[Scan]
initial_time=2016-01-28T18:38:28
final_time=2016-01-28T18:38:48
ip_count=19
run=1026
dataset=4
scan=285
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.38182E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.9824E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.87657E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-1.1059E-10
mult1=-9.58386E-9
mult2=-2.69665E-9
rf_tmon=-1.97093E-3
rf_agc=3.59952E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.68879E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.96072E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.10343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.23613E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.57741E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.42935E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.19559E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.2758E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.44883E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=2.04062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.16181E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02882E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.9533E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=9.4124E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47561E0
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67391E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7266E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.22551E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.43694E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0965E0
cs_ionaccel_imon=-1.19233E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.37831E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07996E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30526E1
cs_fil1_imon=9.25746E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33046E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62023E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.61718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43985E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16607E-1	-7.98488E-1	-9.13146E0	-9.14195E0	5.03063E-3	9.36985E-2	2.72865E1	-3.26458E1	-3.26717E1	2.67986E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16679E-1	-7.98607E-1	-9.13119E0	-9.14183E0	5.22137E-3	9.33409E-2	2.72919E1	-3.26494E1	-3.26344E1	2.68016E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.1656E-1	-7.98345E-1	-9.13117E0	-9.14185E0	4.8399E-3	9.35316E-2	2.73423E1	-3.26673E1	-3.2616E1	2.67978E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16822E-1	-7.9875E-1	-9.13117E0	-9.14185E0	4.64916E-3	9.34839E-2	2.72927E1	-3.26585E1	-3.26178E1	2.68292E1	1.20311E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.1687E-1	-7.98655E-1	-9.13115E0	-9.14197E0	5.03063E-3	9.33409E-2	2.73003E1	-3.26681E1	-3.26014E1	2.67728E1	1.2026E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.16607E-1	-7.98702E-1	-9.13105E0	-9.14214E0	4.673E-3	9.34362E-2	2.73016E1	-3.26797E1	-3.26531E1	2.67873E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.16464E-1	-7.98607E-1	-9.13138E0	-9.14161E0	4.72069E-3	9.34601E-2	2.72784E1	-3.26666E1	-3.2626E1	2.68175E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.1656E-1	-7.98488E-1	-9.13119E0	-9.14202E0	4.86374E-3	9.33886E-2	2.72608E1	-3.26435E1	-3.26316E1	2.68032E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16584E-1	-7.98631E-1	-9.13136E0	-9.14202E0	4.79221E-3	9.33647E-2	2.73016E1	-3.26638E1	-3.26142E1	2.68106E1	1.19991E-7	2.51952E-3	2.51952E-3	6.27901E-3	3.01881E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16917E-1	-7.98583E-1	-9.13122E0	-9.14171E0	4.79221E-3	9.3317E-2	2.73165E1	-3.26717E1	-3.26104E1	2.67932E1	1.19646E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16727E-1	-7.98655E-1	-9.13129E0	-9.14164E0	5.14984E-3	9.33409E-2	2.73302E1	-3.26817E1	-3.25942E1	2.68016E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16798E-1	-7.98416E-1	-9.13181E0	-9.1419E0	4.62532E-3	9.32932E-2	2.73021E1	-3.2649E1	-3.26236E1	2.68022E1	1.19766E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16512E-1	-7.98273E-1	-9.13179E0	-9.14195E0	4.93526E-3	9.32217E-2	2.73249E1	-3.26819E1	-3.2593E1	2.67962E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16798E-1	-7.98559E-1	-9.13162E0	-9.14192E0	4.86374E-3	9.34601E-2	2.73057E1	-3.26699E1	-3.26278E1	2.67938E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16751E-1	-7.98512E-1	-9.13146E0	-9.14195E0	4.673E-3	9.35793E-2	2.73544E1	-3.26717E1	-3.25779E1	2.68274E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16679E-1	-7.98535E-1	-9.13134E0	-9.14187E0	4.673E-3	9.36508E-2	2.73003E1	-3.26621E1	-3.25803E1	2.68593E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16631E-1	-7.98798E-1	-9.13131E0	-9.14171E0	4.86374E-3	9.38654E-2	2.72898E1	-3.2639E1	-3.26496E1	2.6814E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.1656E-1	-7.98798E-1	-9.13138E0	-9.14197E0	4.74453E-3	9.39369E-2	2.73123E1	-3.26579E1	-3.2653E1	2.67992E1	1.20311E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-8.16536E-1	-7.98893E-1	-9.13148E0	-9.14192E0	5.07832E-3	9.36031E-2	2.72839E1	-3.26455E1	-3.26172E1	2.67782E1	1.20487E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.1656E-1	-7.98726E-1	-9.13129E0	-9.14197E0	5.00679E-3	9.35316E-2	2.7266E1	-3.26518E1	-3.26302E1	2.68268E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0148E-1