[Scan]
initial_time=2016-01-28T18:39:22
final_time=2016-01-28T18:39:42
ip_count=19
run=1026
dataset=4
scan=287
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37862E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.03193E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.32277E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.01614E-10
mult1=-9.86079E-9
mult2=-2.73258E-9
rf_tmon=-3.44896E-3
rf_agc=3.38683E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.7095E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12442E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=3.11461E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=1.25091E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44826E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.40195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.20129E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11027E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.41062E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28214E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93568E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.04747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.16842E-8
tplens_vset=1.4E-1
tplens_vmon=1.63723E0
tplens_imon=-1.80383E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=4.0064E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=9.09877E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34162E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43895E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.38382E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.20968E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.47355E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17699E0
cs_ionaccel_imon=-1.13107E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.64484E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86837E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.95022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.36546E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6099E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30491E1
cs_fil1_imon=9.25602E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31064E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62255E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79248E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.44586E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16751E-1	-7.98488E-1	-9.13117E0	-9.14197E0	4.93526E-3	9.38416E-2	2.72886E1	-3.26484E1	-3.26213E1	2.68076E1	1.19861E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00302E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16751E-1	-7.98297E-1	-9.13126E0	-9.14216E0	4.74453E-3	9.377E-2	2.7302E1	-3.2675E1	-3.26254E1	2.68028E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16798E-1	-7.98178E-1	-9.13136E0	-9.14199E0	4.93526E-3	9.33886E-2	2.73246E1	-3.26679E1	-3.26449E1	2.67986E1	1.19925E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.01209E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16703E-1	-7.98392E-1	-9.13136E0	-9.14228E0	4.8399E-3	9.34124E-2	2.72768E1	-3.26756E1	-3.26685E1	2.68012E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.97647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16631E-1	-7.98273E-1	-9.13136E0	-9.14216E0	4.86374E-3	9.35793E-2	2.72738E1	-3.26396E1	-3.26915E1	2.67998E1	1.20394E-7	2.51603E-3	2.51603E-3	6.33388E-3	2.98342E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16512E-1	-7.98368E-1	-9.13138E0	-9.14207E0	5.22137E-3	9.34601E-2	2.73027E1	-3.26356E1	-3.26308E1	2.67878E1	1.19991E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9887E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16417E-1	-7.98535E-1	-9.13138E0	-9.14192E0	4.93526E-3	9.36985E-2	2.73189E1	-3.26308E1	-3.26218E1	2.68058E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16607E-1	-7.98607E-1	-9.13148E0	-9.14216E0	4.86374E-3	9.34839E-2	2.72715E1	-3.27035E1	-3.26122E1	2.67812E1	1.20209E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16274E-1	-7.98297E-1	-9.13146E0	-9.14192E0	5.10216E-3	9.37462E-2	2.73171E1	-3.26723E1	-3.26494E1	2.6831E1	1.19978E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.02545E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16655E-1	-7.98607E-1	-9.1315E0	-9.14207E0	5.07832E-3	9.37462E-2	2.7257E1	-3.26639E1	-3.25924E1	2.6795E1	1.20311E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16584E-1	-7.98559E-1	-9.13162E0	-9.14223E0	5.07832E-3	9.37462E-2	2.73039E1	-3.26703E1	-3.26213E1	2.67943E1	1.20069E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16584E-1	-7.98726E-1	-9.13146E0	-9.14161E0	5.22137E-3	9.34839E-2	2.73157E1	-3.26661E1	-3.2603E1	2.67848E1	1.20122E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.97963E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16488E-1	-7.98392E-1	-9.13131E0	-9.14185E0	5.19753E-3	9.35555E-2	2.73045E1	-3.2662E1	-3.26384E1	2.68059E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16655E-1	-7.98631E-1	-9.13153E0	-9.14185E0	4.95911E-3	9.37223E-2	2.73375E1	-3.2663E1	-3.26254E1	2.68117E1	1.20016E-7	2.51972E-3	2.51972E-3	6.3074E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16369E-1	-7.98702E-1	-9.13126E0	-9.14183E0	5.05447E-3	9.3627E-2	2.72943E1	-3.26616E1	-3.26515E1	2.68057E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1656E-1	-7.9844E-1	-9.13153E0	-9.14173E0	5.03063E-3	9.35316E-2	2.73171E1	-3.26663E1	-3.25437E1	2.68154E1	1.19937E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.01065E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16822E-1	-7.98631E-1	-9.13129E0	-9.14202E0	4.98295E-3	9.33409E-2	2.73405E1	-3.26685E1	-3.26207E1	2.6834E1	1.20403E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16655E-1	-7.98392E-1	-9.1316E0	-9.14187E0	4.81606E-3	9.34601E-2	2.72638E1	-3.26101E1	-3.26508E1	2.67798E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16727E-1	-7.98392E-1	-9.13138E0	-9.14168E0	4.79221E-3	9.34124E-2	2.73243E1	-3.26783E1	-3.26446E1	2.67884E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16536E-1	-7.98655E-1	-9.1315E0	-9.14183E0	5.05447E-3	9.37223E-2	2.73021E1	-3.26753E1	-3.26182E1	2.6789E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1