[Scan]
initial_time=2016-01-28T18:43:01
final_time=2016-01-28T18:43:21
ip_count=19
run=1026
dataset=4
scan=295
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.38542E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.99952E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.79395E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.17803E-10
mult1=-9.89692E-9
mult2=-2.84437E-9
rf_tmon=-5.60593E-3
rf_agc=3.19937E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.70133E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62228E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19532E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.10379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02395E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.24406E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.40412E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.20427E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.45604E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21485E0
cs_ionrep_imon=9.58183E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.04423E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.17595E-8
tplens_vset=1.4E-1
tplens_vmon=1.59697E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.52741E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98566E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.01112E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=9.21413E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47621E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72757E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.25174E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.48978E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-1.00853E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.46572E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.41525E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.36982E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33167E1
os_fil1_imon=9.38203E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30583E1
cs_fil1_imon=9.23878E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2704E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62619E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.46121E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21687E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27767E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16727E-1	-7.9844E-1	-9.13157E0	-9.14171E0	5.03063E-3	9.38892E-2	2.73204E1	-3.26673E1	-3.26331E1	2.67995E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16941E-1	-7.98416E-1	-9.1315E0	-9.14195E0	4.8399E-3	9.34124E-2	2.73131E1	-3.26731E1	-3.26187E1	2.68144E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16703E-1	-7.98464E-1	-9.13165E0	-9.14214E0	4.76837E-3	9.377E-2	2.73316E1	-3.26549E1	-3.26201E1	2.67734E1	1.20244E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.0201E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16631E-1	-7.98392E-1	-9.13143E0	-9.14173E0	5.29289E-3	9.36031E-2	2.72895E1	-3.2653E1	-3.26687E1	2.67944E1	1.19902E-7	2.5131E-3	2.5131E-3	6.35059E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16846E-1	-7.98368E-1	-9.13129E0	-9.1419E0	5.10216E-3	9.34839E-2	2.72991E1	-3.26759E1	-3.2617E1	2.67938E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16679E-1	-7.9844E-1	-9.13119E0	-9.14176E0	4.95911E-3	9.36031E-2	2.73193E1	-3.26708E1	-3.26313E1	2.68004E1	1.20278E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16607E-1	-7.98535E-1	-9.13119E0	-9.14173E0	5.29289E-3	9.36508E-2	2.73351E1	-3.26579E1	-3.25569E1	2.68111E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16703E-1	-7.98559E-1	-9.13141E0	-9.14164E0	4.86374E-3	9.36508E-2	2.72715E1	-3.26543E1	-3.26673E1	2.68382E1	1.19902E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16798E-1	-7.98774E-1	-9.1315E0	-9.14187E0	5.05447E-3	9.36508E-2	2.73246E1	-3.26608E1	-3.25723E1	2.68112E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16631E-1	-7.98726E-1	-9.13138E0	-9.14192E0	5.19753E-3	9.3317E-2	2.72666E1	-3.26813E1	-3.26272E1	2.6813E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16274E-1	-7.9844E-1	-9.13143E0	-9.14197E0	4.76837E-3	9.34362E-2	2.73087E1	-3.26789E1	-3.2596E1	2.67653E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16464E-1	-7.98416E-1	-9.13138E0	-9.14195E0	4.81606E-3	9.34124E-2	2.72797E1	-3.26585E1	-3.26437E1	2.67944E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16751E-1	-7.98607E-1	-9.13155E0	-9.14178E0	4.72069E-3	9.36508E-2	2.73454E1	-3.26765E1	-3.26224E1	2.67992E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02769E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16464E-1	-7.98392E-1	-9.13165E0	-9.14237E0	4.673E-3	9.3627E-2	2.7251E1	-3.26705E1	-3.26663E1	2.6777E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16417E-1	-7.98583E-1	-9.1316E0	-9.14192E0	4.76837E-3	9.35555E-2	2.73369E1	-3.26554E1	-3.26854E1	2.6799E1	1.19902E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00197E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16417E-1	-7.9844E-1	-9.13138E0	-9.14216E0	4.79221E-3	9.35555E-2	2.72817E1	-3.27083E1	-3.25605E1	2.68035E1	1.19925E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01475E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16655E-1	-7.98416E-1	-9.13153E0	-9.14166E0	4.76837E-3	9.38416E-2	2.72821E1	-3.26602E1	-3.26496E1	2.68232E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16584E-1	-7.98368E-1	-9.13165E0	-9.14204E0	5.17368E-3	9.37939E-2	2.73417E1	-3.26554E1	-3.26669E1	2.68058E1	1.20106E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.03027E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16703E-1	-7.98249E-1	-9.1315E0	-9.14192E0	4.86374E-3	9.39846E-2	2.72909E1	-3.26472E1	-3.25965E1	2.67902E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02396E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16393E-1	-7.98321E-1	-9.13129E0	-9.14202E0	5.10216E-3	9.36747E-2	2.72757E1	-3.26735E1	-3.26512E1	2.6819E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99686E-1