[Scan]
initial_time=2016-01-28T18:13:28
final_time=2016-01-28T18:13:48
ip_count=19
run=1026
dataset=3
scan=233
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.74587E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.51653E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.46998E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.57663E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.6241E-8
mult1=-1.04147E-8
mult2=-2.73658E-9
rf_tmon=-6.85564E-3
rf_agc=3.26306E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.66614E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64104E0
bslens_imon=2.49519E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19774E1
lens5a_imon=1.96197E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.08348E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04632E1
cs_ea1_imon=1.25174E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05644E0
lens1_imon=1.30207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64619E1
os_ef1alow_imon=2.9588E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04067E1
cs_ea2_imon=1.41501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84252E1
cs_ef1a_imon=3.00016E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.1824E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11144E1
os_restr1_imon=4.29312E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15467E1
os_ea1_imon=2.42163E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63939E1
os_ef1bup_imon=3.08652E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24791E0
cs_ionrep_imon=9.5409E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02008E1
cs_anode1_imon=2.0356E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.89694E-8
tplens_vset=1.4E-1
tplens_vmon=1.6676E0
tplens_imon=-1.17121E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.49414E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.59461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98591E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.5144E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23535E0
ionrepsh_imon=9.29599E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33955E1
lens5b_imon=2.1874E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74694E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41955E0
os_ea2_imon=-6.88565E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00491E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71106E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.68145E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-5.53984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11012E1
os_restr2_imon=3.3754E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.30179E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01998E1
cs_anode2_imon=2.10919E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.07529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.07956E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.19918E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.38809E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14433E0
cs_ionaccel_imon=-1.08196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47184E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56577E1
einzel_imon=7.66959E-6
window_vset=0.0E0
window_vmon=1.74245E-1
window_imon=-1.01506E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.07589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.15465E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.04316E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.42467E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38012E0
defgridb_imon=6.08084E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.40302E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07826E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6066E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30592E1
cs_fil1_imon=9.24378E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31898E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61399E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52429E-2
os_fil2_imon=-2.74593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84575E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03169E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35988E-1
cs_fil2_imon=-2.66484E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2155E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.56589E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=317
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.84E2	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80022E1	-1.14441E-3	-8.80003E1	-9.53674E-5	4.86374E-3	9.36747E-2	2.73051E1	-3.26446E1	-3.26053E1	2.68061E1	1.19991E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.02051E-1
2.0E0	8.73E3	7.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80021E1	-9.29832E-4	-8.80001E1	1.66893E-4	5.17368E-3	9.36508E-2	2.73075E1	-3.26392E1	-3.26422E1	2.68106E1	1.20306E-7	2.51028E-3	2.51028E-3	6.28854E-3	3.00557E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80023E1	-1.12057E-3	-8.80003E1	1.43051E-4	5.07832E-3	9.36031E-2	2.73236E1	-3.26793E1	-3.26503E1	2.6796E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98222E-1
4.0E0	2.012E3	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.8002E1	-1.14441E-3	-8.80005E1	0.0E0	4.86374E-3	9.35555E-2	2.73231E1	-3.27041E1	-3.26206E1	2.67986E1	1.20092E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.8002E1	-1.00136E-3	-8.80005E1	1.19209E-4	4.93526E-3	9.34124E-2	2.73051E1	-3.2647E1	-3.26254E1	2.6807E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.8002E1	-1.09673E-3	-8.80005E1	2.14577E-4	4.91142E-3	9.33647E-2	2.72871E1	-3.26619E1	-3.2699E1	2.68199E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80021E1	-6.91414E-4	-8.80005E1	2.14577E-4	5.03063E-3	9.37939E-2	2.72921E1	-3.26408E1	-3.2662E1	2.68082E1	1.19941E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01104E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80017E1	-7.62939E-4	-8.80004E1	0.0E0	5.03063E-3	9.35078E-2	2.73263E1	-3.26741E1	-3.25755E1	2.67939E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.8002E1	-5.72205E-4	-8.80004E1	0.0E0	4.93526E-3	9.35555E-2	2.72931E1	-3.26518E1	-3.26182E1	2.67986E1	1.20208E-7	2.51498E-3	2.51498E-3	6.3245E-3	2.98361E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80021E1	-1.00136E-3	-8.80001E1	1.66893E-4	4.95911E-3	9.38892E-2	2.72645E1	-3.26399E1	-3.26625E1	2.6803E1	1.20269E-7	2.51701E-3	2.51701E-3	6.31827E-3	2.98574E-1
1.4E1	2.99E2	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80021E1	-6.67572E-4	-8.80004E1	-4.76837E-5	5.05447E-3	9.38177E-2	2.73112E1	-3.26707E1	-3.26609E1	2.68026E1					
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-4.05312E-4	-8.80002E1	2.38419E-5	4.95911E-3	9.37939E-2	2.73291E1	-3.27005E1	-3.26338E1	2.67944E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.6E1	3.3E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80018E1	-6.67572E-4	-8.80003E1	1.90735E-4	5.07832E-3	9.37462E-2	2.73243E1	-3.26639E1	-3.25629E1	2.67992E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.03185E-1
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80021E1	-5.96046E-4	-8.80004E1	1.66893E-4	5.07832E-3	9.35078E-2	2.73102E1	-3.27023E1	-3.26733E1	2.68116E1	1.20278E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.8E1	1.77E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80021E1	-7.86781E-4	-8.80002E1	2.6226E-4	5.05447E-3	9.33886E-2	2.72914E1	-3.26803E1	-3.26173E1	2.68001E1	1.19919E-7	2.51447E-3	2.51447E-3	6.31761E-3	3.01121E-1
1.9E1	3.37E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80024E1	-6.91414E-4	-8.80003E1	2.14577E-4	4.93526E-3	9.33647E-2	2.72703E1	-3.26673E1	-3.26472E1	2.68214E1	1.1984E-7	2.51758E-3	2.51758E-3	6.29581E-3	3.01193E-1
2.0E1	2.23E3	1.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80023E1	-1.00136E-3	-8.80005E1	-1.19209E-4	4.98295E-3	9.35316E-2	2.73027E1	-3.26266E1	-3.26676E1	2.68034E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80018E1	-1.04904E-3	-8.80007E1	3.09944E-4	4.74453E-3	9.36985E-2	2.72927E1	-3.26325E1	-3.26107E1	2.6813E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
2.2E1	1.64E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	-1.07288E-3	-8.80003E1	5.72205E-4	4.79221E-3	9.36031E-2	2.72921E1	-3.2629E1	-3.26738E1	2.68012E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.8002E1	-6.19888E-4	-8.80006E1	4.52995E-4	4.43459E-3	9.36985E-2	2.73027E1	-3.26753E1	-3.26314E1	2.68106E1	1.20158E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1