[Scan]
initial_time=2016-01-28T18:25:42
final_time=2016-01-28T18:26:02
ip_count=19
run=1026
dataset=4
scan=258
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.39523E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.99939E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=7.84421E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.48118E-10
mult1=-9.94508E-9
mult2=-2.75055E-9
rf_tmon=-5.04716E-3
rf_agc=3.27988E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.70375E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=1.9755E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12429E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.11533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04519E1
cs_ea1_imon=1.22711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41882E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.41024E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83709E1
cs_ef1a_imon=2.99387E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.20459E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=2.44991E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=9.62509E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.059E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.17529E-8
tplens_vset=1.4E-1
tplens_vmon=1.65465E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25509E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.96078E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=9.42321E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49183E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.07967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.26184E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.48413E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.12746E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.5653E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.32513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.99708E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.06918E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5369E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.40858E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61796E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30542E1
cs_fil1_imon=9.24166E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32806E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.17506E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.73805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37979E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.17418E-1	-7.98965E-1	-9.13129E0	-9.14195E0	5.03063E-3	9.377E-2	2.73086E1	-3.26502E1	-3.26018E1	2.67986E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
2.0E0	5.2E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17323E-1	-7.98965E-1	-9.13103E0	-9.14178E0	5.22137E-3	9.32217E-2	2.72892E1	-3.26652E1	-3.26229E1	2.67722E1	1.19646E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17585E-1	-7.9875E-1	-9.13112E0	-9.14223E0	4.98295E-3	9.3317E-2	2.73252E1	-3.26531E1	-3.2652E1	2.68175E1	1.19766E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.01209E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17442E-1	-7.99012E-1	-9.13129E0	-9.14218E0	5.14984E-3	9.33409E-2	2.72985E1	-3.26609E1	-3.26573E1	2.6801E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.17657E-1	-7.9937E-1	-9.13131E0	-9.14221E0	4.91142E-3	9.377E-2	2.72869E1	-3.2671E1	-3.26004E1	2.6803E1	1.20383E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.17537E-1	-7.99298E-1	-9.1311E0	-9.14235E0	4.86374E-3	9.35793E-2	2.7261E1	-3.27007E1	-3.26236E1	2.67857E1	1.20078E-7	2.52197E-3	2.52197E-3	6.323E-3	3.01733E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1749E-1	-7.99012E-1	-9.13129E0	-9.14197E0	5.03063E-3	9.34124E-2	2.72809E1	-3.26738E1	-3.26343E1	2.67972E1	1.20137E-7	2.52139E-3	2.52139E-3	6.28511E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17585E-1	-7.98821E-1	-9.13124E0	-9.14195E0	5.10216E-3	9.33409E-2	2.73261E1	-3.26885E1	-3.26458E1	2.68076E1	1.20004E-7	2.51203E-3	2.51203E-3	6.36687E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17394E-1	-7.98917E-1	-9.13134E0	-9.14183E0	4.95911E-3	9.35078E-2	2.73073E1	-3.26541E1	-3.25855E1	2.67988E1	1.19913E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17704E-1	-7.98655E-1	-9.13134E0	-9.14176E0	5.17368E-3	9.35078E-2	2.73075E1	-3.2675E1	-3.26408E1	2.68058E1	1.20257E-7	2.51924E-3	2.51924E-3	6.3074E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17513E-1	-7.98845E-1	-9.13107E0	-9.14176E0	4.98295E-3	9.33409E-2	2.73535E1	-3.26756E1	-3.27129E1	2.6777E1	1.19913E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17537E-1	-7.98845E-1	-9.13131E0	-9.14185E0	5.03063E-3	9.33647E-2	2.73417E1	-3.26717E1	-3.26056E1	2.68142E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.02545E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.178E-1	-7.98893E-1	-9.13143E0	-9.14209E0	4.91142E-3	9.35078E-2	2.73098E1	-3.27186E1	-3.26119E1	2.68106E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.17728E-1	-7.98941E-1	-9.13143E0	-9.14209E0	4.93526E-3	9.34839E-2	2.73105E1	-3.26747E1	-3.26554E1	2.68346E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99941E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.17657E-1	-7.98869E-1	-9.13131E0	-9.14214E0	5.05447E-3	9.39131E-2	2.72757E1	-3.26633E1	-3.26164E1	2.67968E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17442E-1	-7.98965E-1	-9.13124E0	-9.14197E0	4.86374E-3	9.37462E-2	2.73195E1	-3.26957E1	-3.25984E1	2.68106E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.1749E-1	-7.98607E-1	-9.13107E0	-9.14192E0	4.95911E-3	9.36747E-2	2.7251E1	-3.26813E1	-3.26825E1	2.68166E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17561E-1	-7.98607E-1	-9.13143E0	-9.14199E0	4.95911E-3	9.38892E-2	2.72304E1	-3.25988E1	-3.26892E1	2.68151E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.17418E-1	-7.98988E-1	-9.13153E0	-9.14202E0	4.673E-3	9.35316E-2	2.73285E1	-3.26831E1	-3.2611E1	2.6801E1	1.19841E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17561E-1	-7.98726E-1	-9.13143E0	-9.14187E0	4.69685E-3	9.3627E-2	2.73075E1	-3.26657E1	-3.25509E1	2.6795E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1