[Scan]
initial_time=2016-01-28T18:31:16
final_time=2016-01-28T18:31:38
ip_count=19
run=1026
dataset=4
scan=270
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.38593E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.99357E-9
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=4.97735E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=-1.33288E-10
mult1=-1.00414E-8
mult2=-2.84836E-9
rf_tmon=-3.80946E-3
rf_agc=3.32555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.76604E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.80091E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02049E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.25163E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38458E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04111E1
cs_ea2_imon=1.42683E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=3.00396E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.20089E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=2.42143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=9.68638E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.04603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.16838E-8
tplens_vset=1.4E-1
tplens_vmon=1.64864E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2742E1
iondef3_imon=1.48126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.98231E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=9.20331E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-8.90558E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.38022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.28847E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.07643E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68151E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.2471E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.51638E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-9.94115E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.76498E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82581E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86885E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.84928E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.40804E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33231E1
os_fil1_imon=9.46619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61556E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3063E1
cs_fil1_imon=9.23145E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.274E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62656E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58108E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2187E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32679E-3
inlet_lpb_pmon=3.01278E-1
chamber_ion_pmon=1.19814E-7
chamber_cvt_pmon=2.51732E-3
foreline_cvt_pmon=2.51732E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88724E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16822E-1	-7.98559E-1	-9.13117E0	-9.14211E0	4.76837E-3	9.377E-2	2.73134E1	-3.26661E1	-3.26997E1	2.67937E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.1706E-1	-7.98821E-1	-9.1315E0	-9.14211E0	4.88758E-3	9.36508E-2	2.73014E1	-3.26621E1	-3.2593E1	2.68038E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16894E-1	-7.98512E-1	-9.13134E0	-9.14202E0	4.72069E-3	9.34362E-2	2.72634E1	-3.26747E1	-3.27558E1	2.68169E1	1.19872E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.02813E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.17084E-1	-7.98464E-1	-9.13119E0	-9.14216E0	4.79221E-3	9.377E-2	2.73111E1	-3.26536E1	-3.25978E1	2.67974E1	1.20243E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17084E-1	-7.98893E-1	-9.13103E0	-9.14207E0	4.64916E-3	9.35793E-2	2.73099E1	-3.2644E1	-3.26068E1	2.68352E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17084E-1	-7.98559E-1	-9.13138E0	-9.14199E0	4.55379E-3	9.377E-2	2.73027E1	-3.26667E1	-3.2675E1	2.68192E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16798E-1	-7.98702E-1	-9.13134E0	-9.14223E0	4.72069E-3	9.36031E-2	2.73117E1	-3.265E1	-3.25816E1	2.67826E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16846E-1	-7.98678E-1	-9.13115E0	-9.14216E0	4.76837E-3	9.377E-2	2.73387E1	-3.26338E1	-3.26861E1	2.67972E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16488E-1	-7.9844E-1	-9.13129E0	-9.14192E0	4.88758E-3	9.3627E-2	2.72666E1	-3.26398E1	-3.2611E1	2.67926E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16894E-1	-7.98678E-1	-9.13076E0	-9.14202E0	4.98295E-3	9.34839E-2	2.73259E1	-3.26383E1	-3.26217E1	2.67926E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16989E-1	-7.98345E-1	-9.13095E0	-9.14195E0	4.62532E-3	9.35316E-2	2.72912E1	-3.2695E1	-3.26318E1	2.68163E1	1.20297E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.98819E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16917E-1	-7.98416E-1	-9.13098E0	-9.1419E0	4.36306E-3	9.35078E-2	2.731E1	-3.26468E1	-3.2656E1	2.67962E1	1.1964E-7	2.51393E-3	2.51393E-3	6.31798E-3	2.98842E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16798E-1	-7.98488E-1	-9.13098E0	-9.1424E0	4.31538E-3	9.34362E-2	2.73255E1	-3.26771E1	-3.26512E1	2.68124E1	1.19713E-7	2.51804E-3	2.51804E-3	6.35786E-3	2.9829E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16798E-1	-7.98464E-1	-9.13124E0	-9.14218E0	4.52995E-3	9.32455E-2	2.73198E1	-3.26496E1	-3.2603E1	2.68268E1	1.20069E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16631E-1	-7.98321E-1	-9.13131E0	-9.14168E0	4.36306E-3	9.30786E-2	2.73297E1	-3.26675E1	-3.2632E1	2.68082E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16751E-1	-7.98368E-1	-9.13124E0	-9.14199E0	4.81606E-3	9.30786E-2	2.72662E1	-3.2629E1	-3.26313E1	2.67926E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01609E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.1706E-1	-7.98488E-1	-9.13103E0	-9.14209E0	4.64916E-3	9.34124E-2	2.73153E1	-3.26615E1	-3.25797E1	2.68269E1	1.2026E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16894E-1	-7.98416E-1	-9.13107E0	-9.14202E0	4.86374E-3	9.35555E-2	2.74093E1	-3.27285E1	-3.24883E1	2.67987E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.97704E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16751E-1	-7.98655E-1	-9.13129E0	-9.14202E0	4.95911E-3	9.31978E-2	2.73167E1	-3.26603E1	-3.25972E1	2.67689E1	1.19831E-7	2.51369E-3	2.51369E-3	6.33341E-3	2.99753E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16989E-1	-7.98678E-1	-9.13081E0	-9.14221E0	4.86374E-3	9.33647E-2	2.73261E1	-3.26657E1	-3.2742E1	2.68151E1	1.19814E-7	2.51732E-3	2.51732E-3	6.32679E-3	3.01278E-1