[Scan]
initial_time=2016-01-28T18:19:01
final_time=2016-01-28T18:19:24
ip_count=19
run=1026
dataset=4
scan=244
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.19826E-1
ql1_imon=1.63752E-8
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=1.88463E-9
ql3_vset=
ql3_vmon=-9.13048E0
ql3_imon=7.78797E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-7.38132E-10
mult1=-9.99052E-9
mult2=-2.78294E-9
rf_tmon=-3.96454E-3
rf_agc=3.35671E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.48488E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5354E1
cs_ef1b_imon=3.09964E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=1.23576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41101E0
lens1_imon=2.86941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.9648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.41421E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=3.00476E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.19629E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.30416E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15582E1
os_ea1_imon=2.43982E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=9.65753E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.04768E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.13808E-8
tplens_vset=1.4E-1
tplens_vmon=1.68229E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26713E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02861E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.84759E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.36385E0
ionrepsh_imon=9.20692E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46599E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18304E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.64409E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84488E-1
os_ef2bup_imon=-5.41734E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.38183E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.1005E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73302E1
iondef1_imon=1.08508E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.65962E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.43335E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10581E0
cs_ionaccel_imon=-9.34263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=1.9278E-1
window_imon=-9.69015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.82982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.10523E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.40237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06866E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61109E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30601E1
cs_fil1_imon=9.24575E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32795E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61756E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.65971E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33647E-1
cs_fil2_imon=-2.11894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.00275E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.7331E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.21161E-1	-7.98798E-1	-9.13184E0	-9.14183E0	4.86374E-3	9.41038E-2	2.73711E1	-3.26474E1	-3.26724E1	2.6801E1	1.20055E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.97647E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.21066E-1	-7.98893E-1	-9.13177E0	-9.14168E0	4.74453E-3	9.35078E-2	2.72855E1	-3.26921E1	-3.2607E1	2.6804E1	1.20394E-7	2.51182E-3	2.51182E-3	6.32858E-3	2.96846E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.2128E-1	-7.98845E-1	-9.13174E0	-9.14166E0	4.72069E-3	9.377E-2	2.73323E1	-3.26724E1	-3.26167E1	2.68076E1	1.20031E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.98026E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.20804E-1	-7.98941E-1	-9.13174E0	-9.14197E0	4.64916E-3	9.34839E-2	2.73186E1	-3.26591E1	-3.26811E1	2.68202E1	1.19959E-7	2.51755E-3	2.51755E-3	6.31827E-3	3.01025E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.20661E-1	-7.98941E-1	-9.13215E0	-9.14183E0	4.81606E-3	9.33647E-2	2.72962E1	-3.26655E1	-3.25641E1	2.68058E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.20065E-1	-7.98678E-1	-9.13196E0	-9.14209E0	4.64916E-3	9.34601E-2	2.73213E1	-3.26807E1	-3.26434E1	2.6807E1	1.19953E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.20136E-1	-7.98774E-1	-9.13169E0	-9.1418E0	4.8399E-3	9.33647E-2	2.72702E1	-3.26825E1	-3.26777E1	2.68268E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.19874E-1	-7.98869E-1	-9.13191E0	-9.14192E0	4.74453E-3	9.34839E-2	2.73069E1	-3.26699E1	-3.25743E1	2.6798E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.20303E-1	-7.9875E-1	-9.13208E0	-9.14216E0	4.72069E-3	9.33647E-2	2.72974E1	-3.26526E1	-3.26189E1	2.68118E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.20303E-1	-7.99012E-1	-9.13179E0	-9.14233E0	4.52995E-3	9.33647E-2	2.73167E1	-3.26603E1	-3.26205E1	2.67908E1	1.20363E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.99175E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.20518E-1	-7.98845E-1	-9.132E0	-9.1419E0	4.88758E-3	9.35793E-2	2.73617E1	-3.26868E1	-3.26325E1	2.67932E1	1.19991E-7	2.5188E-3	2.5188E-3	6.30466E-3	2.9965E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.20327E-1	-7.98702E-1	-9.13155E0	-9.14192E0	4.72069E-3	9.36031E-2	2.72968E1	-3.26726E1	-3.2652E1	2.68082E1					
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.20446E-1	-7.99203E-1	-9.1315E0	-9.14204E0	4.673E-3	9.34601E-2	2.73261E1	-3.26392E1	-3.26657E1	2.6804E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.20088E-1	-7.98869E-1	-9.13143E0	-9.14185E0	4.74453E-3	9.36985E-2	2.72824E1	-3.26927E1	-3.26266E1	2.67806E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.20398E-1	-7.98821E-1	-9.13157E0	-9.1418E0	4.74453E-3	9.34124E-2	2.7311E1	-3.26762E1	-3.26378E1	2.67818E1	1.19601E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.20351E-1	-7.99155E-1	-9.13136E0	-9.14197E0	4.79221E-3	9.34124E-2	2.73135E1	-3.26368E1	-3.26248E1	2.6798E1	1.19861E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.02396E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.20088E-1	-7.98941E-1	-9.13124E0	-9.14161E0	4.8399E-3	9.35555E-2	2.73297E1	-3.26591E1	-3.26488E1	2.68028E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.03185E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.20255E-1	-7.99179E-1	-9.13117E0	-9.14185E0	4.76837E-3	9.33886E-2	2.73198E1	-3.26526E1	-3.2652E1	2.68047E1	1.20062E-7	2.52189E-3	2.52189E-3	6.3074E-3	3.02845E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.20065E-1	-7.98988E-1	-9.13088E0	-9.14173E0	4.72069E-3	9.37223E-2	2.72958E1	-3.26561E1	-3.26086E1	2.6798E1	1.19941E-7	2.51709E-3	2.51709E-3	6.36047E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.19826E-1	-7.99108E-1	-9.13048E0	-9.14211E0	4.62532E-3	9.32693E-2	2.73302E1	-3.26713E1	-3.26248E1	2.6807E1