[Scan]
initial_time=2016-01-28T18:36:06
final_time=2016-01-28T18:36:27
ip_count=19
run=1026
dataset=4
scan=280
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.38393E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.99056E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.8734E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-1.21009E-10
mult1=-1.00294E-8
mult2=-2.75853E-9
rf_tmon=-3.78543E-3
rf_agc=3.42649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.70064E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67646E0
bslens_imon=2.59448E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19578E1
lens5a_imon=1.98354E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05177E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.08938E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02106E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.26621E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40929E0
lens1_imon=2.77813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03843E1
cs_ea2_imon=1.40909E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.99423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.19981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.42687E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24047E0
cs_ionrep_imon=9.80819E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.04639E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.16795E-8
tplens_vset=1.4E-1
tplens_vmon=1.58879E0
tplens_imon=-1.8596E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.49981E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.99594E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2925E0
ionrepsh_imon=9.2095E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18335E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46635E0
os_ea2_imon=-5.23873E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.37806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.28753E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.08844E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.20707E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.48072E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.05899E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.76498E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.50524E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.69719E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.51626E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24114E0
defgridb_imon=6.12788E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.41171E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07089E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61664E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30514E1
cs_fil1_imon=9.24556E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3617E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62154E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41026E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.54195E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.10038E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17156E-1	-7.9844E-1	-9.13188E0	-9.14187E0	5.17368E-3	9.34839E-2	2.73405E1	-3.26296E1	-3.26302E1	2.67938E1	1.20137E-7	2.52473E-3	2.52473E-3	6.3074E-3	2.99613E-1
2.0E0	5.0E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.1718E-1	-7.98488E-1	-9.13148E0	-9.14187E0	5.05447E-3	9.35793E-2	2.72606E1	-3.26699E1	-3.26398E1	2.68118E1	1.19705E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.17227E-1	-7.98488E-1	-9.13167E0	-9.14187E0	4.72069E-3	9.35316E-2	2.72987E1	-3.26619E1	-3.26388E1	2.68034E1	1.20226E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.01347E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.17037E-1	-7.98416E-1	-9.13193E0	-9.1418E0	4.86374E-3	9.3317E-2	2.73051E1	-3.26825E1	-3.25936E1	2.68099E1	1.2026E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16727E-1	-7.98535E-1	-9.13165E0	-9.14183E0	5.26905E-3	9.35555E-2	2.7308E1	-3.26319E1	-3.27222E1	2.67914E1	1.20414E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16512E-1	-7.98488E-1	-9.13177E0	-9.14173E0	4.88758E-3	9.3627E-2	2.72751E1	-3.26799E1	-3.26407E1	2.68184E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16631E-1	-7.98845E-1	-9.13165E0	-9.14237E0	4.76837E-3	9.35078E-2	2.73092E1	-3.26113E1	-3.25511E1	2.67986E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09325E0	-8.16679E-1	-7.98678E-1	-9.13153E0	-9.14204E0	4.93526E-3	9.35793E-2	2.73219E1	-3.26302E1	-3.2638E1	2.68232E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.16703E-1	-7.98655E-1	-9.13172E0	-9.14171E0	5.07832E-3	9.377E-2	2.73183E1	-3.26416E1	-3.265E1	2.68136E1	1.19601E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.16894E-1	-7.98368E-1	-9.13141E0	-9.14195E0	4.93526E-3	9.36031E-2	2.72727E1	-3.26741E1	-3.26242E1	2.68094E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16965E-1	-7.9844E-1	-9.13148E0	-9.14176E0	5.126E-3	9.38177E-2	2.73021E1	-3.26681E1	-3.2605E1	2.68094E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16894E-1	-7.98297E-1	-9.13138E0	-9.14192E0	5.03063E-3	9.40561E-2	2.72967E1	-3.26404E1	-3.26597E1	2.6789E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16655E-1	-7.98225E-1	-9.13155E0	-9.14209E0	4.81606E-3	9.3627E-2	2.72889E1	-3.26819E1	-3.25197E1	2.68034E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16751E-1	-7.98392E-1	-9.13155E0	-9.14195E0	4.81606E-3	9.36508E-2	2.73303E1	-3.26554E1	-3.26819E1	2.68376E1	1.19653E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.1656E-1	-7.98607E-1	-9.13146E0	-9.14233E0	4.86374E-3	9.35793E-2	2.73004E1	-3.26644E1	-3.25829E1	2.67995E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16655E-1	-7.98416E-1	-9.13177E0	-9.14202E0	4.62532E-3	9.3627E-2	2.73204E1	-3.26773E1	-3.26986E1	2.67968E1	1.20055E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.01738E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16607E-1	-7.98416E-1	-9.13169E0	-9.14211E0	4.91142E-3	9.34362E-2	2.7292E1	-3.26744E1	-3.26454E1	2.67842E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16751E-1	-7.98774E-1	-9.13172E0	-9.14211E0	4.69685E-3	9.36031E-2	2.72677E1	-3.26329E1	-3.25692E1	2.67839E1	1.19933E-7	2.51593E-3	2.51593E-3	6.31283E-3	3.02454E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16965E-1	-7.98583E-1	-9.1316E0	-9.14214E0	5.03063E-3	9.34601E-2	2.73363E1	-3.26188E1	-3.26831E1	2.68004E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16655E-1	-7.98392E-1	-9.13146E0	-9.14214E0	5.17368E-3	9.32693E-2	2.72835E1	-3.26543E1	-3.2647E1	2.68184E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1