[Scan]
initial_time=2016-01-28T18:37:32
final_time=2016-01-28T18:37:53
ip_count=19
run=1026
dataset=4
scan=283
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.38255E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.01323E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=4.45938E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.21546E-10
mult1=-9.76447E-9
mult2=-2.70464E-9
rf_tmon=-7.82898E-3
rf_agc=3.16392E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.71715E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19223E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.10091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=1.23828E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41739E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64326E1
os_ef1alow_imon=2.95603E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.41171E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.00541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.19591E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.43425E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18367E0
cs_ionrep_imon=9.81674E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.04495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.15688E-8
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98222E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.9853E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=9.3637E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45207E0
os_ea2_imon=-8.05023E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.3777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72793E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.23174E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.4494E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.0734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=6.73392E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.5888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33167E1
os_fil1_imon=9.40588E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61753E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3054E1
cs_fil1_imon=9.24917E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37191E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62563E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41504E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21593E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16369E-1	-7.98726E-1	-9.13131E0	-9.14218E0	4.8399E-3	9.36985E-2	2.73535E1	-3.26596E1	-3.26437E1	2.68198E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02253E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16488E-1	-7.98488E-1	-9.13167E0	-9.14192E0	5.05447E-3	9.35555E-2	2.72886E1	-3.26193E1	-3.26572E1	2.68051E1	1.20106E-7	2.50989E-3	2.50989E-3	6.29128E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16584E-1	-7.98464E-1	-9.13167E0	-9.14185E0	5.00679E-3	9.37939E-2	2.73068E1	-3.26334E1	-3.26636E1	2.68042E1	1.20191E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.01475E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16774E-1	-7.98464E-1	-9.13141E0	-9.14228E0	4.98295E-3	9.35316E-2	2.73201E1	-3.26687E1	-3.25966E1	2.68052E1	1.1993E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16822E-1	-7.98202E-1	-9.13134E0	-9.14209E0	5.07832E-3	9.36031E-2	2.73358E1	-3.26691E1	-3.26083E1	2.67992E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17037E-1	-7.98416E-1	-9.13146E0	-9.14202E0	4.95911E-3	9.34124E-2	2.72582E1	-3.26675E1	-3.2626E1	2.67992E1	1.19939E-7	2.51716E-3	2.51716E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.1687E-1	-7.98535E-1	-9.13162E0	-9.14209E0	4.76837E-3	9.38416E-2	2.72773E1	-3.2659E1	-3.26567E1	2.68227E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.17037E-1	-7.98535E-1	-9.13117E0	-9.14197E0	5.26905E-3	9.38177E-2	2.7297E1	-3.26379E1	-3.25773E1	2.68132E1	1.1993E-7	2.52301E-3	2.52301E-3	6.3282E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16703E-1	-7.98416E-1	-9.13141E0	-9.14221E0	4.79221E-3	9.34601E-2	2.7288E1	-3.26449E1	-3.26313E1	2.68192E1	1.19991E-7	2.52407E-3	2.52407E-3	6.33592E-3	2.95948E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16774E-1	-7.98368E-1	-9.13143E0	-9.14209E0	4.74453E-3	9.34124E-2	2.7292E1	-3.26824E1	-3.2638E1	2.68262E1	1.20042E-7	2.51709E-3	2.51709E-3	6.30212E-3	2.98342E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16584E-1	-7.98392E-1	-9.1315E0	-9.14192E0	4.60148E-3	9.36031E-2	2.7322E1	-3.26812E1	-3.2637E1	2.67985E1	1.19941E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99343E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16631E-1	-7.98297E-1	-9.13134E0	-9.1419E0	4.72069E-3	9.34362E-2	2.72632E1	-3.26437E1	-3.26313E1	2.68001E1	1.19626E-7	2.51911E-3	2.51911E-3	6.31925E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16369E-1	-7.98321E-1	-9.1315E0	-9.1419E0	4.72069E-3	9.35078E-2	2.73033E1	-3.26944E1	-3.26891E1	2.68148E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16607E-1	-7.98273E-1	-9.13162E0	-9.14171E0	4.62532E-3	9.33886E-2	2.73045E1	-3.26573E1	-3.26254E1	2.67872E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16369E-1	-7.98392E-1	-9.1315E0	-9.14195E0	4.69685E-3	9.35078E-2	2.72721E1	-3.26579E1	-3.2641E1	2.68028E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.1656E-1	-7.98464E-1	-9.13122E0	-9.14204E0	4.52995E-3	9.34124E-2	2.72805E1	-3.26621E1	-3.26308E1	2.67571E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16512E-1	-7.98702E-1	-9.13143E0	-9.14199E0	5.03063E-3	9.37223E-2	2.72847E1	-3.26518E1	-3.26344E1	2.68058E1	1.20226E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16417E-1	-7.98702E-1	-9.13131E0	-9.14178E0	5.10216E-3	9.34124E-2	2.72715E1	-3.26266E1	-3.26472E1	2.68094E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16369E-1	-7.98368E-1	-9.13141E0	-9.14209E0	5.14984E-3	9.37939E-2	2.73134E1	-3.26697E1	-3.2652E1	2.67764E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16298E-1	-7.98655E-1	-9.1316E0	-9.14192E0	4.93526E-3	9.36747E-2	2.72793E1	-3.26404E1	-3.26386E1	2.67902E1	1.20363E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.02769E-1