[Scan]
initial_time=2016-01-28T18:24:46
final_time=2016-01-28T18:25:06
ip_count=19
run=1026
dataset=4
scan=256
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=1.39948E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=1.96171E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=9.31704E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.37448E-10
mult1=-9.58386E-9
mult2=-2.62479E-9
rf_tmon=-5.33556E-3
rf_agc=3.28169E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.72058E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65565E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19939E1
lens5a_imon=1.98905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=3.12001E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05215E1
cs_ea1_imon=1.24931E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42582E0
lens1_imon=2.56877E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65023E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03923E1
cs_ea2_imon=1.39293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83349E1
cs_ef1a_imon=2.98126E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.20809E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11057E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.4478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25516E0
cs_ionrep_imon=9.73841E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01551E1
cs_anode1_imon=2.03882E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.17251E-8
tplens_vset=1.4E-1
tplens_vmon=1.60838E0
tplens_imon=-3.76954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.50936E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.56152E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98478E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.9505E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27414E0
ionrepsh_imon=9.3454E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42228E0
os_ea2_imon=-6.96503E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.20723E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.36977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.33271E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.09211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.22908E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.51238E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.19954E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47082E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39344E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-4.57124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.74494E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.2261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40661E0
defgridb_imon=6.24541E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33212E1
os_fil1_imon=9.41225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07509E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30549E1
cs_fil1_imon=9.23277E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24937E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59423E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48679E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21497E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43985E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.17966E-1	-7.98631E-1	-9.13134E0	-9.14154E0	5.126E-3	9.36031E-2	2.73116E1	-3.26402E1	-3.2741E1	2.68214E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.17728E-1	-7.98893E-1	-9.13146E0	-9.14161E0	5.03063E-3	9.36747E-2	2.73207E1	-3.26272E1	-3.25683E1	2.67788E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.17966E-1	-7.98845E-1	-9.13131E0	-9.14185E0	5.29289E-3	9.38177E-2	2.72709E1	-3.26816E1	-3.27309E1	2.67978E1	1.20174E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.9978E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.17561E-1	-7.98583E-1	-9.13124E0	-9.14149E0	5.29289E-3	9.38177E-2	2.73086E1	-3.26408E1	-3.27275E1	2.68184E1	1.1969E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17561E-1	-7.99131E-1	-9.13157E0	-9.14197E0	5.36442E-3	9.36031E-2	2.73147E1	-3.26518E1	-3.26705E1	2.67938E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17513E-1	-7.9875E-1	-9.13177E0	-9.14185E0	5.07832E-3	9.35078E-2	2.73177E1	-3.26615E1	-3.25395E1	2.68094E1	1.20031E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.0201E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.17299E-1	-7.99012E-1	-9.13148E0	-9.1418E0	5.34058E-3	9.35793E-2	2.73387E1	-3.26759E1	-3.27125E1	2.68053E1	1.20158E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09333E0	-8.17347E-1	-7.99155E-1	-9.13134E0	-9.14211E0	4.98295E-3	9.35793E-2	2.72841E1	-3.26549E1	-3.25407E1	2.68057E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.17442E-1	-7.99251E-1	-9.1316E0	-9.1419E0	4.98295E-3	9.35078E-2	2.73051E1	-3.26596E1	-3.27023E1	2.67836E1	1.2003E-7	2.51793E-3	2.51793E-3	6.29396E-3	3.00069E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.17347E-1	-7.99012E-1	-9.13103E0	-9.14204E0	5.10216E-3	9.36031E-2	2.73238E1	-3.26397E1	-3.25143E1	2.68088E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.17394E-1	-7.98821E-1	-9.13134E0	-9.14209E0	4.74453E-3	9.35555E-2	2.72757E1	-3.26627E1	-3.24518E1	2.67842E1	1.19925E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00942E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.17251E-1	-7.98988E-1	-9.13126E0	-9.14176E0	4.72069E-3	9.36985E-2	2.72727E1	-3.26892E1	-3.26596E1	2.6814E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09263E0	-8.17728E-1	-7.99036E-1	-9.13143E0	-9.14164E0	4.95911E-3	9.377E-2	2.72936E1	-3.26521E1	-3.2542E1	2.67914E1	1.19979E-7	2.51162E-3	2.51162E-3	6.29185E-3	3.00989E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09279E0	-8.17704E-1	-7.99179E-1	-9.13148E0	-9.14173E0	5.05447E-3	9.36508E-2	2.7285E1	-3.26891E1	-3.26183E1	2.68016E1	1.20005E-7	2.51758E-3	2.51758E-3	6.33065E-3	3.00916E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09309E0	-8.178E-1	-7.98893E-1	-9.13124E0	-9.14176E0	4.79221E-3	9.35078E-2	2.7299E1	-3.26652E1	-3.2675E1	2.67854E1	1.20106E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.17943E-1	-7.99036E-1	-9.1315E0	-9.14211E0	4.60148E-3	9.3627E-2	2.73081E1	-3.26374E1	-3.27029E1	2.68262E1	1.19925E-7	2.51581E-3	2.51581E-3	6.29067E-3	2.98819E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.1749E-1	-7.99251E-1	-9.13131E0	-9.14166E0	4.64916E-3	9.35793E-2	2.73358E1	-3.26815E1	-3.2511E1	2.68082E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.17609E-1	-7.98988E-1	-9.1315E0	-9.14202E0	4.55379E-3	9.33886E-2	2.72886E1	-3.26673E1	-3.25328E1	2.68018E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.17394E-1	-7.9906E-1	-9.13141E0	-9.14197E0	4.60148E-3	9.35078E-2	2.72955E1	-3.26963E1	-3.27089E1	2.67956E1	1.20383E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.1768E-1	-7.99012E-1	-9.1315E0	-9.14187E0	4.79221E-3	9.33409E-2	2.72997E1	-3.26705E1	-3.26218E1	2.68268E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00453E-1