[Scan]
initial_time=2016-01-28T18:20:02
final_time=2016-01-28T18:20:24
ip_count=19
run=1026
dataset=4
scan=246
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.19588E-1
ql1_imon=1.4525E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.97567E-9
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=2.89185E-9
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=-2.99239E-10
mult1=-9.33101E-9
mult2=-2.73857E-9
rf_tmon=-4.80082E-3
rf_agc=3.35379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.60531E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20319E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12427E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.09082E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.01797E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.26533E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41822E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.4535E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.00973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.18978E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.39476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26171E0
cs_ionrep_imon=9.74405E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.04711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.16189E-8
tplens_vset=1.4E-1
tplens_vmon=1.69611E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25557E1
iondef3_imon=1.52344E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2617E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02862E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.90232E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30797E0
ionrepsh_imon=9.36914E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33321E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74399E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48221E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11039E1
os_restr2_imon=3.36004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.28342E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.19165E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.44311E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.15269E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.27827E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70533E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.40558E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07335E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61188E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30552E1
cs_fil1_imon=9.25427E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3635E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61648E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21477E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.76421E-1
res40_imon=-2.24469E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.19468E-1	-7.98774E-1	-9.1305E0	-9.14176E0	4.76837E-3	9.31978E-2	2.72927E1	-3.26508E1	-3.26514E1	2.6807E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9874E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.19945E-1	-7.98845E-1	-9.13074E0	-9.14207E0	4.88758E-3	9.32455E-2	2.73173E1	-3.26878E1	-3.26866E1	2.6786E1	1.19749E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.0148E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.19659E-1	-7.98893E-1	-9.13095E0	-9.14204E0	5.00679E-3	9.31025E-2	2.73187E1	-3.26649E1	-3.26408E1	2.67806E1	1.20191E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.03081E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.19635E-1	-7.98869E-1	-9.13091E0	-9.14207E0	4.86374E-3	9.30071E-2	2.72965E1	-3.26542E1	-3.26523E1	2.68082E1	1.20363E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.19612E-1	-7.98798E-1	-9.13091E0	-9.14228E0	4.69685E-3	9.31501E-2	2.73665E1	-3.26666E1	-3.25773E1	2.67897E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.19802E-1	-7.9906E-1	-9.13064E0	-9.1419E0	4.19617E-3	9.34601E-2	2.73153E1	-3.26579E1	-3.27029E1	2.67974E1	1.198E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.19826E-1	-7.98678E-1	-9.13103E0	-9.14183E0	4.43459E-3	9.37223E-2	2.72414E1	-3.26002E1	-3.26098E1	2.68052E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.19731E-1	-7.98798E-1	-9.13081E0	-9.1418E0	4.79221E-3	9.36985E-2	2.73357E1	-3.26849E1	-3.25599E1	2.6816E1	1.19757E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.19659E-1	-7.98798E-1	-9.13074E0	-9.14178E0	4.69685E-3	9.35555E-2	2.73075E1	-3.26389E1	-3.26872E1	2.6804E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.19612E-1	-7.99036E-1	-9.13093E0	-9.14187E0	4.64916E-3	9.3627E-2	2.73269E1	-3.26384E1	-3.26408E1	2.67776E1	1.19819E-7	2.52027E-3	2.52027E-3	6.29067E-3	3.01209E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.19492E-1	-7.99108E-1	-9.13098E0	-9.14185E0	4.64916E-3	9.36031E-2	2.72999E1	-3.26619E1	-3.26092E1	2.68134E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.19325E-1	-7.99012E-1	-9.13079E0	-9.14178E0	4.31538E-3	9.36508E-2	2.73336E1	-3.26687E1	-3.26704E1	2.6796E1	1.19941E-7	2.52025E-3	2.52025E-3	6.31533E-3	3.00348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.19373E-1	-7.98917E-1	-9.131E0	-9.14187E0	4.64916E-3	9.33886E-2	2.72941E1	-3.26652E1	-3.25985E1	2.67956E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.19373E-1	-7.98535E-1	-9.13095E0	-9.14183E0	4.48227E-3	9.34362E-2	2.73015E1	-3.26783E1	-3.26368E1	2.68238E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.19254E-1	-7.98583E-1	-9.13074E0	-9.14195E0	4.55379E-3	9.37223E-2	2.73235E1	-3.26836E1	-3.26181E1	2.68508E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.19278E-1	-7.98607E-1	-9.13055E0	-9.14211E0	5.03063E-3	9.36985E-2	2.73375E1	-3.26596E1	-3.26199E1	2.68401E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.19516E-1	-7.98512E-1	-9.13076E0	-9.14202E0	4.86374E-3	9.34839E-2	2.73064E1	-3.26794E1	-3.26565E1	2.6792E1	1.1993E-7	2.51265E-3	2.51265E-3	6.29185E-3	3.03227E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.19635E-1	-7.98655E-1	-9.13053E0	-9.14199E0	4.673E-3	9.3317E-2	2.72837E1	-3.26753E1	-3.25953E1	2.68574E1	1.1995E-7	2.5199E-3	2.5199E-3	6.31321E-3	3.00639E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1954E-1	-7.9906E-1	-9.13098E0	-9.14221E0	4.74453E-3	9.36985E-2	2.73243E1	-3.26747E1	-3.26651E1	2.68118E1	1.20092E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.98592E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19588E-1	-7.98893E-1	-9.13067E0	-9.1424E0	4.95911E-3	9.33409E-2	2.73291E1	-3.2617E1	-3.25557E1	2.68064E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9926E-1