[Scan]
initial_time=2016-01-28T18:40:17
final_time=2016-01-28T18:40:37
ip_count=19
run=1026
dataset=4
scan=289
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.37996E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.99625E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=3.8898E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.12808E-10
mult1=-9.60794E-9
mult2=-2.79846E-9
rf_tmon=-3.84551E-3
rf_agc=3.30151E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.70289E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.96469E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04862E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0509E1
cs_ea1_imon=1.25884E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39779E0
lens1_imon=2.77928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.41529E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=3.0036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.19863E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.40954E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=9.66475E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91842E2
cs_nozzle_imon=1.93171E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.04026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.15911E-8
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25635E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.57787E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98317E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.96949E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=9.42682E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47561E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.37733E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.07426E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.23019E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.44783E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.50177E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.27106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.42389E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.41849E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07473E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6156E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30547E1
cs_fil1_imon=9.25421E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32446E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62562E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51406E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40051E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26985E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45787E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.16822E-1	-7.98607E-1	-9.13141E0	-9.14173E0	5.31673E-3	9.36031E-2	2.7275E1	-3.26673E1	-3.26484E1	2.6795E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01609E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16727E-1	-7.98655E-1	-9.13124E0	-9.14166E0	5.126E-3	9.35793E-2	2.73087E1	-3.26819E1	-3.26206E1	2.68142E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16774E-1	-7.98488E-1	-9.13124E0	-9.14199E0	5.24521E-3	9.38177E-2	2.73514E1	-3.26711E1	-3.25767E1	2.6789E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16917E-1	-7.98702E-1	-9.13115E0	-9.14214E0	4.93526E-3	9.38177E-2	2.7254E1	-3.26687E1	-3.26969E1	2.68052E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16751E-1	-7.98631E-1	-9.13167E0	-9.14218E0	4.74453E-3	9.36031E-2	2.73281E1	-3.26856E1	-3.25871E1	2.67972E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09309E0	-8.16941E-1	-7.98392E-1	-9.1315E0	-9.14226E0	4.72069E-3	9.34124E-2	2.72714E1	-3.26407E1	-3.27227E1	2.68101E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.16798E-1	-7.9844E-1	-9.13179E0	-9.14204E0	4.93526E-3	9.35316E-2	2.7337E1	-3.27021E1	-3.25741E1	2.67682E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16488E-1	-7.98559E-1	-9.13126E0	-9.14199E0	5.07832E-3	9.37223E-2	2.72781E1	-3.26645E1	-3.26308E1	2.6816E1	1.2033E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.1656E-1	-7.98273E-1	-9.13148E0	-9.14216E0	5.14984E-3	9.36031E-2	2.73219E1	-3.26801E1	-3.26314E1	2.68238E1	1.19953E-7	2.51525E-3	2.51525E-3	6.36144E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.16298E-1	-7.98368E-1	-9.13143E0	-9.1423E0	4.673E-3	9.3627E-2	2.72889E1	-3.26837E1	-3.2611E1	2.68184E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16607E-1	-7.9844E-1	-9.13136E0	-9.14223E0	4.69685E-3	9.35316E-2	2.72913E1	-3.26747E1	-3.26488E1	2.67962E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16679E-1	-7.98512E-1	-9.13162E0	-9.14211E0	4.74453E-3	9.36985E-2	2.73033E1	-3.2652E1	-3.26207E1	2.67884E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16679E-1	-7.98583E-1	-9.1315E0	-9.14195E0	4.673E-3	9.34839E-2	2.72967E1	-3.2647E1	-3.26729E1	2.68214E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09309E0	-8.16607E-1	-7.9875E-1	-9.13162E0	-9.14209E0	4.57764E-3	9.38654E-2	2.73159E1	-3.26609E1	-3.26416E1	2.68146E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02133E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16607E-1	-7.98488E-1	-9.13119E0	-9.14233E0	4.76837E-3	9.35793E-2	2.73004E1	-3.26791E1	-3.26927E1	2.67806E1	1.20311E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16751E-1	-7.98488E-1	-9.13138E0	-9.14218E0	4.48227E-3	9.36031E-2	2.73195E1	-3.26404E1	-3.25257E1	2.68142E1	1.20069E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00302E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16584E-1	-7.98392E-1	-9.13134E0	-9.14199E0	4.74453E-3	9.35316E-2	2.72823E1	-3.26476E1	-3.26633E1	2.6795E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16488E-1	-7.98273E-1	-9.1315E0	-9.14178E0	4.72069E-3	9.3627E-2	2.73104E1	-3.2649E1	-3.26301E1	2.68118E1	1.19749E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16727E-1	-7.98464E-1	-9.13141E0	-9.14202E0	4.74453E-3	9.36508E-2	2.72992E1	-3.26649E1	-3.2672E1	2.67943E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16727E-1	-7.97915E-1	-9.13174E0	-9.1419E0	4.673E-3	9.36031E-2	2.72931E1	-3.26795E1	-3.25635E1	2.67914E1	1.19953E-7	2.51847E-3	2.51847E-3	6.26985E-3	2.98156E-1