E3	5.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80017E1	-8.34465E-4	-8.8E1	2.14577E-4	4.95911E-3	9.35793E-2	2.72853E1	-3.26975E1	-3.2626E1	2.68214E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02133E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80017E1	-9.53674E-4	-8.80001E1	3.33786E-4	4.86374E-3	9.33647E-2	2.7308E1	-3.2649E1	-3.26732E1	2.68377E1	1.19851E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0071E-1
2.2E1	1.41E2	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.8002E1	-7.15256E-4	-8.8E1	2.38419E-5	4.86374E-3	9.32217E-2	2.73187E1	-3.26738E1	-3.26301E1	2.68028E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80019E1	-8.58307E-4	-8.8E1	1.66893E-4	4.36306E-3	9.34362E-2	2.73273E1	-3.26663E1	-3.26266E1	2.68346E1	1.20166E-7	2.51593E-3	2.51593E-3	6.32644E-3	3.01284E-1