[Scan]
initial_time=2016-01-28T18:06:10
final_time=2016-01-28T18:06:30
ip_count=19
run=1026
dataset=3
scan=217
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.77846E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.96869E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.44389E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.53925E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62871E-8
mult1=-1.06073E-8
mult2=-2.87031E-9
rf_tmon=-3.61719E-3
rf_agc=3.40606E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=5.36931E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6786E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04824E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53928E1
cs_ef1b_imon=3.09512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.26058E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07076E0
lens1_imon=1.56284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.94916E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.39755E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=3.00963E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.15546E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.30381E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1481E1
os_ea1_imon=2.45796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63624E1
os_ef1bup_imon=3.09477E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.53005E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=2.03621E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.87567E-8
tplens_vset=1.4E-1
tplens_vmon=1.64969E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26963E1
iondef2_imon=1.56461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.59702E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=9.28937E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.13508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40252E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02792E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=3.36445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.10467E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72775E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.15574E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.26676E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-1.10108E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.67295E-1
window_imon=-1.14278E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.19758E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.29503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.07724E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26382E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.40051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30529E1
cs_fil1_imon=9.23938E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31753E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60218E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.5823E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29206E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36019E-1
cs_fil2_imon=-2.13052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17676E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98592E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.74E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80019E1	-5.96046E-4	-8.80007E1	3.57628E-4	4.33922E-3	9.36985E-2	2.72874E1	-3.26785E1	-3.26567E1	2.68118E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
2.0E0	8.775E3	5.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80018E1	-5.48363E-4	-8.80007E1	5.48363E-4	4.74453E-3	9.35078E-2	2.73008E1	-3.26731E1	-3.2563E1	2.67866E1	1.19953E-7	2.52707E-3	2.52707E-3	6.33977E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80018E1	-7.86781E-4	-8.80006E1	2.14577E-4	4.79221E-3	9.3627E-2	2.72933E1	-3.26927E1	-3.26644E1	2.681E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.01475E-1
4.0E0	1.96E3	3.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80016E1	-8.10623E-4	-8.80004E1	1.43051E-4	4.72069E-3	9.377E-2	2.72997E1	-3.26747E1	-3.25828E1	2.68124E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0148E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80017E1	-1.3113E-3	-8.80003E1	3.09944E-4	4.57764E-3	9.33647E-2	2.72732E1	-3.26585E1	-3.26172E1	2.68041E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80017E1	-9.05991E-4	-8.80002E1	3.33786E-4	4.81606E-3	9.36508E-2	2.72943E1	-3.26645E1	-3.26675E1	2.68111E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80019E1	-1.00136E-3	-8.8E1	1.43051E-4	4.41074E-3	9.37223E-2	2.72354E1	-3.26633E1	-3.25966E1	2.68034E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80019E1	-1.16825E-3	-8.80003E1	2.14577E-4	4.57764E-3	9.34601E-2	2.73237E1	-3.27017E1	-3.25635E1	2.68009E1	1.19861E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00302E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-8.34465E-4	-8.80005E1	4.52995E-4	4.52995E-3	9.35316E-2	2.72787E1	-3.26753E1	-3.27209E1	2.67905E1	1.19607E-7	2.51136E-3	2.51136E-3	6.28511E-3	3.03081E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80018E1	-7.39098E-4	-8.80003E1	1.43051E-4	4.69685E-3	9.34124E-2	2.72961E1	-3.26819E1	-3.25605E1	2.68064E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02769E-1
1.4E1	2.53E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80016E1	-6.91414E-4	-8.80002E1	2.86102E-4	4.98295E-3	9.35793E-2	2.73225E1	-3.26518E1	-3.26446E1	2.6804E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80022E1	-6.67572E-4	-8.80004E1	2.86102E-4	4.86374E-3	9.37462E-2	2.72945E1	-3.26496E1	-3.26661E1	2.67842E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02922E-1
1.6E1	4.1E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80016E1	-1.14441E-3	-8.80001E1	3.57628E-4	5.29289E-3	9.34839E-2	2.73009E1	-3.26362E1	-3.2614E1	2.68034E1	1.19749E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.01738E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.8002E1	-8.58307E-4	-8.80006E1	3.8147E-4	4.98295E-3	9.35793E-2	2.72889E1	-3.26482E1	-3.25996E1	2.6783E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01085E-1
1.8E1	2.19E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80021E1	-7.39098E-4	-8.80002E1	1.43051E-4	5.14984E-3	9.36508E-2	2.73153E1	-3.26633E1	-3.26368E1	2.6834E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01347E-1
1.9E1	3.23E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8002E1	-1.07288E-3	-8.80005E1	3.8147E-4	5.05447E-3	9.34124E-2	2.73303E1	-3.26903E1	-3.2632E1	2.67854E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
2.0E1	2.136E3	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80015E1	-9.53674E-4	-8.80007E1	2.14577E-4	4.48227E-3	9.34124E-2	2.72774E1	-3.2659E1	-3.26319E1	2.68094E1	1.19965E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.00563E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80017E1	-7.39098E-4	-8.80003E1	0.0E0	4.52995E-3	9.33886E-2	2.72847E1	-3.26476E1	-3.2641E1	2.67858E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
2.2E1	1.6E2	1.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80015E1	-1.28746E-3	-8.80003E1	3.57628E-4	4.76837E-3	9.34839E-2	2.73139E1	-3.26319E1	-3.26679E1	2.68214E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80015E1	-9.29832E-4	-8.80006E1	2.14577E-4	5.10216E-3	9.35555E-2	2.72775E1	-3.26963E1	-3.2587E1	2.67968E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.03286E-1