[Scan]
initial_time=2016-01-28T18:09:51
final_time=2016-01-28T18:10:11
ip_count=19
run=1026
dataset=3
scan=225
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.80001E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.77652E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.44304E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.51917E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.62358E-8
mult1=-1.04628E-8
mult2=-2.70464E-9
rf_tmon=-4.47637E-3
rf_agc=3.3652E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.66053E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.10276E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.25279E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05897E0
lens1_imon=1.61947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64881E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04115E1
cs_ea2_imon=1.41242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84145E1
cs_ef1a_imon=3.01241E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.16913E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.30485E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.44982E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63502E1
os_ef1bup_imon=3.07913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=9.65039E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02226E1
cs_anode1_imon=2.04663E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.88614E-8
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.38006E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=9.29645E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.15747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43792E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71542E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05745E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11054E1
os_restr2_imon=3.3641E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.10154E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.08051E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1705E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.32932E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13362E0
cs_ionaccel_imon=-9.93342E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.61503E-1
window_imon=-1.12193E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86645E1
mask2_imon=-7.98728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.15157E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.31627E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.39043E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30642E1
cs_fil1_imon=9.24685E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3239E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61124E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03769E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34521E-1
cs_fil2_imon=-2.55914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.6978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26985E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.39513E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.06E2	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.8002E1	-8.10623E-4	-8.80002E1	-9.53674E-5	4.48227E-3	9.38892E-2	2.73417E1	-3.26419E1	-3.25995E1	2.6816E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01223E-1
2.0E0	8.721E3	7.0E0	3.16E2	1.6E2	-7.201E-2	-8.80017E1	-1.00136E-3	-8.80003E1	1.19209E-4	5.14984E-3	9.36985E-2	2.7282E1	-3.26678E1	-3.26254E1	2.68063E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80017E1	-9.53674E-4	-8.8E1	1.43051E-4	4.8399E-3	9.37462E-2	2.72796E1	-3.26573E1	-3.25866E1	2.68053E1	1.19991E-7	2.51611E-3	2.51611E-3	6.30171E-3	3.02426E-1
4.0E0	1.978E3	1.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80017E1	-5.96046E-4	-8.80002E1	-3.09944E-4	4.95911E-3	9.36508E-2	2.73027E1	-3.26651E1	-3.26458E1	2.68268E1	1.19841E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80018E1	-9.29832E-4	-8.80003E1	3.09944E-4	4.86374E-3	9.36985E-2	2.73222E1	-3.26927E1	-3.26526E1	2.68267E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80015E1	-6.67572E-4	-8.80003E1	1.66893E-4	4.57764E-3	9.39608E-2	2.72859E1	-3.26326E1	-3.26488E1	2.68412E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.03286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80015E1	-9.05991E-4	-8.80005E1	3.09944E-4	4.29153E-3	9.377E-2	2.72895E1	-3.26518E1	-3.25966E1	2.6792E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	-1.04904E-3	-8.80003E1	0.0E0	4.57764E-3	9.37939E-2	2.73171E1	-3.26777E1	-3.26074E1	2.6819E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80019E1	-1.04904E-3	-8.80001E1	2.14577E-4	4.76837E-3	9.39846E-2	2.73139E1	-3.26738E1	-3.26331E1	2.67944E1	1.20062E-7	2.51809E-3	2.51809E-3	6.32644E-3	2.99217E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80018E1	-8.58307E-4	-8.80002E1	-2.14577E-4	4.76837E-3	9.36985E-2	2.72956E1	-3.26315E1	-3.26515E1	2.67949E1					
1.4E1	2.79E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80016E1	-9.29832E-4	-8.80004E1	-2.14577E-4	4.60148E-3	9.35078E-2	2.73039E1	-3.26681E1	-3.26122E1	2.6792E1	1.19937E-7	2.5202E-3	2.5202E-3	6.31651E-3	3.00848E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80015E1	-1.07288E-3	-8.80006E1	1.19209E-4	4.76837E-3	9.3627E-2	2.73093E1	-3.26699E1	-3.25828E1	2.67908E1	1.19757E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80014E1	-8.82149E-4	-8.80004E1	0.0E0	4.72069E-3	9.36985E-2	2.73171E1	-3.26615E1	-3.26801E1	2.67908E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
1.7E1	4.1E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80019E1	-6.91414E-4	-8.80006E1	1.19209E-4	4.95911E-3	9.37462E-2	2.72939E1	-3.27039E1	-3.26207E1	2.68076E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.8E1	2.08E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80021E1	-8.10623E-4	-8.80003E1	1.43051E-4	4.673E-3	9.38416E-2	2.73339E1	-3.26476E1	-3.26086E1	2.68346E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.9E1	2.8E2	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80017E1	-1.00136E-3	-8.80004E1	2.38419E-5	4.81606E-3	9.38177E-2	2.73039E1	-3.26543E1	-3.26054E1	2.68117E1	1.20017E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.00041E-1
2.0E1	2.259E3	1.0E0	8.08E2	5.58E2	-7.286E-2	-8.80018E1	-9.77516E-4	-8.80003E1	2.14577E-4	4.69685E-3	9.37939E-2	2.73129E1	-3.2632E1	-3.26585E1	2.68028E1	1.198E-7	2.51257E-3	2.51257E-3	6.32087E-3	2.99558E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80017E1	-1.3113E-3	-8.80004E1	2.6226E-4	4.74453E-3	9.36747E-2	2.72797E1	-3.26449E1	-3.26183E1	2.68253E1					
2.2E1	1.39E2	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80018E1	-1.00136E-3	-8.80002E1	1.90735E-4	4.8399E-3	9.36985E-2	2.73311E1	-3.26514E1	-3.26036E1	2.68029E1	1.19902E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80018E1	-7.39098E-4	-8.80003E1	3.57628E-4	4.8399E-3	9.36031E-2	2.73003E1	-3.26681E1	-3.2641E1	2.67962E1	1.19902E-7	2.51632E-3	2.51632E-3	6.26985E-3	3.01223E-1