[Scan]
initial_time=2016-01-28T18:25:14
final_time=2016-01-28T18:25:34
ip_count=19
run=1026
dataset=4
scan=257
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09309E0
qbias_imon=-1.08729E-4
ql1_vset=
ql1_vmon=-8.17776E-1
ql1_imon=1.39329E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.02417E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=8.08704E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.41168E-10
mult1=-1.04333E-8
mult2=-2.80949E-9
rf_tmon=-4.39149E-3
rf_agc=3.34035E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.69882E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65217E0
bslens_imon=2.61475E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19623E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05221E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53554E1
cs_ef1b_imon=3.10688E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04995E1
cs_ea1_imon=1.25233E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39138E0
lens1_imon=2.91065E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.649E1
os_ef1alow_imon=2.97493E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03599E1
cs_ea2_imon=1.40923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84037E1
cs_ef1a_imon=3.00257E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.20548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.31271E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15118E1
os_ea1_imon=2.44097E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63674E1
os_ef1bup_imon=3.07846E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20408E0
cs_ionrep_imon=9.80188E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01679E1
cs_anode1_imon=2.05791E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.1736E-8
tplens_vset=1.4E-1
tplens_vmon=1.59861E0
tplens_imon=-2.78005E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.5019E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.57821E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.97741E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26248E0
ionrepsh_imon=9.41254E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3347E1
lens5b_imon=2.1809E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.11544E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45974E0
os_ea2_imon=-5.62219E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71154E1
cs_ef2a_imon=3.1929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06753E0
os_ef2alow_imon=-2.69677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84882E-1
os_ef2bup_imon=-5.46029E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.38051E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.10929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72744E1
iondef1_imon=1.12502E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68453E1
iondef4_imon=1.07277E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.2408E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.50165E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10549E0
cs_ionaccel_imon=-1.12429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56282E1
einzel_imon=7.52436E-6
window_vset=0.0E0
window_vmon=1.60136E-1
window_imon=-9.99737E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39072E-4
mask2_vset=0.0E0
mask2_vmon=-1.86889E1
mask2_imon=-5.2877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.00256E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.9208E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.75728E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35801E0
defgridb_imon=6.03701E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.43776E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06414E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3058E1
cs_fil1_imon=9.241E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2511E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45599E-2
os_fil2_imon=-2.61335E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.57247E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35245E-1
cs_fil2_imon=-2.81445E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17514E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2169E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.63927E-1
res40_imon=-2.36593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.17513E-1	-7.9875E-1	-9.13129E0	-9.14173E0	4.76837E-3	9.36985E-2	2.72941E1	-3.26503E1	-3.25223E1	2.67955E1	1.20019E-7	2.51675E-3	2.51675E-3	6.33112E-3	3.00479E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.17561E-1	-7.98655E-1	-9.13172E0	-9.14183E0	4.88758E-3	9.3627E-2	2.73039E1	-3.26572E1	-3.27074E1	2.68338E1	1.20142E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.17394E-1	-7.98392E-1	-9.13146E0	-9.14195E0	5.14984E-3	9.33647E-2	2.73045E1	-3.26744E1	-3.25971E1	2.67902E1	1.20244E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.99083E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.1737E-1	-7.98678E-1	-9.13131E0	-9.14199E0	4.86374E-3	9.35555E-2	2.72546E1	-3.26627E1	-3.26657E1	2.68046E1	1.1979E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17609E-1	-7.99155E-1	-9.13134E0	-9.14204E0	5.05447E-3	9.36747E-2	2.73063E1	-3.26797E1	-3.26343E1	2.68088E1	1.20403E-7	2.5225E-3	2.5225E-3	6.29624E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.17871E-1	-7.98941E-1	-9.13124E0	-9.14185E0	5.14984E-3	9.33886E-2	2.72781E1	-3.26573E1	-3.25966E1	2.68178E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17633E-1	-7.98917E-1	-9.13143E0	-9.14197E0	5.07832E-3	9.35078E-2	2.73051E1	-3.26536E1	-3.25816E1	2.68208E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.17561E-1	-7.99322E-1	-9.1315E0	-9.14166E0	4.88758E-3	9.32455E-2	2.73069E1	-3.26142E1	-3.26266E1	2.68053E1	1.2033E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.17728E-1	-7.99036E-1	-9.13115E0	-9.14195E0	5.31673E-3	9.31978E-2	2.72856E1	-3.26638E1	-3.26738E1	2.6801E1	1.20209E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.17275E-1	-7.9906E-1	-9.13091E0	-9.14195E0	4.72069E-3	9.34601E-2	2.73177E1	-3.26987E1	-3.26146E1	2.67625E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.02511E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09309E0	-8.17513E-1	-7.98798E-1	-9.13124E0	-9.14195E0	5.10216E-3	9.34124E-2	2.72978E1	-3.26664E1	-3.26236E1	2.68034E1	1.19757E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.17513E-1	-7.98678E-1	-9.13119E0	-9.14197E0	4.76837E-3	9.34839E-2	2.72974E1	-3.26726E1	-3.25334E1	2.68046E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17728E-1	-7.98845E-1	-9.13105E0	-9.14202E0	4.79221E-3	9.34601E-2	2.73231E1	-3.26885E1	-3.26164E1	2.68142E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.17633E-1	-7.98774E-1	-9.13081E0	-9.14168E0	4.72069E-3	9.32932E-2	2.73051E1	-3.26603E1	-3.26741E1	2.68046E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17657E-1	-7.98845E-1	-9.13069E0	-9.14185E0	4.93526E-3	9.32693E-2	2.73228E1	-3.26679E1	-3.26638E1	2.68262E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17728E-1	-7.98774E-1	-9.13107E0	-9.14173E0	4.88758E-3	9.36031E-2	2.73327E1	-3.2647E1	-3.26705E1	2.67938E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01223E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09309E0	-8.178E-1	-7.98988E-1	-9.13129E0	-9.14197E0	5.03063E-3	9.34839E-2	2.72786E1	-3.26337E1	-3.26472E1	2.68028E1	1.20383E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.03976E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09294E0	-8.17633E-1	-7.99012E-1	-9.13105E0	-9.14185E0	4.98295E-3	9.36985E-2	2.73147E1	-3.26633E1	-3.26062E1	2.68088E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-8.17609E-1	-7.98821E-1	-9.13098E0	-9.14197E0	4.79221E-3	9.35078E-2	2.73222E1	-3.26703E1	-3.26089E1	2.68118E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09309E0	-8.17776E-1	-7.98869E-1	-9.13136E0	-9.1418E0	5.10216E-3	9.36031E-2	2.72744E1	-3.26638E1	-3.26349E1	2.68453E1	1.20158E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00453E-1