[Scan]
initial_time=2016-01-28T18:19:32
final_time=2016-01-28T18:19:54
ip_count=19
run=1026
dataset=4
scan=245
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.19659E-1
ql1_imon=1.49098E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=1.98593E-9
ql3_vset=
ql3_vmon=-9.13048E0
ql3_imon=3.99488E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-4.16541E-10
mult1=-1.00534E-8
mult2=-2.85634E-9
rf_tmon=-4.62658E-3
rf_agc=3.34537E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.62437E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.69277E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20283E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.10812E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04574E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.24514E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37436E0
lens1_imon=2.87662E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04285E1
cs_ea2_imon=1.41097E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=3.01081E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.19072E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.4528E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29716E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.1405E-8
tplens_vset=1.4E-1
tplens_vmon=1.57474E0
tplens_imon=-4.72384E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26621E1
iondef3_imon=1.51875E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.9064E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34523E0
ionrepsh_imon=9.25378E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.17594E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46779E0
os_ea2_imon=-7.06706E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=6.06284E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.42761E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10311E0
cs_ionaccel_imon=-1.13107E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.52927E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.8674E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.10523E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33228E1
os_fil1_imon=9.39207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3056E1
cs_fil1_imon=9.25301E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33467E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61977E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74607E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21726E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09748E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.20065E-1	-7.9875E-1	-9.13038E0	-9.14197E0	4.57764E-3	9.3317E-2	2.73039E1	-3.26408E1	-3.2639E1	2.68088E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.20088E-1	-7.98655E-1	-9.13053E0	-9.14202E0	4.29153E-3	9.31263E-2	2.73296E1	-3.2664E1	-3.26376E1	2.67995E1	1.20311E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.20088E-1	-7.98798E-1	-9.13064E0	-9.14187E0	4.57764E-3	9.32693E-2	2.72786E1	-3.26915E1	-3.26561E1	2.68117E1	1.2035E-7	2.52697E-3	2.52697E-3	6.34099E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.19802E-1	-7.99036E-1	-9.13055E0	-9.14185E0	4.95911E-3	9.31263E-2	2.73358E1	-3.26697E1	-3.25865E1	2.68052E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.2016E-1	-7.98726E-1	-9.13036E0	-9.14178E0	4.55379E-3	9.32455E-2	2.72867E1	-3.26541E1	-3.26618E1	2.67958E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.20041E-1	-7.98941E-1	-9.13053E0	-9.14197E0	4.62532E-3	9.33886E-2	2.73339E1	-3.26711E1	-3.26579E1	2.68172E1	1.20148E-7	2.52316E-3	2.52316E-3	6.31229E-3	2.99569E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.20184E-1	-7.98821E-1	-9.13029E0	-9.14192E0	4.93526E-3	9.3317E-2	2.72962E1	-3.26561E1	-3.26107E1	2.68118E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.20088E-1	-7.99179E-1	-9.13086E0	-9.14185E0	4.76837E-3	9.32455E-2	2.72859E1	-3.26591E1	-3.26506E1	2.68166E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.19993E-1	-7.98821E-1	-9.13062E0	-9.14176E0	5.05447E-3	9.32932E-2	2.72943E1	-3.26512E1	-3.26338E1	2.68105E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.19921E-1	-7.9875E-1	-9.13088E0	-9.14176E0	4.8399E-3	9.35555E-2	2.73169E1	-3.26762E1	-3.25694E1	2.68172E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.19802E-1	-7.98965E-1	-9.13057E0	-9.14173E0	4.62532E-3	9.36747E-2	2.73009E1	-3.26242E1	-3.26909E1	2.68046E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03286E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.19993E-1	-7.98893E-1	-9.13069E0	-9.14183E0	4.48227E-3	9.35078E-2	2.73387E1	-3.2659E1	-3.26278E1	2.68302E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.19945E-1	-7.98821E-1	-9.13041E0	-9.14192E0	4.57764E-3	9.3317E-2	2.73099E1	-3.27017E1	-3.26158E1	2.68119E1	1.20209E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02511E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.20065E-1	-7.98821E-1	-9.1306E0	-9.14168E0	4.36306E-3	9.33647E-2	2.72859E1	-3.26675E1	-3.26524E1	2.68082E1	1.20069E-7	2.52428E-3	2.52428E-3	6.34588E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.19874E-1	-7.98988E-1	-9.1306E0	-9.14156E0	4.26769E-3	9.31263E-2	2.73399E1	-3.26386E1	-3.26098E1	2.67882E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.19755E-1	-7.98845E-1	-9.1305E0	-9.1414E0	4.45843E-3	9.34601E-2	2.72889E1	-3.26735E1	-3.26164E1	2.68123E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.19778E-1	-7.98678E-1	-9.13074E0	-9.14199E0	4.33922E-3	9.34362E-2	2.73016E1	-3.26341E1	-3.26418E1	2.67841E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.19612E-1	-7.98774E-1	-9.13076E0	-9.14207E0	4.86374E-3	9.36031E-2	2.73364E1	-3.2649E1	-3.2652E1	2.68134E1	1.20125E-7	2.51077E-3	2.51077E-3	6.29684E-3	3.00432E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.19778E-1	-7.98702E-1	-9.13057E0	-9.1418E0	4.64916E-3	9.37223E-2	2.72901E1	-3.26645E1	-3.25497E1	2.681E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.19659E-1	-7.9906E-1	-9.13048E0	-9.1419E0	4.72069E-3	9.37223E-2	2.73183E1	-3.26524E1	-3.26621E1	2.68076E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1