[Scan]
initial_time=2016-01-28T18:43:55
final_time=2016-01-28T18:44:15
ip_count=19
run=1026
dataset=4
scan=297
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37812E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.02482E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=3.60715E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.17242E-10
mult1=-9.94508E-9
mult2=-2.71661E-9
rf_tmon=-5.42568E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.71529E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61447E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18865E1
lens5a_imon=1.96469E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.1056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=1.2437E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41282E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.40952E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.01261E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.20223E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.43297E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=9.53497E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.04963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.17442E-8
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.97749E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=9.38716E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50745E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04735E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.38058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.24748E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.46312E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.10223E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=8.02089E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.44409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36848E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33232E1
os_fil1_imon=9.40858E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61813E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30491E1
cs_fil1_imon=9.24406E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28121E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62775E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.45476E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50863E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31972E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.1656E-1	-7.98368E-1	-9.13134E0	-9.14192E0	4.88758E-3	9.36031E-2	2.7321E1	-3.26372E1	-3.26343E1	2.67856E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16894E-1	-7.98154E-1	-9.13112E0	-9.14226E0	4.88758E-3	9.34362E-2	2.73244E1	-3.26479E1	-3.2651E1	2.67839E1	1.20055E-7	2.52815E-3	2.52815E-3	6.30202E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16822E-1	-7.9813E-1	-9.13126E0	-9.14178E0	5.10216E-3	9.34124E-2	2.73167E1	-3.2655E1	-3.26173E1	2.68192E1	1.20154E-7	2.51498E-3	2.51498E-3	6.29603E-3	3.01881E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16607E-1	-7.98464E-1	-9.13146E0	-9.14218E0	4.95911E-3	9.35078E-2	2.73243E1	-3.26807E1	-3.2596E1	2.68052E1	1.19891E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-8.16679E-1	-7.98464E-1	-9.13126E0	-9.14218E0	4.98295E-3	9.37223E-2	2.73265E1	-3.26548E1	-3.2656E1	2.6807E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16679E-1	-7.98607E-1	-9.13146E0	-9.14223E0	4.91142E-3	9.37223E-2	2.73193E1	-3.26443E1	-3.26508E1	2.67872E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0934E0	-8.16488E-1	-7.98535E-1	-9.1311E0	-9.14204E0	4.98295E-3	9.35555E-2	2.73275E1	-3.26543E1	-3.25824E1	2.68312E1	1.20174E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.1625E-1	-7.98702E-1	-9.13143E0	-9.14223E0	4.86374E-3	9.377E-2	2.72991E1	-3.26723E1	-3.26416E1	2.67956E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16607E-1	-7.98655E-1	-9.13148E0	-9.14197E0	4.88758E-3	9.3317E-2	2.73022E1	-3.2666E1	-3.25849E1	2.68218E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16226E-1	-7.98583E-1	-9.13148E0	-9.14183E0	5.03063E-3	9.35078E-2	2.72915E1	-3.26496E1	-3.2626E1	2.67792E1	1.20042E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01356E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16536E-1	-7.98821E-1	-9.13148E0	-9.14199E0	4.8399E-3	9.3627E-2	2.73117E1	-3.26585E1	-3.2605E1	2.67968E1	1.19902E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16679E-1	-7.98845E-1	-9.13141E0	-9.14192E0	4.64916E-3	9.34839E-2	2.72943E1	-3.26494E1	-3.26554E1	2.6807E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16321E-1	-7.98774E-1	-9.13119E0	-9.14164E0	4.74453E-3	9.35078E-2	2.72488E1	-3.26634E1	-3.2694E1	2.67926E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16083E-1	-7.98559E-1	-9.13129E0	-9.14223E0	5.00679E-3	9.34362E-2	2.73358E1	-3.2639E1	-3.26136E1	2.68215E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.03081E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16226E-1	-7.98941E-1	-9.13107E0	-9.14209E0	5.31673E-3	9.3317E-2	2.73075E1	-3.26621E1	-3.2638E1	2.67836E1	1.2026E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16417E-1	-7.98678E-1	-9.13124E0	-9.14197E0	5.126E-3	9.34839E-2	2.72847E1	-3.26567E1	-3.26885E1	2.67656E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16488E-1	-7.98798E-1	-9.13143E0	-9.14187E0	5.07832E-3	9.36031E-2	2.73063E1	-3.265E1	-3.26536E1	2.68304E1	1.20278E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16607E-1	-7.98845E-1	-9.13129E0	-9.14216E0	4.98295E-3	9.34839E-2	2.73321E1	-3.26915E1	-3.25731E1	2.6786E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16822E-1	-7.98821E-1	-9.1315E0	-9.14183E0	5.00679E-3	9.32932E-2	2.72962E1	-3.26726E1	-3.26101E1	2.67932E1	1.19653E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16679E-1	-7.98821E-1	-9.13157E0	-9.14202E0	5.22137E-3	9.33409E-2	2.73201E1	-3.2635E1	-3.26386E1	2.68112E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1