[Scan]
initial_time=2016-01-28T18:35:37
final_time=2016-01-28T18:35:58
ip_count=19
run=1026
dataset=4
scan=279
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.37872E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.01201E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=4.56238E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.06895E-10
mult1=-9.92494E-9
mult2=-2.7311E-9
rf_tmon=-4.3561E-3
rf_agc=3.36925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.70177E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19476E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.10704E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05253E1
cs_ea1_imon=1.25704E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44512E0
lens1_imon=2.54326E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.96036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.40782E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8395E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.69481E-1
olens2_imon=1.21294E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=2.43389E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21906E0
cs_ionrep_imon=9.93708E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.04675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.17993E-8
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-6.52862E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2659E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.00928E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=9.25752E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45384E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.38418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.11126E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68117E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.2596E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.47345E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08389E0
cs_ionaccel_imon=-1.05899E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.14095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.39159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62057E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30509E1
cs_fil1_imon=9.26016E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31424E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62315E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.82214E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20876E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21612E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70104E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16607E-1	-7.9844E-1	-9.13122E0	-9.1423E0	4.57764E-3	9.35793E-2	2.73092E1	-3.26903E1	-3.26242E1	2.68076E1	1.19841E-7	2.51077E-3	2.51077E-3	6.32858E-3	3.00348E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16512E-1	-7.98273E-1	-9.13131E0	-9.14207E0	4.673E-3	9.36031E-2	2.73103E1	-3.26637E1	-3.26036E1	2.67948E1	1.19953E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.16655E-1	-7.98368E-1	-9.13131E0	-9.14228E0	4.69685E-3	9.3317E-2	2.73375E1	-3.26331E1	-3.26644E1	2.68064E1	1.19918E-7	2.52313E-3	2.52313E-3	6.31624E-3	3.0045E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16655E-1	-7.98512E-1	-9.13126E0	-9.14197E0	4.673E-3	9.37462E-2	2.73508E1	-3.26819E1	-3.26729E1	2.67998E1	1.20106E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16822E-1	-7.98464E-1	-9.13141E0	-9.14204E0	4.8399E-3	9.34362E-2	2.73139E1	-3.26284E1	-3.26425E1	2.67995E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16655E-1	-7.98392E-1	-9.13143E0	-9.14216E0	4.74453E-3	9.36508E-2	2.73112E1	-3.26395E1	-3.26297E1	2.68431E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.1687E-1	-7.98607E-1	-9.13129E0	-9.14195E0	4.69685E-3	9.36747E-2	2.72864E1	-3.2653E1	-3.26287E1	2.68109E1	1.20403E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16989E-1	-7.98702E-1	-9.13129E0	-9.14216E0	4.86374E-3	9.36985E-2	2.73069E1	-3.26113E1	-3.26236E1	2.68331E1	1.20253E-7	2.51962E-3	2.51962E-3	6.31163E-3	3.02013E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.16774E-1	-7.98655E-1	-9.13138E0	-9.14204E0	4.69685E-3	9.36031E-2	2.73069E1	-3.26762E1	-3.25511E1	2.68082E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.16965E-1	-7.98988E-1	-9.13148E0	-9.14171E0	4.98295E-3	9.39131E-2	2.73281E1	-3.2682E1	-3.26166E1	2.67938E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.1706E-1	-7.98607E-1	-9.13146E0	-9.14202E0	4.98295E-3	9.39608E-2	2.72867E1	-3.26603E1	-3.26291E1	2.68208E1	1.20466E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.1718E-1	-7.98631E-1	-9.13122E0	-9.14185E0	5.126E-3	9.36747E-2	2.73105E1	-3.26374E1	-3.26332E1	2.67932E1	1.2033E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.17156E-1	-7.98726E-1	-9.13131E0	-9.14228E0	4.98295E-3	9.37223E-2	2.72564E1	-3.2635E1	-3.26663E1	2.68148E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16989E-1	-7.98631E-1	-9.13124E0	-9.14233E0	4.86374E-3	9.36985E-2	2.72408E1	-3.26909E1	-3.26344E1	2.6798E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.1687E-1	-7.98416E-1	-9.13153E0	-9.14216E0	5.26905E-3	9.34601E-2	2.73263E1	-3.26543E1	-3.26307E1	2.68118E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98481E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16584E-1	-7.98655E-1	-9.13141E0	-9.14202E0	5.17368E-3	9.34362E-2	2.72985E1	-3.26873E1	-3.26032E1	2.6792E1	1.20158E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.99686E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16727E-1	-7.98702E-1	-9.13131E0	-9.14233E0	5.126E-3	9.36031E-2	2.72991E1	-3.26657E1	-3.2608E1	2.67878E1	1.20069E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16774E-1	-7.98392E-1	-9.13124E0	-9.14242E0	5.10216E-3	9.32932E-2	2.72962E1	-3.26402E1	-3.26284E1	2.68123E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16679E-1	-7.98631E-1	-9.13126E0	-9.14214E0	4.98295E-3	9.39131E-2	2.73358E1	-3.2682E1	-3.26107E1	2.6807E1	1.20363E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.1706E-1	-7.9844E-1	-9.13143E0	-9.14202E0	4.93526E-3	9.34124E-2	2.73299E1	-3.26673E1	-3.2659E1	2.68117E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1