[Scan]
initial_time=2016-01-28T18:16:18
final_time=2016-01-28T18:16:40
ip_count=19
run=1026
dataset=3
scan=239
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.81634E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.91433E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.45503E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.52969E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.62181E-8
mult1=-1.01002E-8
mult2=-2.67147E-9
rf_tmon=-4.01952E-3
rf_agc=3.44398E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.48542E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6281E0
bslens_imon=2.30799E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2E1
lens5a_imon=1.98134E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12437E2
lens4a_imon=2.05155E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.09947E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.25886E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07634E0
lens1_imon=1.55136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.39476E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.99351E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.18664E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15434E1
os_ea1_imon=2.44009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22639E0
cs_ionrep_imon=9.60251E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93295E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.05108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.90594E-8
tplens_vset=1.4E-1
tplens_vmon=1.58205E0
tplens_imon=-1.05155E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26073E1
iondef3_imon=1.51744E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2651E1
iondef2_imon=1.56739E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.46791E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.17068E0
ionrepsh_imon=9.35642E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34282E1
lens5b_imon=2.18041E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40636E0
os_ea2_imon=-6.52427E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73238E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67789E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.15947E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.41342E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0947E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.65686E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-8.5356E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.50891E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.47586E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53225E0
defgridb_imon=6.3152E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33225E1
os_fil1_imon=9.40534E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60788E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30578E1
cs_fil1_imon=9.24617E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31124E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6164E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56795E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78754E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21549E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.98842E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.51E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80022E1	-1.0252E-3	-8.80002E1	2.14577E-4	4.45843E-3	9.36747E-2	2.73167E1	-3.26729E1	-3.25478E1	2.68082E1	1.20017E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01347E-1
2.0E0	8.561E3	3.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80022E1	-5.24521E-4	-8.80003E1	1.43051E-4	4.62532E-3	9.40084E-2	2.72708E1	-3.26493E1	-3.26615E1	2.67998E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80018E1	-6.67572E-4	-8.80004E1	3.33786E-4	4.62532E-3	9.38177E-2	2.73352E1	-3.26413E1	-3.26095E1	2.67944E1	1.20278E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
4.0E0	2.032E3	1.0E0	6.55E2	3.98E2	-7.286E-2	-8.8002E1	-9.77516E-4	-8.8E1	-9.53674E-5	4.50611E-3	9.38892E-2	2.72945E1	-3.26543E1	-3.26207E1	2.68052E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80019E1	-1.0252E-3	-8.8E1	1.43051E-4	4.76837E-3	9.39846E-2	2.72841E1	-3.26416E1	-3.26663E1	2.68046E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.98665E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.8002E1	-6.19888E-4	-8.80001E1	1.90735E-4	5.03063E-3	9.37462E-2	2.72871E1	-3.26777E1	-3.2626E1	2.68184E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80021E1	-8.34465E-4	-8.8E1	9.53674E-5	4.57764E-3	9.377E-2	2.73069E1	-3.26314E1	-3.26368E1	2.684E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80018E1	-1.04904E-3	-8.79999E1	0.0E0	5.07832E-3	9.36747E-2	2.72679E1	-3.26396E1	-3.259E1	2.67984E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80018E1	-8.10623E-4	-8.79998E1	0.0E0	5.05447E-3	9.38177E-2	2.72684E1	-3.2647E1	-3.26194E1	2.6828E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9952E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80019E1	-9.29832E-4	-8.8E1	-1.19209E-4	4.76837E-3	9.39131E-2	2.72955E1	-3.26585E1	-3.25966E1	2.68118E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02769E-1
1.4E1	2.89E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80019E1	-7.86781E-4	-8.80001E1	2.38419E-4	4.45843E-3	9.36747E-2	2.73517E1	-3.26443E1	-3.26372E1	2.67722E1	1.19766E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.00676E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-8.82149E-4	-8.79999E1	-4.76837E-5	4.64916E-3	9.38416E-2	2.72546E1	-3.26651E1	-3.26915E1	2.68238E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99941E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80022E1	-1.19209E-3	-8.80005E1	9.53674E-5	4.45843E-3	9.36747E-2	2.72955E1	-3.26915E1	-3.25719E1	2.68004E1	1.20055E-7	2.52384E-3	2.52384E-3	6.33977E-3	2.9943E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80021E1	-7.86781E-4	-8.80003E1	9.53674E-5	4.62532E-3	9.39608E-2	2.73039E1	-3.26723E1	-3.26062E1	2.6795E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00041E-1
1.8E1	2.15E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80024E1	-8.34465E-4	-8.80003E1	1.43051E-4	4.69685E-3	9.39369E-2	2.73328E1	-3.26095E1	-3.26472E1	2.67866E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
1.9E1	3.28E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80021E1	-5.24521E-4	-8.80007E1	1.90735E-4	4.48227E-3	9.35078E-2	2.72943E1	-3.26545E1	-3.26573E1	2.67908E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
2.0E1	2.179E3	2.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80023E1	-6.91414E-4	-8.80003E1	4.05312E-4	4.95911E-3	9.35316E-2	2.73113E1	-3.2689E1	-3.26029E1	2.68088E1	1.19941E-7	2.50762E-3	2.50762E-3	6.32328E-3	3.00348E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80025E1	-7.86781E-4	-8.80004E1	5.24521E-4	5.07832E-3	9.3627E-2	2.73057E1	-3.26632E1	-3.26526E1	2.68169E1	1.19819E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.00676E-1
2.2E1	1.62E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80023E1	-7.39098E-4	-8.80002E1	4.76837E-4	4.64916E-3	9.35793E-2	2.73074E1	-3.26677E1	-3.267E1	2.68175E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.98222E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80022E1	-7.15256E-4	-8.80001E1	4.52995E-4	4.74453E-3	9.34124E-2	2.73238E1	-3.2651E1	-3.26073E1	2.67789E1	1.19941E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.98842E-1