[Scan]
initial_time=2016-01-28T18:29:47
final_time=2016-01-28T18:30:09
ip_count=19
run=1026
dataset=4
scan=267
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08749E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.38307E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.05817E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.7168E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-1.31226E-10
mult1=-9.83671E-9
mult2=-2.8284E-9
rf_tmon=-5.73811E-3
rf_agc=3.2186E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.68689E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.10199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.23685E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4014E0
lens1_imon=2.76486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.99784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.21504E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.42648E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=9.59265E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.0572E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.17769E-8
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.47982E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.0581E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=9.43042E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33423E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47621E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.73483E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.37301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7346E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68466E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.23754E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.48324E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.22477E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=6.99708E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.7916E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.9394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.01293E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3322E1
os_fil1_imon=9.40582E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07485E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61418E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30604E1
cs_fil1_imon=9.25247E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28061E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62396E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.60557E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21742E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91127E-1
res40_imon=-2.31317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17156E-1	-7.98726E-1	-9.13143E0	-9.14183E0	4.62532E-3	9.35793E-2	2.73357E1	-3.26783E1	-3.2626E1	2.6786E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17132E-1	-7.98941E-1	-9.13134E0	-9.14211E0	4.8399E-3	9.37939E-2	2.73291E1	-3.26687E1	-3.26819E1	2.68202E1	1.20226E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17037E-1	-7.98988E-1	-9.13174E0	-9.14204E0	4.95911E-3	9.34601E-2	2.73093E1	-3.26705E1	-3.26002E1	2.68178E1	1.19861E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.02922E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.1687E-1	-7.98988E-1	-9.13153E0	-9.14166E0	4.91142E-3	9.36031E-2	2.73439E1	-3.26787E1	-3.27152E1	2.6825E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02133E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17013E-1	-7.9875E-1	-9.13153E0	-9.14199E0	4.64916E-3	9.35316E-2	2.73033E1	-3.26591E1	-3.25942E1	2.68004E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17156E-1	-7.9875E-1	-9.13157E0	-9.14199E0	4.52995E-3	9.35078E-2	2.72721E1	-3.26536E1	-3.25635E1	2.67986E1	1.20174E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17037E-1	-7.98965E-1	-9.13138E0	-9.14207E0	4.60148E-3	9.36985E-2	2.73381E1	-3.26813E1	-3.26464E1	2.68202E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17013E-1	-7.98917E-1	-9.13134E0	-9.14221E0	4.52995E-3	9.3627E-2	2.72763E1	-3.26651E1	-3.25713E1	2.6846E1	1.20226E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16941E-1	-7.98392E-1	-9.13138E0	-9.1423E0	4.3869E-3	9.36031E-2	2.73123E1	-3.26657E1	-3.27336E1	2.6813E1	1.20487E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16989E-1	-7.98893E-1	-9.13131E0	-9.14223E0	4.57764E-3	9.36031E-2	2.72651E1	-3.26359E1	-3.24615E1	2.67845E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16894E-1	-7.99131E-1	-9.13131E0	-9.14216E0	4.48227E-3	9.38416E-2	2.73088E1	-3.2656E1	-3.25201E1	2.67864E1	1.19841E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99093E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16846E-1	-7.99274E-1	-9.13138E0	-9.14214E0	4.673E-3	9.38177E-2	2.73216E1	-3.26291E1	-3.24742E1	2.68082E1	1.20226E-7	2.51652E-3	2.51652E-3	6.31869E-3	2.99929E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16536E-1	-7.99036E-1	-9.13115E0	-9.14211E0	4.43459E-3	9.3627E-2	2.73207E1	-3.26813E1	-3.25671E1	2.68172E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16679E-1	-7.99084E-1	-9.13119E0	-9.14164E0	4.57764E-3	9.34362E-2	2.73105E1	-3.26879E1	-3.26488E1	2.68124E1	1.2014E-7	2.51863E-3	2.51863E-3	6.32371E-3	3.01155E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16989E-1	-7.99179E-1	-9.13143E0	-9.14164E0	4.50611E-3	9.3627E-2	2.72992E1	-3.26756E1	-3.26119E1	2.68136E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.1718E-1	-7.98941E-1	-9.13117E0	-9.14178E0	4.98295E-3	9.35316E-2	2.72877E1	-3.26945E1	-3.26212E1	2.68052E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17299E-1	-7.99084E-1	-9.13134E0	-9.14197E0	4.69685E-3	9.37939E-2	2.7308E1	-3.26413E1	-3.26201E1	2.68117E1	1.20106E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.97647E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17227E-1	-7.98559E-1	-9.13122E0	-9.14199E0	4.60148E-3	9.34839E-2	2.73417E1	-3.26071E1	-3.23629E1	2.68004E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.16917E-1	-7.9875E-1	-9.13126E0	-9.14173E0	4.55379E-3	9.35078E-2	2.73099E1	-3.26579E1	-3.25125E1	2.68166E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16894E-1	-7.98631E-1	-9.13105E0	-9.14168E0	4.86374E-3	9.38416E-2	2.7346E1	-3.26789E1	-3.26056E1	2.68466E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1