[Scan]
initial_time=2016-01-28T18:40:45
final_time=2016-01-28T18:41:05
ip_count=19
run=1026
dataset=4
scan=290
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37811E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.99739E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.63517E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.34766E-10
mult1=-9.0827E-9
mult2=-2.76667E-9
rf_tmon=-5.05419E-3
rf_agc=3.27101E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.72377E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19164E1
lens5a_imon=1.97306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.10971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=1.24359E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40677E0
lens1_imon=2.5114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64881E1
os_ef1alow_imon=2.9648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04109E1
cs_ea2_imon=1.42906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84215E1
cs_ef1a_imon=3.00302E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.19995E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.42151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=9.60084E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=2.0515E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.17099E-8
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.56532E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.97878E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=9.51235E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33469E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.11493E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48452E0
os_ea2_imon=-7.55471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7102E1
cs_ef2a_imon=3.19938E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08004E0
os_ef2alow_imon=-2.72749E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95493E-1
os_ef2bup_imon=-5.44167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11077E1
os_restr2_imon=3.3853E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.08451E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72922E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68119E1
iondef4_imon=1.07982E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=6.22377E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.46213E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06179E0
cs_ionaccel_imon=-1.03505E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56098E1
einzel_imon=7.59748E-6
window_vset=0.0E0
window_vmon=1.75404E-1
window_imon=-1.01767E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86373E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.0737E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.45596E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36422E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33188E1
os_fil1_imon=9.41841E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07451E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61529E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30553E1
cs_fil1_imon=9.23538E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31869E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62379E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.73869E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.33405E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36019E-1
cs_fil2_imon=-2.5881E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.71315E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2161E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10756E-1
res40_imon=-2.49465E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16917E-1	-7.98631E-1	-9.13157E0	-9.14197E0	4.8399E-3	9.35316E-2	2.72957E1	-3.26596E1	-3.27127E1	2.6789E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.98665E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16798E-1	-7.98464E-1	-9.13165E0	-9.14204E0	4.81606E-3	9.34362E-2	2.72789E1	-3.26784E1	-3.26347E1	2.68302E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1687E-1	-7.98631E-1	-9.13165E0	-9.14197E0	4.86374E-3	9.38177E-2	2.73428E1	-3.26805E1	-3.26729E1	2.68117E1	1.20137E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01742E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16917E-1	-7.98655E-1	-9.13134E0	-9.14195E0	4.93526E-3	9.35555E-2	2.73151E1	-3.26278E1	-3.25682E1	2.68198E1	1.20311E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16703E-1	-7.98416E-1	-9.1315E0	-9.14192E0	4.98295E-3	9.3627E-2	2.72811E1	-3.26819E1	-3.27035E1	2.67992E1	1.20092E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.99343E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.1656E-1	-7.98512E-1	-9.13124E0	-9.1418E0	4.81606E-3	9.35793E-2	2.7321E1	-3.26352E1	-3.2563E1	2.68288E1	1.19872E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16774E-1	-7.98774E-1	-9.13124E0	-9.14195E0	4.79221E-3	9.36985E-2	2.72691E1	-3.26396E1	-3.26815E1	2.68001E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16965E-1	-7.98535E-1	-9.13122E0	-9.14214E0	4.79221E-3	9.377E-2	2.73327E1	-3.26494E1	-3.25353E1	2.68034E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17037E-1	-7.98082E-1	-9.13146E0	-9.14214E0	4.93526E-3	9.37223E-2	2.73008E1	-3.26493E1	-3.27289E1	2.681E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.9892E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16703E-1	-7.98321E-1	-9.13095E0	-9.14195E0	4.673E-3	9.36985E-2	2.72919E1	-3.26603E1	-3.25677E1	2.67695E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16631E-1	-7.98392E-1	-9.1315E0	-9.14199E0	4.95911E-3	9.37223E-2	2.73057E1	-3.26909E1	-3.26832E1	2.68262E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16846E-1	-7.98297E-1	-9.13141E0	-9.14192E0	4.98295E-3	9.36031E-2	2.72761E1	-3.26619E1	-3.26422E1	2.67955E1	1.19902E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16822E-1	-7.98583E-1	-9.13143E0	-9.14216E0	5.19753E-3	9.37462E-2	2.73204E1	-3.26349E1	-3.26502E1	2.68011E1	1.19841E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.99093E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16536E-1	-7.98321E-1	-9.13148E0	-9.1419E0	4.95911E-3	9.34124E-2	2.73075E1	-3.26536E1	-3.26254E1	2.67845E1	1.19674E-7	2.50949E-3	2.50949E-3	6.31902E-3	2.9871E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16584E-1	-7.98202E-1	-9.13103E0	-9.14185E0	4.91142E-3	9.35555E-2	2.73086E1	-3.26667E1	-3.26166E1	2.68184E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16607E-1	-7.98178E-1	-9.13122E0	-9.14204E0	4.8399E-3	9.34839E-2	2.72949E1	-3.26669E1	-3.2641E1	2.67926E1	1.20226E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.98222E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16488E-1	-7.98225E-1	-9.13124E0	-9.14199E0	4.88758E-3	9.34601E-2	2.7364E1	-3.26374E1	-3.26849E1	2.6804E1	1.20106E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16345E-1	-7.98297E-1	-9.13181E0	-9.1418E0	4.93526E-3	9.37939E-2	2.73576E1	-3.26531E1	-3.26231E1	2.67866E1	1.20017E-7	2.52209E-3	2.52209E-3	6.26916E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16345E-1	-7.98512E-1	-9.13138E0	-9.14207E0	4.8399E-3	9.3627E-2	2.72903E1	-3.27104E1	-3.26419E1	2.67926E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16488E-1	-7.98535E-1	-9.1316E0	-9.1419E0	4.8399E-3	9.35555E-2	2.72922E1	-3.26762E1	-3.2626E1	2.68119E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1