[Scan]
initial_time=2016-01-28T18:30:47
final_time=2016-01-28T18:31:08
ip_count=19
run=1026
dataset=4
scan=269
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.38709E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=1.95954E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.39064E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-1.30141E-10
mult1=-9.40478E-9
mult2=-2.81145E-9
rf_tmon=-4.9814E-3
rf_agc=3.27664E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.73814E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62581E0
bslens_imon=2.46268E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19828E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.0502E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5371E1
cs_ef1b_imon=3.11038E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04561E2
lens23_imon=1.02243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05039E1
cs_ea1_imon=1.23793E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37701E0
lens1_imon=2.57719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64699E1
os_ef1alow_imon=2.9617E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.42E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84641E1
cs_ef1a_imon=3.01152E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.20733E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11221E1
os_restr1_imon=4.29714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.4067E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08002E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23301E0
cs_ionrep_imon=9.76844E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93508E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=2.05168E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.17107E-8
tplens_vset=1.4E-1
tplens_vmon=1.60581E0
tplens_imon=-3.12281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26826E1
iondef3_imon=1.49901E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.55741E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02885E2
lens6_imon=2.9851E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.9995E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29727E0
ionrepsh_imon=9.28368E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33843E1
lens5b_imon=2.18035E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12206E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4544E0
os_ea2_imon=-7.4742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00703E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.19913E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0818E0
os_ef2alow_imon=-2.61114E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95262E-1
os_ef2bup_imon=-5.36299E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10916E1
os_restr2_imon=3.37506E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.30921E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01685E1
cs_anode2_imon=2.10539E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.0967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68372E1
iondef4_imon=1.07627E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.21821E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.51064E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13598E0
cs_ionaccel_imon=-9.76383E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47246E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.59832E-6
window_vset=0.0E0
window_vmon=1.89328E-1
window_imon=-1.05034E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39166E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.49431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.18814E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.65758E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.40571E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59883E0
defgridb_imon=6.169E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33236E1
os_fil1_imon=9.42407E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06791E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61833E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30594E1
cs_fil1_imon=9.25969E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.279E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63242E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35821E-2
os_fil2_imon=-2.74958E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85629E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30486E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33427E-1
cs_fil2_imon=-2.70417E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03891E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21711E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20198E-7
chamber_cvt_pmon=2.52019E-3
foreline_cvt_pmon=2.52019E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90524E-1
res40_imon=-2.47102E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16822E-1	-7.98655E-1	-9.1315E0	-9.14228E0	4.74453E-3	9.38177E-2	2.73328E1	-3.26478E1	-3.26714E1	2.6807E1	1.19674E-7	2.5199E-3	2.5199E-3	6.29581E-3	3.01748E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17037E-1	-7.98774E-1	-9.13136E0	-9.14207E0	5.126E-3	9.34362E-2	2.72939E1	-3.26322E1	-3.25518E1	2.67963E1	1.198E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17132E-1	-7.9906E-1	-9.13105E0	-9.14207E0	4.88758E-3	9.34601E-2	2.73243E1	-3.26651E1	-3.26667E1	2.6825E1	1.19991E-7	2.52521E-3	2.52521E-3	6.3245E-3	3.00522E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16941E-1	-7.98678E-1	-9.13126E0	-9.14192E0	5.03063E-3	9.36508E-2	2.73027E1	-3.26855E1	-3.26699E1	2.67998E1	1.19717E-7	2.51923E-3	2.51923E-3	6.29738E-3	3.04379E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16917E-1	-7.98869E-1	-9.13157E0	-9.14211E0	5.05447E-3	9.34601E-2	2.72636E1	-3.26609E1	-3.25683E1	2.68094E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16989E-1	-7.98798E-1	-9.13129E0	-9.14202E0	5.05447E-3	9.3317E-2	2.72978E1	-3.26603E1	-3.26211E1	2.68142E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16965E-1	-7.98941E-1	-9.13105E0	-9.14199E0	4.95911E-3	9.36747E-2	2.73242E1	-3.26347E1	-3.26463E1	2.67962E1	1.20031E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16894E-1	-7.98774E-1	-9.13146E0	-9.14204E0	4.72069E-3	9.39846E-2	2.72889E1	-3.26374E1	-3.26909E1	2.68124E1	1.20344E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.01104E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16727E-1	-7.9875E-1	-9.1316E0	-9.14199E0	4.57764E-3	9.37939E-2	2.73279E1	-3.26458E1	-3.24343E1	2.68128E1	1.20191E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.99348E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17037E-1	-7.99084E-1	-9.13136E0	-9.14211E0	4.62532E-3	9.36747E-2	2.73082E1	-3.26444E1	-3.24515E1	2.68219E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00453E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16822E-1	-7.98965E-1	-9.13141E0	-9.14195E0	4.81606E-3	9.34601E-2	2.72997E1	-3.26705E1	-3.24452E1	2.68058E1	1.19872E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16822E-1	-7.9875E-1	-9.13131E0	-9.14216E0	4.93526E-3	9.40084E-2	2.72791E1	-3.26703E1	-3.26266E1	2.68209E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16894E-1	-7.98917E-1	-9.13119E0	-9.14192E0	4.95911E-3	9.38177E-2	2.73123E1	-3.26831E1	-3.27546E1	2.67951E1	1.19544E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.03027E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17132E-1	-7.98774E-1	-9.13146E0	-9.1419E0	5.07832E-3	9.36985E-2	2.73069E1	-3.26404E1	-3.25335E1	2.6801E1	1.19766E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.0201E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17204E-1	-7.98559E-1	-9.13155E0	-9.14192E0	4.64916E-3	9.33409E-2	2.72862E1	-3.2672E1	-3.2557E1	2.68377E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.17156E-1	-7.98535E-1	-9.1316E0	-9.14214E0	4.86374E-3	9.35793E-2	2.72775E1	-3.26793E1	-3.26774E1	2.68214E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01738E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17466E-1	-7.98774E-1	-9.13126E0	-9.14197E0	4.98295E-3	9.34839E-2	2.73225E1	-3.26753E1	-3.24395E1	2.68024E1	1.20031E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.1749E-1	-7.98655E-1	-9.13117E0	-9.1423E0	4.64916E-3	9.36031E-2	2.74172E1	-3.2695E1	-3.2314E1	2.68208E1	1.20192E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00348E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17132E-1	-7.98583E-1	-9.1311E0	-9.14199E0	4.72069E-3	9.35555E-2	2.72913E1	-3.26666E1	-3.24676E1	2.68292E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16965E-1	-7.98845E-1	-9.13112E0	-9.14211E0	4.52995E-3	9.39369E-2	2.73122E1	-3.26779E1	-3.26826E1	2.68372E1	1.20198E-7	2.52019E-3	2.52019E-3	6.3074E-3	3.01609E-1