[Scan]
initial_time=2016-01-28T18:16:48
final_time=2016-01-28T18:17:11
ip_count=19
run=1026
dataset=3
scan=240
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.77565E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.28789E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.42784E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.52905E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.61922E-8
mult1=-1.09324E-8
mult2=-2.84437E-9
rf_tmon=-3.34081E-3
rf_agc=3.4391E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.67567E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.28541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.08433E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05132E1
cs_ea1_imon=1.24406E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06058E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.39582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.99856E-5
olens2_vset=9.7E-1
olens2_vmon=9.69625E-1
olens2_imon=1.19174E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=2.43549E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.06667E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.05756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.90419E-8
tplens_vset=1.4E-1
tplens_vmon=1.64624E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.75711E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3248E0
ionrepsh_imon=9.47008E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43114E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67391E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.10441E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.0721E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6777E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.2611E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.43873E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-1.19594E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39354E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.06197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.9394E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.26745E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.41892E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07101E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61149E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30566E1
cs_fil1_imon=9.24875E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28061E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.92395E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21537E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=3.00348E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.52765E-3
foreline_cvt_pmon=2.52765E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10348E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.84E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80019E1	-7.39098E-4	-8.79998E1	2.86102E-4	4.24385E-3	9.40084E-2	2.73163E1	-3.26219E1	-3.26496E1	2.68105E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.98665E-1
2.0E0	8.764E3	5.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80022E1	-1.07288E-3	-8.8E1	1.66893E-4	4.29153E-3	9.40561E-2	2.72904E1	-3.26468E1	-3.26303E1	2.68094E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80022E1	-7.62939E-4	-8.79999E1	2.6226E-4	4.55379E-3	9.41038E-2	2.7312E1	-3.26666E1	-3.26011E1	2.6807E1	1.19925E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.01475E-1
4.0E0	2.004E3	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80021E1	-6.91414E-4	-8.8E1	3.8147E-4	4.62532E-3	9.35793E-2	2.7308E1	-3.26496E1	-3.27174E1	2.68088E1	1.20092E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80022E1	-6.67572E-4	-8.80001E1	-2.38419E-5	4.76837E-3	9.37462E-2	2.72702E1	-3.26801E1	-3.26374E1	2.68106E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8002E1	-7.62939E-4	-8.80002E1	1.19209E-4	4.72069E-3	9.35316E-2	2.73476E1	-3.26767E1	-3.25806E1	2.6795E1	1.20297E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80021E1	-9.29832E-4	-8.8E1	1.43051E-4	4.69685E-3	9.39131E-2	2.72931E1	-3.265E1	-3.25131E1	2.68016E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80021E1	-1.16825E-3	-8.80002E1	9.53674E-5	4.55379E-3	9.3627E-2	2.72883E1	-3.26506E1	-3.27143E1	2.6804E1	1.20158E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80021E1	-9.53674E-4	-8.8E1	4.76837E-5	4.57764E-3	9.33886E-2	2.72855E1	-3.26859E1	-3.2626E1	2.68406E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.01475E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80019E1	-1.33514E-3	-8.80002E1	1.43051E-4	4.41074E-3	9.36747E-2	2.73242E1	-3.26425E1	-3.24937E1	2.67976E1	1.19908E-7	2.52123E-3	2.52123E-3	6.29738E-3	3.00532E-1
1.4E1	3.06E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80017E1	-7.62939E-4	-8.80003E1	-4.76837E-5	4.74453E-3	9.36031E-2	2.73607E1	-3.27036E1	-3.26863E1	2.68018E1	1.20058E-7	2.51915E-3	2.51915E-3	6.30461E-3	3.00543E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80015E1	-8.82149E-4	-8.79999E1	4.05312E-4	4.57764E-3	9.37223E-2	2.72853E1	-3.26915E1	-3.25821E1	2.68172E1					
1.6E1	4.8E1	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80016E1	-9.05991E-4	-8.80001E1	2.6226E-4	4.88758E-3	9.36747E-2	2.73117E1	-3.26645E1	-3.26398E1	2.67932E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99175E-1
1.7E1	4.3E1	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80016E1	-1.09673E-3	-8.80002E1	1.19209E-4	5.03063E-3	9.34839E-2	2.72672E1	-3.26723E1	-3.26567E1	2.67998E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.8E1	2.05E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80017E1	-1.16825E-3	-8.80002E1	-4.76837E-5	4.76837E-3	9.33886E-2	2.73252E1	-3.26543E1	-3.26107E1	2.67716E1	1.20069E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00824E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80016E1	-1.14441E-3	-8.79999E1	-1.43051E-4	5.03063E-3	9.34124E-2	2.73117E1	-3.26735E1	-3.2617E1	2.67878E1	1.19861E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00824E-1
2.0E1	2.308E3	1.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80014E1	-9.53674E-4	-8.8E1	1.90735E-4	4.50611E-3	9.37462E-2	2.73321E1	-3.26386E1	-3.25821E1	2.67752E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80017E1	-8.82149E-4	-8.79999E1	0.0E0	4.673E-3	9.40323E-2	2.72781E1	-3.26909E1	-3.26272E1	2.68151E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.03618E-1
2.2E1	1.56E2	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80016E1	-8.10623E-4	-8.80002E1	-4.76837E-5	4.8399E-3	9.377E-2	2.73092E1	-3.26822E1	-3.26162E1	2.67998E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80017E1	-1.21593E-3	-8.80002E1	2.14577E-4	4.43459E-3	9.3627E-2	2.72883E1	-3.26591E1	-3.26404E1	2.6777E1	1.20092E-7	2.52765E-3	2.52765E-3	6.33919E-3	3.00348E-1