[Scan]
initial_time=2016-01-28T18:21:57
final_time=2016-01-28T18:22:17
ip_count=19
run=1026
dataset=4
scan=250
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-8.183E-1
ql1_imon=1.41512E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.01762E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=1.48309E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.86169E-10
mult1=-9.81263E-9
mult2=-2.68667E-9
rf_tmon=-4.32617E-3
rf_agc=3.36821E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.72623E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66525E0
bslens_imon=2.56574E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.98224E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04989E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53668E1
cs_ef1b_imon=3.0918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04797E1
cs_ea1_imon=1.2406E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41137E0
lens1_imon=2.67644E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64565E1
os_ef1alow_imon=2.97167E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04155E1
cs_ea2_imon=1.3887E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=2.99562E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.20122E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11254E1
os_restr1_imon=4.29654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15255E1
os_ea1_imon=2.43647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63804E1
os_ef1bup_imon=3.08207E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25083E0
cs_ionrep_imon=9.69973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0179E1
cs_anode1_imon=2.04987E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.15867E-8
tplens_vset=1.4E-1
tplens_vmon=1.61281E0
tplens_imon=-3.12281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26963E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26392E1
iondef2_imon=1.57306E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98319E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.95503E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=9.34475E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34428E1
lens5b_imon=2.17462E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74676E1
cs_ef2b_imon=3.12174E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39333E0
os_ea2_imon=-5.52753E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71127E1
cs_ef2a_imon=3.18425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07701E0
os_ef2alow_imon=-2.56309E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93265E-1
os_ef2bup_imon=-5.36628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10818E1
os_restr2_imon=3.37437E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01952E1
cs_anode2_imon=2.10077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.09439E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.18556E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.44406E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12453E0
cs_ionaccel_imon=-1.13716E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56361E1
einzel_imon=7.61299E-6
window_vset=0.0E0
window_vmon=2.0325E-1
window_imon=-9.79976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39013E-4
mask2_vset=0.0E0
mask2_vmon=-1.864E1
mask2_imon=-5.64549E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=6.89805E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.58124E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.502E3
multb_neg_imon=7.21486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45234E0
defgridb_imon=6.20335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.42613E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61625E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30536E1
cs_fil1_imon=9.24E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3812E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6252E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42649E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9783E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.40995E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33013E-1
cs_fil2_imon=-2.33815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21743E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29919E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40095E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.77276E-1
res40_imon=-2.51818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=284
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18467E-1	-7.99012E-1	-9.13105E0	-9.14173E0	4.673E-3	9.35078E-2	2.73082E1	-3.26672E1	-3.25761E1	2.68144E1	1.1995E-7	2.51527E-3	2.51527E-3	6.31902E-3	3.03418E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.1861E-1	-7.98869E-1	-9.13115E0	-9.1418E0	4.74453E-3	9.37462E-2	2.72678E1	-3.26646E1	-3.26376E1	2.68082E1	1.201E-7	2.51498E-3	2.51498E-3	6.31879E-3	3.02154E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18419E-1	-7.99179E-1	-9.13081E0	-9.1418E0	4.95911E-3	9.377E-2	2.73068E1	-3.26579E1	-3.25884E1	2.6785E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.03081E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18396E-1	-7.98941E-1	-9.13098E0	-9.14197E0	4.91142E-3	9.35793E-2	2.73051E1	-3.26464E1	-3.26524E1	2.67649E1	1.19646E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.18467E-1	-7.98845E-1	-9.13074E0	-9.14209E0	5.05447E-3	9.33409E-2	2.73204E1	-3.26626E1	-3.25971E1	2.68094E1	1.19933E-7	2.51593E-3	2.51593E-3	6.32644E-3	2.99475E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.18467E-1	-7.98845E-1	-9.13062E0	-9.14197E0	4.72069E-3	9.34601E-2	2.73098E1	-3.26779E1	-3.26443E1	2.67974E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.18348E-1	-7.98774E-1	-9.13079E0	-9.14197E0	4.86374E-3	9.35555E-2	2.72901E1	-3.26512E1	-3.25858E1	2.6804E1	1.20055E-7	2.5131E-3	2.5131E-3	6.35059E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.18253E-1	-7.98488E-1	-9.13093E0	-9.1419E0	4.79221E-3	9.35078E-2	2.72654E1	-3.26392E1	-3.26104E1	2.68208E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.03286E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.18396E-1	-7.98607E-1	-9.13107E0	-9.14192E0	4.673E-3	9.36508E-2	2.72606E1	-3.26843E1	-3.26164E1	2.68094E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.18372E-1	-7.98869E-1	-9.13112E0	-9.1419E0	4.93526E-3	9.35793E-2	2.73201E1	-3.26398E1	-3.26639E1	2.68142E1	1.20137E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99879E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.18586E-1	-7.99036E-1	-9.13091E0	-9.14176E0	5.19753E-3	9.39131E-2	2.72847E1	-3.26789E1	-3.26122E1	2.67878E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.18729E-1	-7.98917E-1	-9.13105E0	-9.14166E0	4.93526E-3	9.34362E-2	2.73057E1	-3.26801E1	-3.26218E1	2.68106E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.18348E-1	-7.98678E-1	-9.13107E0	-9.14185E0	4.52995E-3	9.35793E-2	2.7265E1	-3.26531E1	-3.26048E1	2.6792E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09279E0	-8.18491E-1	-7.98988E-1	-9.13136E0	-9.14197E0	4.88758E-3	9.35555E-2	2.73143E1	-3.26866E1	-3.26248E1	2.68106E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09271E0	-8.18563E-1	-7.98798E-1	-9.13138E0	-9.14211E0	4.79221E-3	9.36031E-2	2.73004E1	-3.2672E1	-3.2639E1	2.67854E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09309E0	-8.18348E-1	-7.98798E-1	-9.13117E0	-9.14199E0	4.74453E-3	9.33647E-2	2.72907E1	-3.26669E1	-3.26284E1	2.68088E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.18372E-1	-7.99036E-1	-9.13119E0	-9.14187E0	4.79221E-3	9.36508E-2	2.7301E1	-3.26697E1	-3.2652E1	2.6807E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09317E0	-8.18229E-1	-7.98535E-1	-9.13126E0	-9.14199E0	4.81606E-3	9.36747E-2	2.73069E1	-3.26813E1	-3.26591E1	2.67932E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-8.18133E-1	-7.98702E-1	-9.13105E0	-9.14187E0	4.95911E-3	9.3627E-2	2.73039E1	-3.26773E1	-3.2626E1	2.6792E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.183E-1	-7.98583E-1	-9.13126E0	-9.14183E0	5.07832E-3	9.37223E-2	2.72883E1	-3.26392E1	-3.26963E1	2.67734E1	1.20174E-7	2.51334E-3	2.51334E-3	6.29919E-3	3.00824E-1