[Scan]
initial_time=2016-01-28T18:15:18
final_time=2016-01-28T18:15:40
ip_count=19
run=1026
dataset=3
scan=237
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.10825E-2
qbias_imon=-3.76694E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.93686E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.41578E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.50437E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.62069E-8
mult1=-1.05712E-8
mult2=-2.71262E-9
rf_tmon=-3.2567E-3
rf_agc=3.42048E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.21088E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67788E0
bslens_imon=2.5729E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20176E1
lens5a_imon=1.98114E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05263E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.1045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04849E1
cs_ea1_imon=1.25044E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0858E0
lens1_imon=1.55785E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64985E1
os_ef1alow_imon=2.97105E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04142E1
cs_ea2_imon=1.40652E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84197E1
cs_ef1a_imon=3.00059E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.18677E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11587E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15074E1
os_ea1_imon=2.43478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.09755E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25384E0
cs_ionrep_imon=9.73736E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93368E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.03586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.90546E-8
tplens_vset=1.4E-1
tplens_vmon=1.63622E0
tplens_imon=-1.94159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.48161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.57199E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98464E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.74424E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27296E0
ionrepsh_imon=9.14293E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33611E1
lens5b_imon=2.17894E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46009E0
os_ea2_imon=-5.20922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00317E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.67189E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9086E-1
os_ef2bup_imon=-5.47294E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10996E1
os_restr2_imon=3.38739E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.31041E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.08973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.09506E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.06557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.22963E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.44175E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11219E0
cs_ionaccel_imon=-9.09936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47174E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=1.75983E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86529E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.81154E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.61573E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.05373E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42971E0
defgridb_imon=6.21944E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33205E1
os_fil1_imon=9.40596E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07109E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61209E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30618E1
cs_fil1_imon=9.24992E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30826E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61914E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48136E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.55075E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.57651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21814E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91063E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80024E1	-1.38283E-3	-8.8E1	3.09944E-4	4.19617E-3	9.35078E-2	2.73134E1	-3.26649E1	-3.26649E1	2.68034E1	1.19841E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.99594E-1
2.0E0	8.395E3	4.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80022E1	-9.77516E-4	-8.79998E1	1.66893E-4	4.07696E-3	9.35555E-2	2.73126E1	-3.26628E1	-3.25873E1	2.68069E1	1.2026E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.00453E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80021E1	-1.14441E-3	-8.79998E1	2.86102E-4	4.3869E-3	9.35078E-2	2.73097E1	-3.26735E1	-3.26532E1	2.67972E1	1.2035E-7	2.51359E-3	2.51359E-3	6.34661E-3	3.00676E-1
4.0E0	1.949E3	1.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80019E1	-1.00136E-3	-8.79996E1	3.09944E-4	4.72069E-3	9.35316E-2	2.73381E1	-3.26502E1	-3.2682E1	2.6792E1	1.20004E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.8002E1	-6.67572E-4	-8.80001E1	3.33786E-4	4.36306E-3	9.34124E-2	2.72648E1	-3.26963E1	-3.2626E1	2.67992E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.97901E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.8002E1	-7.62939E-4	-8.80003E1	9.53674E-5	4.3869E-3	9.36747E-2	2.72947E1	-3.26469E1	-3.26104E1	2.68099E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80018E1	-6.91414E-4	-8.79999E1	2.14577E-4	4.17233E-3	9.37939E-2	2.72931E1	-3.2644E1	-3.26416E1	2.68178E1	1.20055E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80019E1	-6.67572E-4	-8.80002E1	4.05312E-4	4.57764E-3	9.32932E-2	2.73231E1	-3.26536E1	-3.25052E1	2.6831E1	1.20122E-7	2.52264E-3	2.52264E-3	6.32386E-3	3.00824E-1
1.2E1	9.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80021E1	-9.29832E-4	-8.80001E1	3.33786E-4	4.3869E-3	9.32932E-2	2.72721E1	-3.26691E1	-3.26413E1	2.67986E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80024E1	-6.91414E-4	-8.80003E1	1.90735E-4	4.31538E-3	9.3627E-2	2.72883E1	-3.26693E1	-3.25677E1	2.68052E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01995E-1
1.4E1	2.99E2	0.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80023E1	-5.96046E-4	-8.80006E1	2.38419E-4	4.50611E-3	9.32217E-2	2.72991E1	-3.26278E1	-3.26248E1	2.6786E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80022E1	-7.62939E-4	-8.80004E1	9.53674E-5	4.72069E-3	9.34124E-2	2.72883E1	-3.26464E1	-3.2614E1	2.68041E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80021E1	-6.19888E-4	-8.80003E1	4.76837E-4	4.57764E-3	9.32693E-2	2.72929E1	-3.26762E1	-3.26897E1	2.67923E1	1.19902E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.98156E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.10825E-2	-8.80021E1	-6.67572E-4	-8.80003E1	1.19209E-4	4.69685E-3	9.34124E-2	2.73016E1	-3.26579E1	-3.26632E1	2.6777E1	1.20191E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
1.8E1	1.98E2	1.0E0	7.27E2	5.0E2	-7.11597E-2	-8.80019E1	-9.05991E-4	-8.80002E1	4.05312E-4	4.57764E-3	9.35555E-2	2.72895E1	-3.26603E1	-3.26044E1	2.68022E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1
1.9E1	3.51E2	0.0E0	7.68E2	5.29E2	-7.11597E-2	-8.80018E1	-5.00679E-4	-8.80005E1	3.33786E-4	4.57764E-3	9.34362E-2	2.72774E1	-3.26549E1	-3.26083E1	2.67937E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02396E-1
2.0E1	2.294E3	0.0E0	8.08E2	5.58E2	-7.06958E-2	-8.80018E1	-6.67572E-4	-8.80004E1	2.6226E-4	4.673E-3	9.32455E-2	2.73399E1	-3.27062E1	-3.26319E1	2.67836E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.13143E-2	-8.8002E1	-8.34465E-4	-8.80005E1	3.09944E-4	4.60148E-3	9.35555E-2	2.73069E1	-3.26561E1	-3.26254E1	2.67827E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.2E1	1.54E2	0.0E0	8.89E2	6.17E2	-7.11597E-2	-8.80018E1	-9.53674E-4	-8.80002E1	1.66893E-4	4.76837E-3	9.35555E-2	2.73004E1	-3.2659E1	-3.26425E1	2.67962E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.10825E-2	-8.80021E1	-7.86781E-4	-8.80003E1	9.53674E-5	4.45843E-3	9.32932E-2	2.73243E1	-3.27041E1	-3.2629E1	2.68064E1	1.19941E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.01356E-1