[Scan]
initial_time=2016-01-28T18:07:05
final_time=2016-01-28T18:07:25
ip_count=19
run=1026
dataset=3
scan=219
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.77596E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.90324E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.4829E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.53512E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.62837E-8
mult1=-1.01136E-8
mult2=-2.7745E-9
rf_tmon=-4.38024E-3
rf_agc=3.34357E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.71668E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.0919E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.25739E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09377E0
lens1_imon=1.48497E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.42375E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.99676E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.16483E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=2.46398E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=9.53359E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.03269E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.87636E-8
tplens_vset=1.4E-1
tplens_vmon=1.68214E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.60036E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.2984E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=9.36724E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40606E0
os_ea2_imon=-8.08562E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17479E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.12319E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.30518E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.02295E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.18873E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.64355E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.00291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=5.95879E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.39129E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59741E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30496E1
cs_fil1_imon=9.24863E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35269E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60522E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82575E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43254E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.25054E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.91E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80013E1	-6.67572E-4	-8.80004E1	0.0E0	4.79221E-3	9.34839E-2	2.73104E1	-3.26638E1	-3.26166E1	2.68088E1	1.198E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
2.0E0	8.527E3	8.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80013E1	-9.29832E-4	-8.80003E1	1.43051E-4	4.64916E-3	9.38177E-2	2.73088E1	-3.26547E1	-3.26185E1	2.68138E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80013E1	-9.77516E-4	-8.80002E1	4.76837E-5	5.07832E-3	9.3627E-2	2.73171E1	-3.26368E1	-3.26283E1	2.68117E1	1.19883E-7	2.51384E-3	2.51384E-3	6.29603E-3	3.02426E-1
4.0E0	1.983E3	1.0E0	6.55E2	3.98E2	-7.286E-2	-8.80016E1	-6.4373E-4	-8.80005E1	-2.38419E-5	5.05447E-3	9.38892E-2	2.72829E1	-3.26759E1	-3.26771E1	2.68028E1	1.20028E-7	2.51783E-3	2.51783E-3	6.3074E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80015E1	-8.10623E-4	-8.80003E1	1.66893E-4	4.86374E-3	9.37223E-2	2.73143E1	-3.2667E1	-3.25832E1	2.68154E1	1.20174E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80016E1	-6.67572E-4	-8.80005E1	1.66893E-4	4.79221E-3	9.35316E-2	2.73051E1	-3.26567E1	-3.25978E1	2.68208E1	1.19819E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80016E1	-8.58307E-4	-8.80002E1	1.43051E-4	4.62532E-3	9.34839E-2	2.73187E1	-3.26685E1	-3.26148E1	2.68094E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80022E1	-1.0252E-3	-8.80002E1	4.05312E-4	4.36306E-3	9.34124E-2	2.7245E1	-3.26663E1	-3.26014E1	2.6804E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.02253E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80015E1	-8.82149E-4	-8.80003E1	4.76837E-4	4.41074E-3	9.35078E-2	2.72865E1	-3.26212E1	-3.26068E1	2.6834E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80018E1	-1.09673E-3	-8.80006E1	3.57628E-4	4.36306E-3	9.33647E-2	2.73171E1	-3.26296E1	-3.26386E1	2.68118E1	1.19939E-7	2.51662E-3	2.51662E-3	6.32112E-3	2.9978E-1
1.4E1	3.11E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80016E1	-6.4373E-4	-8.8E1	-2.38419E-5	4.29153E-3	9.35555E-2	2.72951E1	-3.26956E1	-3.26366E1	2.67897E1					
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.8002E1	-5.96046E-4	-8.79999E1	1.43051E-4	4.17233E-3	9.34362E-2	2.72979E1	-3.26945E1	-3.25809E1	2.6798E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01738E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80019E1	-1.00136E-3	-8.8E1	2.14577E-4	4.91142E-3	9.35555E-2	2.72788E1	-3.26579E1	-3.26875E1	2.6803E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.7E1	6.1E1	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80019E1	-8.34465E-4	-8.80003E1	-1.19209E-4	4.72069E-3	9.32455E-2	2.72676E1	-3.26305E1	-3.26216E1	2.68119E1	1.1993E-7	2.51679E-3	2.51679E-3	6.29703E-3	3.00247E-1
1.8E1	1.77E2	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80019E1	-1.23978E-3	-8.80002E1	1.19209E-4	4.72069E-3	9.34839E-2	2.73155E1	-3.26823E1	-3.25954E1	2.68022E1	1.19991E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.9944E-1
1.9E1	3.44E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80019E1	-1.00136E-3	-8.80005E1	-1.19209E-4	4.74453E-3	9.31978E-2	2.73311E1	-3.26632E1	-3.26183E1	2.67956E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00942E-1
2.0E1	2.138E3	1.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80019E1	-8.58307E-4	-8.79999E1	-9.53674E-5	4.81606E-3	9.33409E-2	2.73339E1	-3.26915E1	-3.2626E1	2.68196E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00453E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80021E1	-8.10623E-4	-8.80001E1	2.38419E-5	4.81606E-3	9.36031E-2	2.72502E1	-3.26626E1	-3.26296E1	2.6801E1	1.19766E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.02813E-1
2.2E1	1.54E2	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80019E1	-1.04904E-3	-8.79999E1	9.53674E-5	4.48227E-3	9.37462E-2	2.73116E1	-3.26626E1	-3.26372E1	2.68036E1	1.19697E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80019E1	-9.53674E-4	-8.80001E1	-1.19209E-4	4.81606E-3	9.35078E-2	2.73225E1	-3.26663E1	-3.2611E1	2.6795E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1