[Scan]
initial_time=2016-01-28T18:34:40
final_time=2016-01-28T18:35:01
ip_count=19
run=1026
dataset=4
scan=277
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.38077E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.01643E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=4.57394E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.20759E-10
mult1=-9.83671E-9
mult2=-2.73059E-9
rf_tmon=-5.39564E-3
rf_agc=3.23662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.66011E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20161E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.09082E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=1.23864E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39321E0
lens1_imon=2.68837E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.42092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.19866E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.42752E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=9.55837E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.04207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.17872E-8
tplens_vset=1.4E-1
tplens_vmon=1.62905E0
tplens_imon=-7.59044E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.01694E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2928E0
ionrepsh_imon=9.45218E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45443E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.08503E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.1843E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.49709E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.09142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5676E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.40641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.41375E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30508E1
cs_fil1_imon=9.2428E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29262E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6186E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28975E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6621E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16536E-1	-7.98869E-1	-9.1315E0	-9.14187E0	5.126E-3	9.33886E-2	2.72915E1	-3.26726E1	-3.26124E1	2.6794E1	1.20158E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99941E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16917E-1	-7.98941E-1	-9.13146E0	-9.14176E0	5.05447E-3	9.38416E-2	2.72943E1	-3.26556E1	-3.2622E1	2.68008E1	1.20106E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16727E-1	-7.99036E-1	-9.13136E0	-9.14159E0	4.8399E-3	9.36747E-2	2.73095E1	-3.26978E1	-3.26659E1	2.68032E1	1.20078E-7	2.52509E-3	2.52509E-3	6.31779E-3	3.0E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16679E-1	-7.98845E-1	-9.13143E0	-9.14185E0	5.03063E-3	9.35316E-2	2.72973E1	-3.26434E1	-3.25972E1	2.68052E1	1.19667E-7	2.50931E-3	2.50931E-3	6.3074E-3	3.00794E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16941E-1	-7.98893E-1	-9.13143E0	-9.14197E0	5.14984E-3	9.37223E-2	2.73069E1	-3.26669E1	-3.26302E1	2.67938E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16941E-1	-7.98726E-1	-9.13153E0	-9.14233E0	4.98295E-3	9.35793E-2	2.72842E1	-3.26434E1	-3.26602E1	2.68163E1	1.20004E-7	2.50775E-3	2.50775E-3	6.32356E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16941E-1	-7.98631E-1	-9.1311E0	-9.14216E0	5.07832E-3	9.3627E-2	2.7282E1	-3.26747E1	-3.25536E1	2.68194E1	1.19851E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.00197E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16655E-1	-7.98559E-1	-9.13117E0	-9.14199E0	4.86374E-3	9.36985E-2	2.72803E1	-3.27216E1	-3.26301E1	2.67891E1	1.19925E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16584E-1	-7.98535E-1	-9.1316E0	-9.14195E0	5.03063E-3	9.36031E-2	2.72516E1	-3.26518E1	-3.2584E1	2.67892E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16417E-1	-7.9844E-1	-9.13169E0	-9.14195E0	5.10216E-3	9.34839E-2	2.73381E1	-3.26638E1	-3.26384E1	2.67893E1	1.20297E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00676E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16345E-1	-7.98726E-1	-9.13169E0	-9.14223E0	5.03063E-3	9.36031E-2	2.72901E1	-3.26579E1	-3.2599E1	2.68148E1	1.20192E-7	2.52553E-3	2.52553E-3	6.32328E-3	2.99594E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.1625E-1	-7.9875E-1	-9.13126E0	-9.14202E0	4.93526E-3	9.3627E-2	2.73033E1	-3.26502E1	-3.26708E1	2.68204E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16727E-1	-7.98559E-1	-9.1311E0	-9.14218E0	5.07832E-3	9.3627E-2	2.72803E1	-3.26797E1	-3.25735E1	2.68058E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16441E-1	-7.98464E-1	-9.13129E0	-9.14226E0	4.91142E-3	9.34839E-2	2.72781E1	-3.26554E1	-3.26591E1	2.68052E1	1.19697E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9943E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16226E-1	-7.98464E-1	-9.13105E0	-9.14204E0	4.95911E-3	9.34601E-2	2.72715E1	-3.26555E1	-3.26502E1	2.68076E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.1625E-1	-7.98655E-1	-9.1311E0	-9.1419E0	5.14984E-3	9.36508E-2	2.73045E1	-3.26596E1	-3.26868E1	2.67848E1	1.2014E-7	2.51863E-3	2.51863E-3	6.31827E-3	3.02584E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16321E-1	-7.98917E-1	-9.13095E0	-9.14202E0	5.19753E-3	9.34362E-2	2.72937E1	-3.26699E1	-3.26182E1	2.68022E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16464E-1	-7.98631E-1	-9.1311E0	-9.14216E0	5.03063E-3	9.33647E-2	2.73246E1	-3.26667E1	-3.26024E1	2.68012E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00966E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16393E-1	-7.98583E-1	-9.13115E0	-9.14178E0	4.91142E-3	9.34124E-2	2.73529E1	-3.26301E1	-3.26679E1	2.6831E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16727E-1	-7.98726E-1	-9.13141E0	-9.14199E0	4.8399E-3	9.33409E-2	2.73069E1	-3.26777E1	-3.26296E1	2.67962E1	1.20226E-7	2.51771E-3	2.51771E-3	6.28006E-3	3.01085E-1