[Scan]
initial_time=2016-01-28T18:23:49
final_time=2016-01-28T18:24:09
ip_count=19
run=1026
dataset=4
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08736E-4
ql1_vset=
ql1_vmon=-8.17657E-1
ql1_imon=1.39756E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=2.03002E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.07992E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.59729E-10
mult1=-9.39121E-9
mult2=-2.64076E-9
rf_tmon=-4.75275E-3
rf_agc=3.34357E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.71491E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64049E0
bslens_imon=2.47849E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20343E1
lens5a_imon=1.99557E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53689E1
cs_ef1b_imon=3.09581E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04631E1
cs_ea1_imon=1.24182E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40436E0
lens1_imon=2.63811E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64625E1
os_ef1alow_imon=2.97269E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03716E1
cs_ea2_imon=1.39171E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84609E1
cs_ef1a_imon=3.00288E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.20081E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11137E1
os_restr1_imon=4.29805E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15377E1
os_ea1_imon=2.43747E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63652E1
os_ef1bup_imon=3.07675E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25145E0
cs_ionrep_imon=9.71233E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.9349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=2.04887E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.1656E-8
tplens_vset=1.4E-1
tplens_vmon=1.59082E0
tplens_imon=-3.63658E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25461E1
iondef3_imon=1.49372E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.593E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.9598E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2813E0
ionrepsh_imon=9.26849E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33827E1
lens5b_imon=2.18674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74614E1
cs_ef2b_imon=3.11567E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45131E0
os_ea2_imon=-6.94593E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00611E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18875E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04959E0
os_ef2alow_imon=-2.66246E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92349E-1
os_ef2bup_imon=-5.40691E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.37304E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23009E2
cs_ionfoca_imon=6.3168E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.09415E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72709E1
iondef1_imon=1.07986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08533E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.18992E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.46996E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1222E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47314E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56293E1
einzel_imon=7.62826E-6
window_vset=0.0E0
window_vmon=2.01468E-1
window_imon=-1.13335E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86615E1
mask2_imon=-6.84541E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.45808E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93768E3
defgrida_imon=6.93248E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.02203E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41973E0
defgridb_imon=6.07594E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33168E1
os_fil1_imon=9.41037E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6153E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30583E1
cs_fil1_imon=9.2658E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30884E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6236E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3167E-2
os_fil2_imon=-2.65677E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75183E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.38176E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.51114E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20903E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21685E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68474E-1
res40_imon=-2.39238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17776E-1	-7.98726E-1	-9.13131E0	-9.14176E0	4.8399E-3	9.35078E-2	2.72856E1	-3.26443E1	-3.27576E1	2.67994E1	1.20132E-7	2.51793E-3	2.51793E-3	6.31332E-3	3.00479E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17585E-1	-7.98988E-1	-9.13124E0	-9.14164E0	5.17368E-3	9.34839E-2	2.72721E1	-3.26663E1	-3.26056E1	2.67698E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17776E-1	-7.98821E-1	-9.13098E0	-9.14168E0	5.03063E-3	9.377E-2	2.73075E1	-3.26779E1	-3.26809E1	2.67804E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01347E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.17847E-1	-7.98845E-1	-9.13119E0	-9.14204E0	4.91142E-3	9.34124E-2	2.73045E1	-3.26524E1	-3.25076E1	2.68051E1	1.20055E-7	2.51203E-3	2.51203E-3	6.28056E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.18062E-1	-7.99155E-1	-9.13165E0	-9.14202E0	4.79221E-3	9.34601E-2	2.72898E1	-3.26679E1	-3.27092E1	2.68088E1	1.2033E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.17966E-1	-7.98583E-1	-9.13143E0	-9.14202E0	5.07832E-3	9.34601E-2	2.73123E1	-3.26416E1	-3.25491E1	2.6783E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09317E0	-8.1811E-1	-7.98631E-1	-9.13131E0	-9.14197E0	5.34058E-3	9.36031E-2	2.73195E1	-3.26879E1	-3.27059E1	2.6789E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.17823E-1	-7.98535E-1	-9.13126E0	-9.14185E0	4.74453E-3	9.36031E-2	2.72931E1	-3.26236E1	-3.25034E1	2.68094E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.18014E-1	-7.98607E-1	-9.13107E0	-9.14209E0	4.79221E-3	9.38416E-2	2.72324E1	-3.26639E1	-3.26122E1	2.68358E1	1.19861E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.17966E-1	-7.98774E-1	-9.13119E0	-9.14168E0	4.72069E-3	9.38177E-2	2.73016E1	-3.26744E1	-3.26077E1	2.67806E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.18133E-1	-7.98559E-1	-9.13138E0	-9.14168E0	4.31538E-3	9.377E-2	2.72805E1	-3.26723E1	-3.25966E1	2.68028E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.18133E-1	-7.98607E-1	-9.13136E0	-9.14168E0	4.55379E-3	9.38892E-2	2.72991E1	-3.26801E1	-3.27534E1	2.67866E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17704E-1	-7.98988E-1	-9.13126E0	-9.14152E0	4.74453E-3	9.36031E-2	2.72921E1	-3.26756E1	-3.26413E1	2.68099E1	1.19856E-7	2.51755E-3	2.51755E-3	6.31283E-3	2.99603E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17895E-1	-7.99012E-1	-9.13126E0	-9.1419E0	4.48227E-3	9.3627E-2	2.73015E1	-3.26212E1	-3.25251E1	2.6813E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17823E-1	-7.99036E-1	-9.13129E0	-9.14197E0	4.74453E-3	9.38416E-2	2.73417E1	-3.26368E1	-3.25725E1	2.68082E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09309E0	-8.17537E-1	-7.9906E-1	-9.13105E0	-9.14185E0	4.64916E-3	9.35555E-2	2.73231E1	-3.26506E1	-3.27774E1	2.68214E1	1.20278E-7	2.52264E-3	2.52264E-3	6.32112E-3	2.9913E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.178E-1	-7.98678E-1	-9.13134E0	-9.14185E0	4.60148E-3	9.38177E-2	2.72999E1	-3.26596E1	-3.25472E1	2.67949E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.17633E-1	-7.98893E-1	-9.13112E0	-9.14211E0	4.41074E-3	9.38177E-2	2.73039E1	-3.26591E1	-3.26717E1	2.68046E1	1.19891E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.006E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.1768E-1	-7.99179E-1	-9.13095E0	-9.14173E0	4.86374E-3	9.35555E-2	2.72774E1	-3.26679E1	-3.27186E1	2.68041E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.17657E-1	-7.99155E-1	-9.13095E0	-9.14192E0	5.05447E-3	9.34362E-2	2.72709E1	-3.26567E1	-3.25461E1	2.68052E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99941E-1