[Scan]
initial_time=2016-01-28T18:06:37
final_time=2016-01-28T18:06:57
ip_count=19
run=1026
dataset=3
scan=218
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.78406E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.22821E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.45713E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.53784E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.62429E-8
mult1=-9.47571E-9
mult2=-2.77421E-9
rf_tmon=-5.22326E-3
rf_agc=3.20467E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.39422E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.36275E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04863E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=3.084E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=1.24713E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06663E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=2.97001E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.39932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8451E1
cs_ef1a_imon=2.9999E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.16288E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.3125E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15046E1
os_ea1_imon=2.43743E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.65039E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.04837E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.87784E-8
tplens_vset=1.4E-1
tplens_vmon=1.6727E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26685E1
iondef3_imon=1.5186E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.58152E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=9.20089E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3919E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71263E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08468E0
os_ef2alow_imon=-2.63366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71166E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1106E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01879E1
cs_anode2_imon=2.10467E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7298E1
iondef1_imon=1.06485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.076E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.09211E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.27822E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0867E0
cs_ionaccel_imon=-1.03505E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=1.97414E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-7.57025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.28795E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.40404E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07219E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60208E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30569E1
cs_fil1_imon=9.23654E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30421E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60625E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.54176E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23891E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54745E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21577E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55731E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.04E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80018E1	-1.12057E-3	-8.80001E1	2.38419E-5	4.45843E-3	9.35078E-2	2.73039E1	-3.26596E1	-3.25859E1	2.68064E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
2.0E0	8.426E3	1.1E1	3.16E2	1.6E2	-7.31692E-2	-8.80017E1	-1.19209E-3	-8.80001E1	3.09944E-4	5.03063E-3	9.33886E-2	2.73254E1	-3.2648E1	-3.26596E1	2.68065E1	1.20209E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.47149E-2	-8.80018E1	-6.67572E-4	-8.80003E1	2.6226E-4	4.98295E-3	9.35078E-2	2.73033E1	-3.2682E1	-3.26331E1	2.67902E1	1.198E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.0148E-1
4.0E0	1.99E3	2.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80019E1	-6.91414E-4	-8.8E1	2.86102E-4	4.93526E-3	9.35555E-2	2.73243E1	-3.26843E1	-3.26272E1	2.68088E1	1.19891E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80017E1	-8.10623E-4	-8.80006E1	3.57628E-4	4.55379E-3	9.31978E-2	2.72841E1	-3.26747E1	-3.26074E1	2.6774E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80018E1	-8.34465E-4	-8.80003E1	-4.76837E-5	5.07832E-3	9.36031E-2	2.72919E1	-3.26849E1	-3.2644E1	2.67932E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-1.00136E-3	-8.80003E1	1.19209E-4	4.88758E-3	9.36031E-2	2.72626E1	-3.26803E1	-3.25977E1	2.68148E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80015E1	-5.72205E-4	-8.80007E1	9.53674E-5	4.64916E-3	9.36508E-2	2.73201E1	-3.26458E1	-3.25809E1	2.68076E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80014E1	-9.53674E-4	-8.80006E1	1.43051E-4	4.76837E-3	9.3174E-2	2.72757E1	-3.26573E1	-3.26224E1	2.68082E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80019E1	-9.05991E-4	-8.80002E1	1.43051E-4	4.76837E-3	9.35555E-2	2.72791E1	-3.26679E1	-3.2652E1	2.68088E1	1.19861E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.01085E-1
1.4E1	2.68E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80016E1	-9.05991E-4	-8.80006E1	4.05312E-4	4.62532E-3	9.36508E-2	2.73249E1	-3.26398E1	-3.26002E1	2.67944E1	1.198E-7	2.52169E-3	2.52169E-3	6.36144E-3	3.00197E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80016E1	-1.07288E-3	-8.80004E1	2.14577E-4	4.69685E-3	9.32932E-2	2.72526E1	-3.26484E1	-3.26231E1	2.6804E1	1.19965E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01347E-1
1.6E1	2.7E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80015E1	-8.10623E-4	-8.80001E1	1.90735E-4	4.673E-3	9.35793E-2	2.73039E1	-3.26452E1	-3.26549E1	2.68142E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01609E-1
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80018E1	-7.62939E-4	-8.80003E1	1.43051E-4	4.74453E-3	9.35793E-2	2.73405E1	-3.26549E1	-3.2605E1	2.67848E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9892E-1
1.8E1	2.07E2	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80018E1	-1.16825E-3	-8.80001E1	2.14577E-4	4.673E-3	9.32693E-2	2.73033E1	-3.26488E1	-3.26164E1	2.68238E1	1.19653E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9874E-1
1.9E1	3.44E2	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80019E1	-1.12057E-3	-8.79998E1	5.72205E-4	4.673E-3	9.33647E-2	2.73219E1	-3.26474E1	-3.26347E1	2.67845E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.00563E-1
2.0E1	2.12E3	2.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80019E1	-9.77516E-4	-8.79999E1	5.00679E-4	4.95911E-3	9.37223E-2	2.73201E1	-3.26693E1	-3.25858E1	2.67986E1	1.19841E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.006E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80019E1	-8.58307E-4	-8.8E1	7.62939E-4	4.95911E-3	9.35555E-2	2.7298E1	-3.26767E1	-3.26531E1	2.68151E1	1.20383E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
2.2E1	1.4E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80016E1	-9.05991E-4	-8.80004E1	4.05312E-4	4.86374E-3	9.36747E-2	2.72739E1	-3.26819E1	-3.26452E1	2.67944E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80014E1	-7.39098E-4	-8.79999E1	3.09944E-4	4.673E-3	9.34839E-2	2.7298E1	-3.26762E1	-3.26685E1	2.68154E1	1.19757E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97963E-1