[Scan]
initial_time=2016-01-28T18:08:29
final_time=2016-01-28T18:08:49
ip_count=19
run=1026
dataset=3
scan=222
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.82424E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.38139E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.44916E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.47611E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.62281E-8
mult1=-1.15946E-8
mult2=-2.70065E-9
rf_tmon=-4.26008E-3
rf_agc=3.40245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.29408E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.97947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.0901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.24838E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06239E0
lens1_imon=1.52116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.40412E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.16131E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.44523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=9.72242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.03918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.881E-8
tplens_vset=1.4E-1
tplens_vmon=1.62341E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26663E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.60906E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=9.1961E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42694E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.10802E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68689E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.29498E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.41886E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.21338E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.41513E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60406E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3061E1
cs_fil1_imon=9.23716E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29863E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60734E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25909E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21581E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.72507E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.79E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80018E1	-7.62939E-4	-8.80004E1	7.15256E-5	4.88758E-3	9.3317E-2	2.73271E1	-3.26793E1	-3.26671E1	2.68094E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
2.0E0	8.341E3	4.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80016E1	-7.86781E-4	-8.80003E1	-9.53674E-5	4.98295E-3	9.34362E-2	2.7291E1	-3.26725E1	-3.26003E1	2.681E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.8002E1	-5.96046E-4	-8.80004E1	-2.38419E-5	4.673E-3	9.34124E-2	2.72802E1	-3.2677E1	-3.26405E1	2.67775E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.01475E-1
4.0E0	1.927E3	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80018E1	-6.91414E-4	-8.80003E1	7.15256E-5	4.76837E-3	9.35078E-2	2.73147E1	-3.26807E1	-3.26266E1	2.6801E1	1.19941E-7	2.51077E-3	2.51077E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80013E1	-6.4373E-4	-8.80005E1	1.66893E-4	4.72069E-3	9.36747E-2	2.73153E1	-3.26699E1	-3.26368E1	2.68058E1	1.19757E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80016E1	-8.10623E-4	-8.80003E1	1.43051E-4	4.52995E-3	9.34362E-2	2.73063E1	-3.26615E1	-3.2626E1	2.681E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80018E1	-9.29832E-4	-8.80005E1	2.86102E-4	4.45843E-3	9.34362E-2	2.72532E1	-3.26679E1	-3.25883E1	2.68154E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80016E1	-9.05991E-4	-8.80001E1	2.14577E-4	4.57764E-3	9.34839E-2	2.73123E1	-3.26741E1	-3.26855E1	2.6825E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03286E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80015E1	-8.82149E-4	-8.80004E1	-4.76837E-5	4.72069E-3	9.37939E-2	2.73003E1	-3.26663E1	-3.26272E1	2.68046E1	1.20226E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01347E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80019E1	-9.29832E-4	-8.80003E1	3.8147E-4	4.76837E-3	9.36031E-2	2.73016E1	-3.26556E1	-3.26121E1	2.68123E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
1.4E1	3.09E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80016E1	-5.72205E-4	-8.80002E1	7.15256E-5	4.72069E-3	9.36985E-2	2.73273E1	-3.26579E1	-3.26392E1	2.6813E1	1.19953E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00453E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80017E1	-6.67572E-4	-8.80003E1	2.6226E-4	4.57764E-3	9.33409E-2	2.7311E1	-3.26602E1	-3.26231E1	2.67862E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80017E1	-3.8147E-4	-8.80004E1	1.66893E-4	4.76837E-3	9.37462E-2	2.72913E1	-3.26506E1	-3.26416E1	2.678E1	1.19902E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01223E-1
1.7E1	3.4E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80016E1	-5.00679E-4	-8.80003E1	3.09944E-4	4.52995E-3	9.38177E-2	2.73874E1	-3.27143E1	-3.2486E1	2.67908E1	1.2033E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.8E1	1.93E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80018E1	-9.29832E-4	-8.80002E1	3.09944E-4	4.55379E-3	9.39131E-2	2.7257E1	-3.26699E1	-3.26699E1	2.68124E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.9E1	3.07E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80017E1	-6.4373E-4	-8.80003E1	1.43051E-4	4.76837E-3	9.37939E-2	2.73339E1	-3.26717E1	-3.2635E1	2.68256E1	1.19653E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.9926E-1
2.0E1	2.055E3	3.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80017E1	-6.91414E-4	-8.80003E1	4.52995E-4	4.62532E-3	9.36747E-2	2.73129E1	-3.26687E1	-3.26284E1	2.68136E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.98665E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80017E1	-2.86102E-4	-8.80005E1	1.66893E-4	4.79221E-3	9.36508E-2	2.72768E1	-3.26862E1	-3.26124E1	2.67788E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.98554E-1
2.2E1	1.53E2	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80019E1	-5.24521E-4	-8.80008E1	3.09944E-4	4.8399E-3	9.34839E-2	2.73429E1	-3.26723E1	-3.26362E1	2.67956E1	1.20414E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80022E1	-5.96046E-4	-8.80006E1	1.43051E-4	4.79221E-3	9.36031E-2	2.73093E1	-3.26699E1	-3.26663E1	2.68689E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1