[Scan]
initial_time=2016-01-28T18:22:25
final_time=2016-01-28T18:22:45
ip_count=19
run=1026
dataset=4
scan=251
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=1.40811E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.0196E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=1.34653E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-2.00033E-10
mult1=-9.22746E-9
mult2=-2.68308E-9
rf_tmon=-4.20096E-3
rf_agc=3.34867E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.70442E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63726E0
bslens_imon=2.53521E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20292E1
lens5a_imon=1.97728E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53649E1
cs_ef1b_imon=3.10715E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04727E1
cs_ea1_imon=1.22839E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41009E0
lens1_imon=2.74514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03824E1
cs_ea2_imon=1.40015E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84145E1
cs_ef1a_imon=3.00535E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.20085E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11385E1
os_restr1_imon=4.29093E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15331E1
os_ea1_imon=2.45288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63492E1
os_ef1bup_imon=3.08656E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24637E0
cs_ionrep_imon=9.64248E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01703E1
cs_anode1_imon=2.0495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.17315E-8
tplens_vset=1.4E-1
tplens_vmon=1.59945E0
tplens_imon=-4.45877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26889E1
iondef3_imon=1.49252E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26617E1
iondef2_imon=1.57306E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.87923E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.268E0
ionrepsh_imon=9.49362E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3334E1
lens5b_imon=2.16966E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74414E1
cs_ef2b_imon=3.12998E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43341E0
os_ea2_imon=-5.45119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.18387E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05892E0
os_ef2alow_imon=-2.62297E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03246E-1
os_ef2bup_imon=-5.31763E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10855E1
os_restr2_imon=3.37774E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.30348E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01684E1
cs_anode2_imon=2.09478E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73421E1
iondef1_imon=1.0757E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68043E1
iondef4_imon=1.07979E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.19501E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.45873E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13451E0
cs_ionaccel_imon=-1.02114E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56006E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.96389E-1
window_imon=-1.20079E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39159E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.73397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.60796E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45552E0
defgridb_imon=6.12701E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.4146E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.063E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61414E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30553E1
cs_fil1_imon=9.2478E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29013E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62412E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3309E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92216E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58465E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34358E-1
cs_fil2_imon=-3.04924E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.43245E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21767E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95563E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.18014E-1	-7.99084E-1	-9.13079E0	-9.14159E0	4.91142E-3	9.33886E-2	2.72968E1	-3.26549E1	-3.26213E1	2.6822E1	1.20337E-7	2.52802E-3	2.52802E-3	6.3074E-3	2.98985E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.18086E-1	-7.98917E-1	-9.13088E0	-9.14207E0	5.05447E-3	9.3317E-2	2.73284E1	-3.26603E1	-3.25746E1	2.6804E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09309E0	-8.18229E-1	-7.99322E-1	-9.13105E0	-9.14187E0	5.05447E-3	9.33647E-2	2.72827E1	-3.2652E1	-3.26107E1	2.67698E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00676E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.18133E-1	-7.99179E-1	-9.13112E0	-9.14166E0	5.14984E-3	9.33886E-2	2.72998E1	-3.26431E1	-3.25983E1	2.68184E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.18348E-1	-7.98726E-1	-9.13124E0	-9.14178E0	5.17368E-3	9.32455E-2	2.72835E1	-3.26543E1	-3.26597E1	2.6792E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18062E-1	-7.98726E-1	-9.13146E0	-9.14221E0	5.14984E-3	9.34839E-2	2.73075E1	-3.26428E1	-3.26218E1	2.68238E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.18181E-1	-7.98917E-1	-9.13136E0	-9.14233E0	5.10216E-3	9.3174E-2	2.72974E1	-3.26337E1	-3.25782E1	2.67879E1	1.19978E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.02545E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.18157E-1	-7.98965E-1	-9.13105E0	-9.1419E0	4.98295E-3	9.34362E-2	2.73399E1	-3.26753E1	-3.26567E1	2.6789E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18014E-1	-7.98965E-1	-9.13138E0	-9.14159E0	4.93526E-3	9.33647E-2	2.72709E1	-3.26644E1	-3.25953E1	2.68268E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.18014E-1	-7.98845E-1	-9.13122E0	-9.14168E0	5.14984E-3	9.34839E-2	2.73357E1	-3.26567E1	-3.26464E1	2.67896E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.17943E-1	-7.98965E-1	-9.13126E0	-9.14168E0	4.673E-3	9.35078E-2	2.73105E1	-3.26759E1	-3.26362E1	2.67992E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09325E0	-8.1811E-1	-7.99179E-1	-9.13138E0	-9.14187E0	4.74453E-3	9.32693E-2	2.72985E1	-3.26915E1	-3.2626E1	2.68268E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.18157E-1	-7.98941E-1	-9.13148E0	-9.14185E0	4.95911E-3	9.32455E-2	2.73297E1	-3.26663E1	-3.26098E1	2.67995E1	1.19749E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.01223E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18062E-1	-7.99036E-1	-9.13153E0	-9.14192E0	4.673E-3	9.34601E-2	2.72721E1	-3.26801E1	-3.26609E1	2.6807E1	1.19861E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00824E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.18157E-1	-7.99084E-1	-9.1311E0	-9.14176E0	4.76837E-3	9.33409E-2	2.72913E1	-3.26693E1	-3.26741E1	2.67932E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.18372E-1	-7.99012E-1	-9.13122E0	-9.14202E0	4.88758E-3	9.35078E-2	2.73252E1	-3.26561E1	-3.25888E1	2.67986E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18133E-1	-7.98988E-1	-9.13119E0	-9.14145E0	4.98295E-3	9.33409E-2	2.73284E1	-3.2656E1	-3.26315E1	2.6789E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17966E-1	-7.98965E-1	-9.1316E0	-9.14152E0	5.07832E-3	9.34362E-2	2.72786E1	-3.26419E1	-3.26272E1	2.68166E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.17966E-1	-7.98869E-1	-9.13136E0	-9.14187E0	4.98295E-3	9.35793E-2	2.7318E1	-3.26736E1	-3.26327E1	2.68166E1	1.19836E-7	2.51641E-3	2.51641E-3	6.30478E-3	3.00546E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.17847E-1	-7.98845E-1	-9.13112E0	-9.14178E0	5.07832E-3	9.35793E-2	2.73421E1	-3.26617E1	-3.26889E1	2.68043E1