[Scan]
initial_time=2016-01-28T18:39:50
final_time=2016-01-28T18:40:10
ip_count=19
run=1026
dataset=4
scan=288
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.3815E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.94718E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.98219E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-1.17934E-10
mult1=-9.83671E-9
mult2=-2.79646E-9
rf_tmon=-6.3149E-3
rf_agc=3.24083E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.71406E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64617E0
bslens_imon=2.37489E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20171E1
lens5a_imon=1.97576E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05073E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53593E1
cs_ef1b_imon=3.09364E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02129E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05103E1
cs_ea1_imon=1.23755E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41709E0
lens1_imon=2.86347E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64816E1
os_ef1alow_imon=2.98116E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0383E1
cs_ea2_imon=1.40702E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.99206E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.19806E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11175E1
os_restr1_imon=4.31504E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.42578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.0664E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22474E0
cs_ionrep_imon=9.70737E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01711E1
cs_anode1_imon=2.05752E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.16276E-8
tplens_vset=1.4E-1
tplens_vmon=1.62108E0
tplens_imon=-2.77928E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2605E1
iondef3_imon=1.49596E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.57344E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.98338E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27118E0
ionrepsh_imon=9.30658E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33524E1
lens5b_imon=2.17958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74722E1
cs_ef2b_imon=3.11856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45504E0
os_ea2_imon=-6.59629E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71245E1
cs_ef2a_imon=3.20263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07726E0
os_ef2alow_imon=-2.56833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71908E-1
os_ef2bup_imon=-5.51089E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10844E1
os_restr2_imon=3.36572E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.31837E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01945E1
cs_anode2_imon=2.09527E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.08639E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.08678E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.21758E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.4446E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11911E0
cs_ionaccel_imon=-1.20214E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47288E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.58664E-6
window_vset=0.0E0
window_vmon=1.67271E-1
window_imon=-9.41352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.38975E-4
mask2_vset=0.0E0
mask2_vmon=-1.86604E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.53931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=7.08508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.15761E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44279E0
defgridb_imon=6.11175E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.36822E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06732E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61407E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30504E1
cs_fil1_imon=9.24023E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31468E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46746E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07036E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.60921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33287E-1
cs_fil2_imon=-2.6393E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21607E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2695E-1
res40_imon=-2.43988E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16774E-1	-7.98416E-1	-9.13169E0	-9.14178E0	5.22137E-3	9.34601E-2	2.72774E1	-3.26708E1	-3.26148E1	2.68262E1	1.20005E-7	2.51874E-3	2.51874E-3	6.33648E-3	3.0286E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16798E-1	-7.98512E-1	-9.13184E0	-9.14199E0	5.126E-3	9.35316E-2	2.73228E1	-3.26799E1	-3.26181E1	2.67776E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16679E-1	-7.98392E-1	-9.13157E0	-9.1423E0	5.00679E-3	9.35078E-2	2.72927E1	-3.26555E1	-3.26555E1	2.67827E1	1.20031E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.02545E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.16536E-1	-7.9844E-1	-9.13181E0	-9.14185E0	4.86374E-3	9.32217E-2	2.72763E1	-3.26524E1	-3.25906E1	2.68214E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.03545E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09248E0	-8.16607E-1	-7.98917E-1	-9.13184E0	-9.14233E0	4.8399E-3	9.34124E-2	2.73074E1	-3.26761E1	-3.26306E1	2.67679E1	1.20414E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-8.16679E-1	-7.98988E-1	-9.132E0	-9.14207E0	4.93526E-3	9.32932E-2	2.7302E1	-3.2637E1	-3.25917E1	2.68001E1	1.19979E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.00989E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16655E-1	-7.98845E-1	-9.13179E0	-9.14226E0	4.93526E-3	9.36747E-2	2.73171E1	-3.26675E1	-3.26074E1	2.68184E1	1.20262E-7	2.52066E-3	2.52066E-3	6.33021E-3	3.00251E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16512E-1	-7.98631E-1	-9.13186E0	-9.14226E0	4.79221E-3	9.37223E-2	2.72889E1	-3.26506E1	-3.26434E1	2.6822E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16774E-1	-7.98678E-1	-9.13181E0	-9.14216E0	4.98295E-3	9.36985E-2	2.73069E1	-3.26488E1	-3.26957E1	2.68112E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16751E-1	-7.98321E-1	-9.13157E0	-9.14176E0	4.98295E-3	9.40561E-2	2.72856E1	-3.26685E1	-3.26384E1	2.68142E1	1.2026E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99941E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16417E-1	-7.98392E-1	-9.1315E0	-9.14199E0	4.86374E-3	9.36508E-2	2.72941E1	-3.26413E1	-3.26462E1	2.6801E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16226E-1	-7.98464E-1	-9.13117E0	-9.14249E0	5.29289E-3	9.35793E-2	2.7311E1	-3.26534E1	-3.26415E1	2.68001E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16321E-1	-7.98631E-1	-9.13141E0	-9.14211E0	5.126E-3	9.37462E-2	2.73424E1	-3.26675E1	-3.2587E1	2.68188E1	1.20041E-7	2.51352E-3	2.51352E-3	6.30323E-3	3.0131E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16393E-1	-7.98869E-1	-9.13134E0	-9.14168E0	4.93526E-3	9.36031E-2	2.73099E1	-3.26627E1	-3.26518E1	2.67926E1	1.20191E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.04156E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.16584E-1	-7.98774E-1	-9.13146E0	-9.14159E0	5.07832E-3	9.35793E-2	2.73087E1	-3.26368E1	-3.26428E1	2.68142E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16464E-1	-7.98488E-1	-9.13143E0	-9.14209E0	5.22137E-3	9.37462E-2	2.72744E1	-3.26562E1	-3.26431E1	2.68071E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.1625E-1	-7.98726E-1	-9.13131E0	-9.14166E0	5.00679E-3	9.37939E-2	2.73309E1	-3.26494E1	-3.26434E1	2.68016E1	1.20028E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01981E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16846E-1	-7.98631E-1	-9.13138E0	-9.1418E0	5.05447E-3	9.38892E-2	2.73375E1	-3.26854E1	-3.26223E1	2.682E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.0041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16822E-1	-7.98249E-1	-9.13117E0	-9.14178E0	4.72069E-3	9.3627E-2	2.73228E1	-3.26856E1	-3.25989E1	2.67949E1	1.20244E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.1687E-1	-7.98512E-1	-9.13131E0	-9.14173E0	4.8399E-3	9.33886E-2	2.72907E1	-3.2653E1	-3.2605E1	2.68214E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.0071E-1